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Design And Fabrication Of Nanofluidic Systems With Integrated Sensing Electrodes For Rapid Biomolecule Characterization, Taylor Bradley Busch
Theses and Dissertations
A transparent nanofluidic system with embedded sensing electrodes was designed and fabricated by integrating Atomic Force Microscopy (AFM) nanolithography, Focused Ion Beam (FIB) milling and metal deposition, and standard microfabrication processing. The fabrication process started with the evaporation of chrome/gold (Cr/Au) onto a Pyrex 7740 wafer followed by photolithography and wet etching of the microchannels. The wafer was patterned a second time to form Au microelectrodes with 15-45 micrometer separation gaps in the nanochannel region. Sensing electrodes (up to one micron wide) were then deposited using FIB to bridge the gaps. The nanochannels were realized through both AFM ...