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2009

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Full-Text Articles in Mechanical Engineering

Ultra-Thin Super High Frequency Two-Port Aln Contour-Mode Resonators And Filters, Matteo Rinaldi, Chiara Zuniga, Chengjie Zuo, Gianluca Piazza Feb 2013

Ultra-Thin Super High Frequency Two-Port Aln Contour-Mode Resonators And Filters, Matteo Rinaldi, Chiara Zuniga, Chengjie Zuo, Gianluca Piazza

Matteo Rinaldi

This paper reports on the demonstration of a new class of ultra-thin (250 nm thick) Super High Frequency (SHF) AlN piezoelectric two-port resonators and filters. A thickness field excitation scheme was employed to excite a higher order contour extensional mode of vibration in an AlN nano plate (250 nm thick) above 3 GHz and synthesize a 1.96 GHz narrow-bandwidth channel-select filter. The devices of this work are able to operate over a frequency range from 1.9 to 3.5 GHz and are employed to synthesize the highest frequency MEMS filter based on electrically self-coupled AlN contour-mode resonators. Very narrow bandwidth (~ …


College Of Engineering Senior Design Competition Fall 2009, University Of Nevada, Las Vegas Dec 2009

College Of Engineering Senior Design Competition Fall 2009, University Of Nevada, Las Vegas

Fred and Harriet Cox Senior Design Competition Projects

Each student in his or her senior year chooses, plans, designs, and prototypes a product in this required element of the curriculum. The senior design project encourages the student to use everything learned in the engineering program to create a practical, real-world solution to an engineering challenge.

A highlight of the year-long senior design project is the senior design competition. This competition, which usually takes place the week before finals each semester, helps focus the senior students on increasing the quality and potential for commercial application for their design projects.

Judges from local industry evaluate the projects on innovation, commercial …


Semi-Automatic Image Segmentation For Volumetric Visualization Of Pelvis Ct Scan-Images, Suprijanto Suprijanto, Farida I. Muchtadi, Irwan Setiawan Nov 2009

Semi-Automatic Image Segmentation For Volumetric Visualization Of Pelvis Ct Scan-Images, Suprijanto Suprijanto, Farida I. Muchtadi, Irwan Setiawan

Makara Journal of Technology

Semi-Automatic Image Segmentation for Volumetric Visualization of Pelvis CT Scan-Images. The current development of computerized tomography (CT) has enable us to obtain cross sectional image using multi slicing techniques in an order of few seconds. The obtained images represent several tissue structures on cross section slice being imaged. One challenge to help diagnosis using CT images is extracting an anatomic structure of interest using a method of image segmentation and volumetric visualization with the assistance of computers. In case of volumetric visualization of pelvis bones extracted from multi-slice CT images, whole images which are containing part of pelvis bone structures …


Implementation Of Six Sigma Method To Maintain The Quality Of Construction Projects, Yusuf Latief, Retyaning Puji Utami Nov 2009

Implementation Of Six Sigma Method To Maintain The Quality Of Construction Projects, Yusuf Latief, Retyaning Puji Utami

Makara Journal of Technology

Implementation of Six Sigma Method to Maintain The Quality of Construction Projects. Six sigma (6-sigma) is a method that widely developed in the world, especially in manufacturing industry to decrease failures in achieving good quality in construction projects. The objective of this research is to explore the existing condition of quality management and the aplication of 6-sigma method in maintaining quality of construction projects. Structured interviews to experienced experts and people who were recommended by their companies were conducted. Non-parametric analysis using frequencies distribution procedures were used for analysis. The result shows that existing condition in quality management of construction …


Simple Ml Detector For Multiple Antennas Communication System, Ahmad Taqwa, Soegijardjo Soegijoko, Sugihartono Sugihartono, Suhartono Tjondronegoro Nov 2009

Simple Ml Detector For Multiple Antennas Communication System, Ahmad Taqwa, Soegijardjo Soegijoko, Sugihartono Sugihartono, Suhartono Tjondronegoro

