Mechanical Engineering Commons^™

Liga Fabrication Of Nanocrystalline Ni-Walloy Micro Specimens From Ammonia-Citrate Bath, Haseeb Asma

Haseeb ASMA

Ammonia-citrate bath has been investigated for the deposition of nano crystalline Ni - W alloy micro components using the LIGA process. First the bath stability and deposit characteristics were studied. Fabrication of micro specimens were then carried out on silicon substrates covered with novolac as well as thick PMMA resist for LIGA. Effects of different parameters like current density, nickel ion and tungsten ion concentration in the bath, deposition time etc. on the deposit characteristics and current efficiency were studied. The deposited Ni - W samples were characterized by scanning electron microscopy, energy depressive X-ray spectroscopy, light optical microscopy and …