Mechanical Engineering Commons^™

A New Approach To Evaluate Fracture Strength Of Uv-Liga Fabricated Nickel Specimens, Catherine Oropeza

LSU Master's Theses

One of the major difficulties faced by MEMS researchers today is the lack of data regarding properties of electroplated metals or alloys at micro-levels as those produced by the LIGA and LIGA related process. These mechanical properties are not well known and they cannot be extrapolated from macro-scale data without experimental verification. This lack of technical information about microscale physical properties has affected the consistency and reliability of batch-fabricated components and leads to very low rates of successful fabrication. Therefore, this material issue is of vital importance to the development of LIGA technology and to its industrial applications. This thesis …