Makara Journal of Technology

Simple ML Detector for Multiple Antennas Communication System. In order to support providing broadband wireless communication services against limited and expensive frequency bandwidth, we have to develop a bandwidth efficient system. Therefore, in this paper we propose a closed-loop MIMO (Multiple-Input-Multiple-Output) system using ML (Maximum Likelihood) detector to optimize capacity and to increase system performance. What is especially exciting about the benefits offered by MIMO is that a high capacity and performance can be attained without additional frequency-spectral resource. The grand scenario of this concept is the attained advantages of transformation matrices having capability to allocate transmitted signals power suit …


Effects Of Ph On Calcium Carbonate Precipitation Under Magnetic Field, Nelson Saksono, Yuliusman Yuliusman, Setijo Bismo, Roekmijati W. Soemantojo, Azwar Manaf Nov 2009

Effects Of Ph On Calcium Carbonate Precipitation Under Magnetic Field, Nelson Saksono, Yuliusman Yuliusman, Setijo Bismo, Roekmijati W. Soemantojo, Azwar Manaf

Makara Journal of Technology

Magnetic field effect on CaCO3 precipitation is the key parameter in evaluating the effectiveness of Anti-scale Magnetic Treatment (AMT). The purpose of this study was to investigate magnetic fields influence on CaCO3 precipitation in high and low super-saturated CaCO3 solution by varied pH CaCO3 solution using circulation flow fluid system. The observation results in the high super saturated solution (pH 8.5) showed the increase of precipited CaCO3 in magnetized solutions compared to those in non-magnetic solution during circulation process. In the low super-saturated CaCO3 solution (pH 6.4) it was found that magnetic treatment increased CaCO3 precipitation after circulation process. In …


Performance Of Hollow Fiber Membrane Gas-Liquid Contactors To Absorb Co2 Using Diethanolamine (Dea) As A Solvent, Sutrasno Kartohardjono, Pan Ade Nata, Eko Prasetio, Yuliusman Yuliusman Nov 2009

Performance Of Hollow Fiber Membrane Gas-Liquid Contactors To Absorb Co2 Using Diethanolamine (Dea) As A Solvent, Sutrasno Kartohardjono, Pan Ade Nata, Eko Prasetio, Yuliusman Yuliusman

Makara Journal of Technology

This study uses DEA solution to absorb CO2 from the gas flow through the hollow fiber membrane contactors. This study aims to evaluate the performance of hollow fiber membrane contactors to absorb CO2 gas using DEA solution as solvent through mass transfer and hydrodynamics studies. The use of DEA solution is to reduce the mass transfer resistance in the liquid phase, and on the other side, the large contact area of the membrane surface can cover the disadvantage of membrane contactors; additional mass transfer resistance in the membrane phase. During experiments, CO2 feed flows through the fiber lumens, while the …


Potency Of Thermoelectric Generator For Hybrid Vehicle, Nandy Putra, Raldi Artono Koestoer, Mohammad Adhitya, Ardian Roekettino, Bayu Trianto Nov 2009

Potency Of Thermoelectric Generator For Hybrid Vehicle, Nandy Putra, Raldi Artono Koestoer, Mohammad Adhitya, Ardian Roekettino, Bayu Trianto

Makara Journal of Technology

Potency of Thermoelectric Generator for Hybrid Vehicle. Thermoelectric Generator (TEG) has been known as electricity generation for many years. If the temperature difference occurred between two difference semi conductor materials, the current will flow in the material and produced difference voltage. This principle is known as Seebeck effect that is the opposite of Peltier effect Thermoelectric Cooling (TEC). This research was conducted to test the potential of electric source from twelve peltier modules. Then, these thermoelectric generators were applied in hybrid car by using waste heat from the combustion engine. The experiment has been conducted with variations of peltier module …


Mechanical Properties Of Ramie Fiber Reinforced Epoxy Lamina Composite For Socket Prosthesis, Tresna P. Soemardi, Widjajalaksmi Kusumaningsih, Agustinus Purna Irawan Nov 2009

Mechanical Properties Of Ramie Fiber Reinforced Epoxy Lamina Composite For Socket Prosthesis, Tresna P. Soemardi, Widjajalaksmi Kusumaningsih, Agustinus Purna Irawan

