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Full-Text Articles in Nanoscience and Nanotechnology

Influence Of Flow Rate, Nozzle Speed, Pitch And The Number Of Passes On The Thickness Of S1805 Photoresist In Suss Microtec As8 Spray Coater, Rohan Sanghvi, Gyuseok Kim Oct 2019

Influence Of Flow Rate, Nozzle Speed, Pitch And The Number Of Passes On The Thickness Of S1805 Photoresist In Suss Microtec As8 Spray Coater, Rohan Sanghvi, Gyuseok Kim

Tool Data

S1805 positive photoresist has been deposited on single crystalline Si wafers using a Suss MicroTec Alta Spray. The influence of flow rate, nozzle speed, pitch and number of passes on the thickness of the photoresist was studied. Results show that the thickness of S1805 is linearly proportional to the flow rate and number of passes, and inversely proportional to the nozzle speed and pitch.


Mechanisms Controlling Friction And Adhesion At The Atomic Length-Scale, Xin Zhou Liu Jan 2015

Mechanisms Controlling Friction And Adhesion At The Atomic Length-Scale, Xin Zhou Liu

Publicly Accessible Penn Dissertations

A lack of understanding of the fundamental mechanisms governing atomic-scale adhesion and friction creates ongoing challenges as technologically-relevant devices are miniaturized. One major class of failure mechanisms of such devices results from high friction, adhesion, and wear. This thesis presents investigations into methods by which atomic-scale friction and adhesion can be controlled. Using atomic force microscopy (AFM), friction and adhesion properties of graphene were examined. While friction between the tip and graphene depends on thickness, as explained by the â??puckering effectâ??, adhesion is independent of the thickness when measured conventionally. However, adhesion is transiently higher when measured after the ...


Carbon Nanopipettes For Advanced Cellular Probing And Microinjection, Sean Eric Anderson Jan 2015

Carbon Nanopipettes For Advanced Cellular Probing And Microinjection, Sean Eric Anderson

Publicly Accessible Penn Dissertations

Carbon nanopipettes (CNPs) consist of a pulled-quartz micropipette with a thin layer of amorphous carbon deposited along its entire interior surface via chemical vapor deposition. The micropipette maintains a continuous fluidic pathway from its nanoscopic tip to its distal macroscopic end, while the insulated carbon film provides an electrical path to the tip that can be used as a working electrode. The quartz at the tip of the CNP can be chemically etched to expose a desired length of a carbon pipe to control the size and characteristics of the electrode. CNPs are inexpensive, batch- fabricated, and can be made ...


Electrical Detection Of Cellular Penetration During Microinjection With Carbon Nanopipettes, Sean E. Anderson, Haim H. Bau Apr 2014

Electrical Detection Of Cellular Penetration During Microinjection With Carbon Nanopipettes, Sean E. Anderson, Haim H. Bau

Departmental Papers (MEAM)

The carbon nanopipette (CNP) is comprised of a pulled-glass pipette terminating with a nanoscale (tens to hundreds of nm) diameter carbon pipe. The entire inner glass surface of the CNP is coated with a carbon film, providing an electrically conductive path from the carbon tip to the distal, macroscopic end of the pipette. The CNP can double as a nanoelectrode, enabling electrical measurements through its carbon lining, and as a nanoinjector, facilitating reagent injection through its hollow bore. With the aid of a lock-in amplifier, we measured, in real time and with millisecond resolution, variations in impedance as the CNP ...


Bubble And Pattern Formation In Liquid Induced By An Electron Beam, Joseph M. Grogan, Nicholas M. Schneider, Frances M. Ross, Haim H. Bau Dec 2013

Bubble And Pattern Formation In Liquid Induced By An Electron Beam, Joseph M. Grogan, Nicholas M. Schneider, Frances M. Ross, Haim H. Bau

Departmental Papers (MEAM)

Liquid cell electron microscopy has emerged as a powerful technique for in situ studies of nanoscale processes in liquids. An accurate understanding of the interactions between the electron beam and the liquid medium is essential to account for, suppress, and exploit beam effects. We quantify the interactions of high energy electrons with water, finding that radiolysis plays an important role, while heating is typically insignificant. For typical imaging conditions, we find that radiolysis products such as hydrogen and hydrated electrons achieve equilibrium concentrations within seconds. At sufficiently high dose-rate, the gaseous products form bubbles. We image bubble nucleation, growth, and ...


