Mechanical Engineering Commons^™

Improved Sensitivity Of Resonant Mass Sensor Based On Micro Tilting Plate And Micro Cantilever, Xiaoyu Song

Dissertations, Master's Theses and Master's Reports - Open

Vapor sensors have been used for many years. Their applications range from detection of toxic gases and dangerous chemicals in industrial environments, the monitoring of landmines and other explosives, to the monitoring of atmospheric conditions. Microelectrical mechanical systems (MEMS) fabrication technologies provide a way to fabricate sensitive devices. One type of MEMS vapor sensors is based on mass changing detection and the sensors have a functional chemical coating for absorbing the chemical vapor of interest. The principle of the resonant mass sensor is that the resonant frequency will experience a large change due to a small mass of gas vapor …