Makara Journal of Technology

Mechanical properties of ramie fiber reinforced epoxy lamina composite for socket prosthesis. This paper presents an investigation into the application of natural fiber composite especially ramie fiber reinforced epoxy lamina composite for socket prosthesis. The research focuses on the tensile and shear strength from ramie fiber reinforced epoxy lamina composite which will be applied as alternative material for socket prosthesis. The research based on American Society for Testing Material (ASTM) standard D 3039/D 3039M for tensile strength and ASTM D 4255/D 4255M-83 for shear strength. The ramie fiber applied is a fiber continue 100 % Ne14'S with Epoxy Resin Bakelite …


Intermetallic Cu3sn Phase Layer On Electrode’S Tip Of Galvanized Resistance Spot Welding, Muhammad Anis, Aulia Irsyadi, Deni Ferdian Nov 2009

Intermetallic Cu3sn Phase Layer On Electrode’S Tip Of Galvanized Resistance Spot Welding, Muhammad Anis, Aulia Irsyadi, Deni Ferdian

Makara Journal of Technology

Intermetallic Cu3Sn Phase Layer on Electrode’s Tip of Galvanized Resistance Spot Welding. A resistance spot welding method is commonly used in automotive industries application. In a resistance spot welding method, the copper electrode has a significant role as an electric current carrier for joining thin metal sheet. This research was focused on studying the effect of tin layer at the electrode tip for joining galvanized steel sheet. The main variable of this research is in the thickness of the intermetallic Cu3Sn layer. The result showed that the introduction of tin layer less than 1 μm in thickness on the electrode …


Shaped Mems Contact, Ronald A. Coutu Jr., Paul E. Kladitis, Robert L. Crane Oct 2009

Shaped Mems Contact, Ronald A. Coutu Jr., Paul E. Kladitis, Robert L. Crane

AFIT Patents

A MEMS switch fabrication process and apparatus inclusive of a bulbous rounded surface movable contact assembly that is integral with the switch movable element and achieving of long contact wear life with low contact electrical resistance. The disclosed process is compatible with semiconductor integrated circuit fabrication materials and procedures and includes an unusual photoresist reflow step in which the bulbous contact shape is quickly defined in three dimensions from more easily achieved integrated circuit mask and etching-defined precursor shapes. A plurality of differing photoresist materials are used in the process. A large part of the contact and contact spring formation …


Absolute Nitrogen Atom Density Measurements By Two-Photon Laser-Induced Fluorescence Spectroscopy In Atmospheric Pressure Dielectric Barrier Discharges Of Pure Nitrogen, Et-Touhami Es-Sebbar, Christian Sarra-Bournet, Nicolas Naudé, Françoise Massines, Nicolas Gherardi Oct 2009

Absolute Nitrogen Atom Density Measurements By Two-Photon Laser-Induced Fluorescence Spectroscopy In Atmospheric Pressure Dielectric Barrier Discharges Of Pure Nitrogen, Et-Touhami Es-Sebbar, Christian Sarra-Bournet, Nicolas Naudé, Françoise Massines, Nicolas Gherardi

Dr. Et-touhami Es-sebbar

In this paper, two-photon absorption laser induced fluorescence spectroscopy is used to follow the nitrogen atom density in flowing dielectric barrier discharges fed with pure nitrogen and operating at atmospheric pressure. Two different dielectric barrier discharge regimes are investigated: the Townsend regime, which is homogeneous although operating at atmospheric pressure, and the more common filamentary regime. In both regimes, densities as high as 3x1014 /cm3 are detected. However, the N atoms kinetic formation depends on the discharge regime. The saturation level is reached more rapidly with a filamentary discharge. For a given discharge regime, the N atom density depends strongly …


Contributions To The Development Of The S.E.T.U.P. (Experimental And Theoretical Simulations Useful For Planetology) Project, E. Arzoumanian, C. Romanzin, M-C. Gazeau, Et. Es-Sebbar, A. Jolly, S. Perrier, Y. Benilan Oct 2009

Contributions To The Development Of The S.E.T.U.P. (Experimental And Theoretical Simulations Useful For Planetology) Project, E. Arzoumanian, C. Romanzin, M-C. Gazeau, Et. Es-Sebbar, A. Jolly, S. Perrier, Y. Benilan

Dr. Et-touhami Es-sebbar

No abstract provided.