Patterning Of Alloy Precipitation Through External Pressure, Jack A. Franklin Dec 2010

Patterning Of Alloy Precipitation Through External Pressure, Jack A. Franklin

Publicly Accessible Penn Dissertations

Due to the nature of their microstructure, alloyed components have the benefit of meeting specific design goals across a wide range of electrical, thermal, and mechanical properties. In general by selecting the correct alloy system and applying a proper heat treatment it is possible to create a metallic sample whose properties achieve a unique set of design requirements. This dissertation presents an innovative processing technique intended to control both the location of formation and the growth rates of precipitates within metallic alloys in order to create multiple patterned areas of unique microstructure within a single sample. Specific experimental results for ...


Ultra-Thin-Film Aln Contour-Mode Resonators For Sensing Applications, Matteo Rinaldi, Chiara Zuniga, Gianluca Piazza Apr 2010

Ultra-Thin-Film Aln Contour-Mode Resonators For Sensing Applications, Matteo Rinaldi, Chiara Zuniga, Gianluca Piazza

Departmental Papers (ESE)

This paper reports on the design and experimental verification of a new class of ultra-thin-film (250 nm) aluminum nitride (AlN) microelectromechanical system (MEMS) contour mode resonators (CMRs) suitable for the fabrication of ultra-sensitive gravimetric sensors. The device thickness was opportunely scaled in order to increase the mass sensitivity, while keeping a constant frequency of operation. In this first demonstration the resonance frequency of the device was set to 178 MHz and a mass sensitivity as high as 38.96 KHz⋅μm2/fg was attained. This device demonstrates the unique capability of the CMR-S technology to decouple resonance frequency from mass ...


Super-High-Frequency Two-Port Aln Contour-Mode Resonators For Rf Applications, Matteo Rinaldi, Chiara Zuniga, Chengjie Zuo, Gianluca Piazza Jan 2010

Super-High-Frequency Two-Port Aln Contour-Mode Resonators For Rf Applications, Matteo Rinaldi, Chiara Zuniga, Chengjie Zuo, Gianluca Piazza

Departmental Papers (ESE)

This paper reports on the design and experimental verification of a new class of thin-film (250 nm) superhigh- frequency laterally-vibrating piezoelectric microelectromechanical (MEMS) resonators suitable for the fabrication of narrow-band MEMS filters operating at frequencies above 3 GHz. The device dimensions have been opportunely scaled both in the lateral and vertical dimensions to excite a contourextensional mode of vibration in nanofeatures of an ultra-thin (250 nm) AlN film. In this first demonstration, 2-port resonators vibrating up to 4.5 GHz have been fabricated on the same die and attained electromechanical coupling, kt^2, in excess of 1.5%. These devices ...


Nanoenabled Microelectromechanical Sensor For Volatile Organic Chemical Detection, Chiara Zuniga, Matteo Rinaldi, Samuel M. Khamis, A. T. Johnson, Gianluca Piazza Jun 2009

Nanoenabled Microelectromechanical Sensor For Volatile Organic Chemical Detection, Chiara Zuniga, Matteo Rinaldi, Samuel M. Khamis, A. T. Johnson, Gianluca Piazza

Departmental Papers (ESE)

A nanoenabled gravimetric chemical sensor prototype based on the large scale integration of single-stranded DNA (ss-DNA) decorated single-walled carbon nanotubes (SWNTs) as nanofunctionalization layer for aluminum nitride contour-mode resonant microelectromechanical (MEM) gravimetric sensors has been demonstrated. The capability of two distinct single strands of DNA bound to SWNTs to enhance differently the adsorption of volatile organic compounds such as dinitroluene (simulant for explosive vapor) and dymethyl-methylphosphonate (simulant for nerve agent sarin) has been verified experimentally. Different levels of sensitivity (17.3 and 28 KHz µm^2/fg) due to separate frequencies of operation (287 and 450 MHz) on the same ...


5-10 Ghz Aln Contour-Mode Nanoelectromechanical Resonators, Matteo Rinaldi, Chiara Zuniga, Gianluca Piazza Jan 2009

5-10 Ghz Aln Contour-Mode Nanoelectromechanical Resonators, Matteo Rinaldi, Chiara Zuniga, Gianluca Piazza

Departmental Papers (ESE)

This paper reports on the design and experimental verification of Super High Frequency (SHF) laterally vibrating NanoElctroMechanical (NEMS) resonators. For the first time, AlN piezoelectric nanoresonators with multiple frequencies of operation ranging between 5 and 10 GHz have been fabricated on the same chip and attained the highest f-Q product (4.6E12 Hz) ever reported in AlN contour-mode devices. These piezoelectric NEMS resonators are the first of their class to demonstrate on-chip sensing and actuation of nanostructures without the need of cumbersome or power consuming excitation and readout systems. Effective piezoelectric activity has been demonstrated in thin AlN films having ...