Mechanical Engineering Commons^™

Interface Circuit For A Multiple-Beam Tuning-Fork Gyroscope With High Quality Factors, Ren Wang

Mechanical & Aerospace Engineering Theses & Dissertations

This research work presents the design, theoretical analysis, fabrication, interface electronics, and experimental results of a Silicon-On-Insulator (SOI) based Multiple-Beam Tuning-Fork Gyroscope (MB-TFG). Based on a numerical model of Thermo-Elastic Damping (TED), a Multiple-Beam Tuning-Fork Structure (MB-TFS) is designed with high Quality factors (Qs) in its two operation modes. A comprehensive theoretical analysis of the MB-TFG design is conducted to relate the design parameters to its operation parameters and further performance parameters. In conjunction with a mask that defines the device through trenches to alleviate severe fabrication effect on anchor loss, a simple one-mask fabrication process is employed to implement …