Multiwavelength Studies For Titan's Atmospheric Composition Analysis, Y. Benilan, Et. Es-Sebbar, N. Fray, M-C. Gazeau, A. Jolly, M. Schwell, J. Guillemin Oct 2009

Multiwavelength Studies For Titan's Atmospheric Composition Analysis, Y. Benilan, Et. Es-Sebbar, N. Fray, M-C. Gazeau, A. Jolly, M. Schwell, J. Guillemin

Dr. Et-touhami Es-sebbar

Titan's atmosphere mainly made of nitrogen and methane is rich in organic molecules. Hydrocarbons are formed from the photolytic dissociation of CH4 and nitriles are created by dissociation of N2 followed by reactions with hydrocarbons. In order to understand the physicochemical mechanisms responsible for the evolution of Titan's atmosphere, photochemical models are built. The latter need constrains for vertical profiles of organic compounds from the high thermosphere down to the low stratosphere as well as photodissociation rates. Those profiles over the entire atmosphere can be retrieved from Cassini observations, in particular by limb sounding, coupling infrared and ultraviolet spectroscopy. However, …


Reinforcement-Learning-Based Output-Feedback Control Of Nonstrict Nonlinear Discrete-Time Systems With Application To Engine Emission Control, Peter Shih, Brian C. Kaul, Jagannathan Sarangapani, J. A. Drallmeier Oct 2009

Reinforcement-Learning-Based Output-Feedback Control Of Nonstrict Nonlinear Discrete-Time Systems With Application To Engine Emission Control, Peter Shih, Brian C. Kaul, Jagannathan Sarangapani, J. A. Drallmeier

Electrical and Computer Engineering Faculty Research & Creative Works

A novel reinforcement-learning-based output adaptive neural network (NN) controller, which is also referred to as the adaptive-critic NN controller, is developed to deliver the desired tracking performance for a class of nonlinear discrete-time systems expressed in nonstrict feedback form in the presence of bounded and unknown disturbances. The adaptive-critic NN controller consists of an observer, a critic, and two action NNs. The observer estimates the states and output, and the two action NNs provide virtual and actual control inputs to the nonlinear discrete-time system. The critic approximates a certain strategic utility function, and the action NNs minimize the strategic utility …


Towards Supervised Autonomous Task Completion Using An In Vivo Surgical Robot, Jason J. Dumpert Oct 2009

Towards Supervised Autonomous Task Completion Using An In Vivo Surgical Robot, Jason J. Dumpert

Department of Mechanical and Materials Engineering: Dissertations, Theses, and Student Research

Laparoscopy is a minimally invasive alternative to traditional abdominal surgery. Unlike traditional surgery, a laparoscopic procedure can be completed using small incisions. The use of these small incision results in reduced pain to the patient, shorter recovery times, and less trauma to skin, muscle and other tissues. However, these benefits to the patient are offset by the increased difficulty to the surgeon performing the procedure. These difficulties include reduced dexterity, reduced perception, and longer procedure times. The use of small in vivo robotic devices in minimally invasive surgery is one possible solution to these problems. The movement of these devices …


Vuv Photostability Of Prebiotic Species, M. Schwell, Y. Bénilan, M.-C. Gazeau, N. Fray, A. Jolly, Et. Es-Sebbar, N. Champion, S. Leach, H. W Jochims, H. Baumgärtel, E. Rühl Sep 2009

Vuv Photostability Of Prebiotic Species, M. Schwell, Y. Bénilan, M.-C. Gazeau, N. Fray, A. Jolly, Et. Es-Sebbar, N. Champion, S. Leach, H. W Jochims, H. Baumgärtel, E. Rühl

Dr. Et-touhami Es-sebbar

No abstract provided.


S.E.T.U.P. Experimental And Theoretical Simulations Useful For Planetology- Related Studies In The Frame Of A Program Of Titan’S Atmosphere Laboratory Simulations, M.-C. Gazeau, Et. Es-Sebbar, E. Arzoumanian, C. Romanzin, A. Jolly, S. Perrier, Y. Bénilan Sep 2009

S.E.T.U.P. Experimental And Theoretical Simulations Useful For Planetology- Related Studies In The Frame Of A Program Of Titan’S Atmosphere Laboratory Simulations, M.-C. Gazeau, Et. Es-Sebbar, E. Arzoumanian, C. Romanzin, A. Jolly, S. Perrier, Y. Bénilan

Dr. Et-touhami Es-sebbar

No abstract provided.


