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Full-Text Articles in Mechanical Engineering
Mechanical Properties And Mems Applications Of Carbon-Infiltrated Carbon Nanotube Forests, Walter C. Fazio
Mechanical Properties And Mems Applications Of Carbon-Infiltrated Carbon Nanotube Forests, Walter C. Fazio
Theses and Dissertations
This work explores the use of carbon-infiltrated carbon nanotube (CI-CNT) forests as a material for fabricating compliant MEMS devices. The impacts of iron catalyst layer thickness and carbon infiltration time are examined. An iron layer of 7nm or 10nm with an infiltration time of 30 minutes produces CI-CNT best suited for compliant applications. Average maximum strains of 2% and 2.48% were observed for these parameters. The corresponding elastic moduli were 5.4 GPa and 4.1 GPa, respectively. A direct comparison of similar geometry suggested CI-CNT is 80% more flexible than single-crystal silicon. A torsional testing procedure provided an initial shear modulus …
Straightness Of Growth For Carbon Nanotube Microelectromechanical Systems, Kellen S. Moulton
Straightness Of Growth For Carbon Nanotube Microelectromechanical Systems, Kellen S. Moulton
Theses and Dissertations
The purpose of this research is to examine the effect of iron catalyst thickness on the straightness of growth of carbon nanotube microelectromechanical systems (CNT-MEMS). One of the key benefits of CNT-MEMS is that they can potentially have very high aspect ratios. One of the challenges in attaining these high aspect ratios is maintaining device straightness; as these devices get taller, the edges tend to curve rather than grow straight vertically. Scanning electron mi- croscope images of samples grown using various iron catalyst thicknesses show that both straight growth and relatively good edge definition can be achieved using iron thicknesses …
Increasing The Sensitivity Of Surface Acoustic Wave (Saw) Chemical Sensors And Other Chemical Sensing Investigations, Nina R. Smith
Increasing The Sensitivity Of Surface Acoustic Wave (Saw) Chemical Sensors And Other Chemical Sensing Investigations, Nina R. Smith
Theses and Dissertations
The work involves the fabrication and testing of three different surface acoustic wave (SAW) device designs, an investigation of nanowires sensitive to chemicals and preconcentrator prototypes to include with chemical sensors. The SAW chemical sensor designs include modifications to a basic SAW device to see if the sensitivity of the SAW device is increased. The modifications consist of etched trenches along the propagation field, coating the device with carbon nanotubes (CNTs) under the chemically sensitive layer and coating CNTs on top of the chemically sensitive layer. SAW devices are coated with Nafion®, a polymer sensitive to ethanol. The tests indicate …
Investigation Of Thermal Management And Metamaterials, Calvin T. Roman
Investigation Of Thermal Management And Metamaterials, Calvin T. Roman
Theses and Dissertations
Thermal metamaterials are materials composed of engineered, microscopic structures that exhibit unique thermal performance characteristics based primarily on their physical structures and patterning, rather than just their chemical composition or bulk material properties. The heat transfer performance attributes of a thermal metamaterial are such that similar performance cannot be obtained using conventional materials or compounds. Thermal metamaterials are an emerging technology, and are just now beginning to be acknowledged and developed by the microelectronics and material sciences community. This thesis effort analyzed the current state of thermal metamaterial research, examined the physics and theory of heat transfer and electrical conductivity …
Investigation Into Contact Resistance And Damage Of Metal Contacts Used In Rf-Mems Switches, Kevin W. Gilbert
Investigation Into Contact Resistance And Damage Of Metal Contacts Used In Rf-Mems Switches, Kevin W. Gilbert
Theses and Dissertations
This research examines the physical and electrical processes involved in lifecycle failure of Microelectromechanical (MEMS) Radio-Frequency (RF) cantilever beam ohmic contact switches. Failures of these switches generally occur at the contact, but complete details of performance of microcontacts are difficult to measure and have not been previously reported. This study investigated the mechanics of microcontact behavior by designing and constructing a novel experimental setup. Three representative contact materials of varying microstructure (Au, Au5%Ru, Au4%V2O5) were tested and parameters of contact during cycling were measured. The Au4%V2O5, a dispersion strengthened material developed at …
Off-Axis Stiffness And Piezroresistive Sensing In Large-Displacement Linear-Motion Microelectromechanical Systems, David G. Smith
Off-Axis Stiffness And Piezroresistive Sensing In Large-Displacement Linear-Motion Microelectromechanical Systems, David G. Smith
Theses and Dissertations
Proper positioning of Microelectromechanical Systems (MEMS) components influences the functionality of the device, especially in devices where the motion is in the range of hundreds of micrometers. There are two main obstacles to positioning: off-axis displacement, and position determination. This work studies four large-displacement devices, their axial and transverse stiffness, and piezoresistive response. Methods for improving the device characteristics are described. The folded-beam suspension, small X-Bob, large X-Bob and double X-Bob were characterized using non-dimensional metrics that measure the displacement with regard to the size of the device, and transverse stiffness with regard to axial stiffness. The stiffness in each …