Parameter Identification Of Hydro Generation System With Fluid Transients Based On Improved Genetic Algorithm, Lin Gao Aug 2009

Parameter Identification Of Hydro Generation System With Fluid Transients Based On Improved Genetic Algorithm, Lin Gao

Lin Gao

More accurate models are adopted for dynamic stability analysis of hydro generation systems but the parameters of these models are often estimated roughly. Inaccurate parameters may decrease the analysis accuracy improved by using an accurate model. An improved genetic algorithm is proposed in this paper to estimate the parameters of a hydro generation system model which contains a series of basic differential equations to represent the flow transients more accurately. The numerical and experimental results show good accordance between the actual systems and the identification results.


The Very Basics Of Sustainability - An Alternative Viewpoint (Slides With Audio) (Large File! To Speed Up Download, Right-Click On "Download" Link To Save To Own Pc.), Jim Mcgovern Aug 2009

The Very Basics Of Sustainability - An Alternative Viewpoint (Slides With Audio) (Large File! To Speed Up Download, Right-Click On "Download" Link To Save To Own Pc.), Jim Mcgovern

Other resources

This presentation sets out the very basics of ‘sustainability’, although a definition of sustainability is not attempted. Some of the very basics are the context in which the Earth and humankind exist in space and time, the Earth’s climate, the Earth’s population and humankind’s options and choices. The author advocates keeping an open mind on all available options, including the use of oil, gas, coal, tar sands, carbon capture and sequestration, nuclear power etc., as well as the technologies that are more widely considered ‘green’. The author also argues that, in addressing the challenges that humankind faces, globally concerted effort …


Piezoelectric Aluminum Nitride Nanoelectromechanical Actuators, Nipun Sinha, Graham Wabiszewski, Rashed Mahameed, Valery Felmetsger, Shawn Tanner, Robert Carpick, Gianluca Piazza Jul 2009

Piezoelectric Aluminum Nitride Nanoelectromechanical Actuators, Nipun Sinha, Graham Wabiszewski, Rashed Mahameed, Valery Felmetsger, Shawn Tanner, Robert Carpick, Gianluca Piazza

Nipun Sinha

This letter reports the implementation of ultrathin (100 nm) aluminum nitride (AlN) piezoelectric layers for the fabrication of vertically deflecting nanoactuators. The films exhibit an average piezoelectric coefficient (d31~−1.9 pC/N), which is comparable to its microscale counterpart. This allows vertical deflections as large as 40 nm from 18 µm long and 350 nm thick multilayer cantilever bimorph beams with 2 V actuation. Furthermore, in-plane stress and stress gradients have been simultaneously controlled. The films exhibit leakage currents lower than 2 nA/cm2 at 1 V, and have an average relative dielectric constant of approximately 9.2 (as in thicker films). These material …


Ultra-Thin Super High Frequency Two-Port Aln Contour-Mode Resonators And Filters, Matteo Rinaldi, Chiara Zuniga, Chengjie Zuo, Gianluca Piazza Jul 2009

Ultra-Thin Super High Frequency Two-Port Aln Contour-Mode Resonators And Filters, Matteo Rinaldi, Chiara Zuniga, Chengjie Zuo, Gianluca Piazza

Matteo Rinaldi

This paper reports on the demonstration of a new class of ultra-thin (250 nm thick) Super High Frequency (SHF) AlN piezoelectric two-port resonators and filters. A thickness field excitation scheme was employed to excite a higher order contour extensional mode of vibration in an AlN nano plate (250 nm thick) above 3 GHz and synthesize a 1.96 GHz narrow-bandwidth channel-select filter. The devices of this work are able to operate over a frequency range from 1.9 to 3.5 GHz and are employed to synthesize the highest frequency MEMS filter based on electrically self-coupled AlN contour-mode resonators. Very narrow bandwidth (~ …


Design And Development Of Rapid Battery Exchange Systems For Electric Vehicles To Be Used As Efficient Student Transportation, Jonathan A. Bevier Jul 2009

Design And Development Of Rapid Battery Exchange Systems For Electric Vehicles To Be Used As Efficient Student Transportation, Jonathan A. Bevier

Master's Theses

Rapid battery exchange systems were built for an electric van and pedal assist electric bike as a method of eliminating the need to recharge the vehicles batteries in order to increase the feasibility of using electric propulsion as a method of efficient student transportation. After selecting proper materials it was found that the systems would need a protective coating to ensure consistent operation. 1020 cold rolled steel samples coated with multiple thicknesses of vinyl resin paint, epoxy resin paint, and powder coating were subjected to environmental wear tests in order to determine if the type and thickness of common protective …


Stability Analysis, Modeling, Simulation And Experimental Testing Of An Ems Maglev System With Structural Flexibility, Aravind M. Hanasoge Jul 2009

Stability Analysis, Modeling, Simulation And Experimental Testing Of An Ems Maglev System With Structural Flexibility, Aravind M. Hanasoge

Mechanical & Aerospace Engineering Theses & Dissertations

Vehicle-guideway interaction studies of Magnetically Levitated (Maglev) vehicles indicate that structural flexibility can adversely affect the overall stability and performance of such systems. This is one of the reasons why guideways are generally made very rigid. This in turn leads to increased cost of the overall system since guideway construction forms a significant portion of the overall cost. In this dissertation, the influence of structural flexibility on the stability of Electromagnetic Suspension (EMS) Maglev systems is studied. It is shown how inherently unstable and flexible structure EMS Maglev systems can achieve guaranteed stability by using collocated actuators and sensors, along …


Dna-Decorated Carbon Nanotubes As Sensitive Layer For Aln Contour-Mode Resonant-Mems Gravimetric Sensor, Chiara Zuniga, Matteo Rinaldi, Samuel M. Khamis, Timothy S. Jones, A T. Johnson, Gianluca Piazza Jun 2009

Dna-Decorated Carbon Nanotubes As Sensitive Layer For Aln Contour-Mode Resonant-Mems Gravimetric Sensor, Chiara Zuniga, Matteo Rinaldi, Samuel M. Khamis, Timothy S. Jones, A T. Johnson, Gianluca Piazza

Matteo Rinaldi

In this work a nano-enabled gravimetric chemical sensor prototype based on single-stranded DNA (ss-DNA) decorated single-walled carbon nanotubes (SWNT) as nano-functionalization layer for Aluminun Nitride (AIN) contour-mode resonant-MEMS gravimetric sensors has been demonstrated. Two resonators fabricated on the same silicon chip and operating at different resonance frequencies, 287 and 450 MHz, were functionalized with this novel bio-coating layer to experimentally prove the capability of two distinct single strands of DNA bound to SWNT to enhance differently the adsorption of volatile organic compounds such as dinitroluene (DNT, simulant for explosive vapor) and dymethyl-methylphosphonate (DMMP, a simulant for nerve agent sarin). The …


Characterization Of An N2 Flowing Microwave Post-Discharge By Oes Spectroscopy And Determination Of Absolute Ground-State Nitrogen Atom Densities By Talif, Et. Es-Sebbar, Y. Benilan, A. Jolly, M-C. Gazeau Jun 2009

Characterization Of An N2 Flowing Microwave Post-Discharge By Oes Spectroscopy And Determination Of Absolute Ground-State Nitrogen Atom Densities By Talif, Et. Es-Sebbar, Y. Benilan, A. Jolly, M-C. Gazeau

Dr. Et-touhami Es-sebbar

A flowing microwave post-discharge source sustained at 2.45 GHz in pure nitrogen has been investigated by optical emission spectroscopy (OES) and two-photon absorption laser-induced fluorescence (TALIF) spectroscopy. Variations of the optical emission along the post-discharge (near, pink and late afterglow) have been studied and the gas temperature has been determined. TALIF spectroscopy has been used in the late afterglow to determine the absolute ground-state nitrogen atomic densities using krypton as a reference gas. Measurements show that the microwave flowing post-discharge is an efficient source of N (4S) atoms in late afterglow. In our experimental conditions, the maximum N (4S) density …


Nanoenabled Microelectromechanical Sensor For Volatile Organic Chemical Detection, Chiara Zuniga, Matteo Rinaldi, Samuel M. Khamis, A. T. Johnson, Gianluca Piazza Jun 2009

Nanoenabled Microelectromechanical Sensor For Volatile Organic Chemical Detection, Chiara Zuniga, Matteo Rinaldi, Samuel M. Khamis, A. T. Johnson, Gianluca Piazza

Matteo Rinaldi

A nanoenabled gravimetric chemical sensor prototype based on the large scale integration of single-stranded DNA (ss-DNA) decorated single-walled carbon nanotubes (SWNTs) as nanofunctionalization layer for aluminum nitride contour-mode resonant microelectromechanical (MEM) gravimetric sensors has been demonstrated. The capability of two distinct single strands of DNA bound to SWNTs to enhance differently the adsorption of volatile organic compounds such as dinitroluene (simulant for explosive vapor) and dymethyl-methylphosphonate (simulant for nerve agent sarin) has been verified experimentally. Different levels of sensitivity (17.3 and 28 KHz µm^2/fg) due to separate frequencies of operation (287 and 450 MHz) on the same die have also …


5-10 Ghz Aln Contour-Mode Nanoelectromechanical Resonators, Matteo Rinaldi, Chiara Zuniga, Gianluca Piazza Jun 2009

5-10 Ghz Aln Contour-Mode Nanoelectromechanical Resonators, Matteo Rinaldi, Chiara Zuniga, Gianluca Piazza

Matteo Rinaldi

This paper reports on the design and experimental verification of Super High Frequency (SHF) laterally vibrating NanoElctroMechanical (NEMS) resonators. For the first time, AlN piezoelectric nanoresonators with multiple frequencies of operation ranging between 5 and 10 GHz have been fabricated on the same chip and attained the highest f-Q product (4.6E12 Hz) ever reported in AlN contour-mode devices. These piezoelectric NEMS resonators are the first of their class to demonstrate on-chip sensing and actuation of nanostructures without the need of cumbersome or power consuming excitation and readout systems. Effective piezoelectric activity has been demonstrated in thin AlN films having vertical …


Ultra-Thin Super High Frequency Two-Port Aln Contour-Mode Resonators And Filters, Matteo Rinaldi, Chiara Zuniga, Chengjie Zuo, Gianluca Piazza Jun 2009

Ultra-Thin Super High Frequency Two-Port Aln Contour-Mode Resonators And Filters, Matteo Rinaldi, Chiara Zuniga, Chengjie Zuo, Gianluca Piazza

Chengjie Zuo

This paper reports on the demonstration of a new class of ultra-thin (250 nm thick) Super High Frequency (SHF) AlN piezoelectric two-port resonators and filters. A thickness field excitation scheme was employed to excite a higher order contour extensional mode of vibration in an AlN nano plate (250 nm thick) above 3 GHz and synthesize a 1.96 GHz narrow-bandwidth channel-select filter. The devices of this work are able to operate over a frequency range from 1.9 to 3.5 GHz and are employed to synthesize the highest frequency MEMS filter based on electrically self-coupled AlN contour-mode resonators. Very narrow bandwidth (~ …


Demonstration Of Inverse Acoustic Band Gap Structures In Aln And Integration With Piezoelectric Contour Mode Transducers, Nai-Kuei Kuo, Chengjie Zuo, Gianluca Piazza Jun 2009

Demonstration Of Inverse Acoustic Band Gap Structures In Aln And Integration With Piezoelectric Contour Mode Transducers, Nai-Kuei Kuo, Chengjie Zuo, Gianluca Piazza

Chengjie Zuo

This paper presents the first design and demonstration of a novel inverse acoustic band gap (IABG) structure in aluminum nitride (AlN) and its direct integration with piezoelectric contour-mode transducers. The experimental results indicate that the IABG structure has a stop band from 185 MHz to 240 MHz and is centered around 219 MHz with maximum rejection of 30 dB. The ABG-induced phonon scattering causes a frequency band gap that prohibits the propagation of certain acoustic wavelengths. In this work, the IABG unit cell consists of a high acoustic velocity (V) center material, which is formed by 2-μm-thick AlN sandwiched by …