Characterizationn Of Polumer-Based Mems Pyroelectic Infrared Detector, Mark E. Allard
Characterizationn Of Polumer-Based Mems Pyroelectic Infrared Detector, Mark E. Allard
Theses and Dissertations
AFRL/MLPJE had developed a novel thermal sensing material termed protein-impregnated-polymer (PIP). Thus far, a proof-of-concept has been demonstrated using a macro-sized pixel (0.64 mm2) as a bolometric detector. In an effort to better characterize this novel thermal sensing material, experimental data was used to determine figures of merit (FOMs) comparative to off-the-shelf thermal detectors. Microelectromechanical (MEMS) pixels were designed and used as the support structure for an inkjet-deposited droplet of the PIP. During the material characterization, two observations were made: PIP is a pyroelectric material, and the polymer (polyvinyl alcohol (PVA)) without the protein was found to be …
Characterization Of Intercalated Graphite Fibers For Microelectromechanical Systems (Mems) Applications, Bryan W. Winningham
Characterization Of Intercalated Graphite Fibers For Microelectromechanical Systems (Mems) Applications, Bryan W. Winningham
Theses and Dissertations
Research was accomplished to characterize the electrical and physical characteristic changes of the Thornel® P-100 carbon fiber and five variants when intercalated with 96% sulfuric acid and incorporated the use of Microelectromechanical Systems (MEMS) structures for testing purposes. The five fiber variants were oxidized in 1 M nitric acid at 0.5 A for 30 seconds, 1 and 2 minutes, the last two samples were detreated at 1150 °C for one hour prior to the nitric acid treatment. The fibers were mounted onto a MEMS die, placed into a chip carrier, sulfuric acid added, the chip carrier sealed and testing accomplished. …
Characterization Of Stress In Gan-On-Sapphire Microelectromechanical Systems (Mems) Structures Using Micro-Raman Spectroscopy, Francisco E. Parada
Characterization Of Stress In Gan-On-Sapphire Microelectromechanical Systems (Mems) Structures Using Micro-Raman Spectroscopy, Francisco E. Parada
Theses and Dissertations
Micro-Raman (µRaman) spectroscopy is an efficient, non-destructive technique widely used to determine the quality of semiconductor materials and microelectromechanical systems. This work characterizes the stress distribution in wurtzite gallium nitride grown on c-plane sapphire substrates by molecular beam epitaxy. This wide bandgap semiconductor material is being considered by the Air Force Research Laboratory for the fabrication of shock-hardened MEMS accelerometers. µRaman spectroscopy is particularly useful for stress characterization because of its ability to measure the spectral shifts in Raman peaks in a material, and correlate those shifts to stress and strain. The spectral peak shift as a function of stress, …
Power-Scavenging Mems Robots, Daniel J. Denninghoff
Power-Scavenging Mems Robots, Daniel J. Denninghoff
Theses and Dissertations
This thesis includes the design, modeling, and testing of novel, power-scavenging, biologically inspired MEMS microrobots. Over one hundred 500-μm and 990-μm microrobots with two, four, and eight wings were designed, fabricated, characterized. These microrobots constitute the smallest documented attempt at powered flight. Each microrobot wing is comprised of downward-deflecting, laser-powered thermal actuators made of gold and polysilicon; the microrobots were fabricated in PolyMUMPs® (Polysilicon Multi-User MEMS Processes). Characterization results of the microrobots illustrate how wing-tip deflection can be maximized by optimizing the gold-topolysilicon ratio as well as the dimensions of the actuator-wings. From these results, an optimum actuator-wing configuration was …
Protein Impregnated Polymer (Pip) Film Infrared Sensor Using Suspended Microelectromechanical Systems (Mems) Pixels, Tetsuo Kaieda
Protein Impregnated Polymer (Pip) Film Infrared Sensor Using Suspended Microelectromechanical Systems (Mems) Pixels, Tetsuo Kaieda
Theses and Dissertations
The Air Force Research Laboratory Materials and Manufacturing Directorate have developed a novel protein impregnated polymer (PIP) suspension that changes resistivity as a function of absorbed infrared radiation. Due to this property, the PIP is a potential material for use as an uncooled bolometer, or thermal sensor. In this research, a thermally-isolated pixel design, sensor characterization methods, and sensor fabrication and processing steps were developed. To create a microbolometer, the PIP was applied to two prototype micro-electro-mechanical systems (MEMS) surface micro-machined structures. The first is a raised cantilever pixel array that uses residual stress polysilicon and metal film arms to …
Insulator Charging In Rf Mems Capacitive Switches, Jay F. Kucko
Insulator Charging In Rf Mems Capacitive Switches, Jay F. Kucko
Theses and Dissertations
While capacitive radio frequency microelectromechanical (RF MEM) switches are poised to provide a low cost, high isolation, low power alternative to current RF switch technologies, there are still reliability issues limiting switch lifetime. Previous research identified insulator charging as a primary cause of switch failure. Changes in switch pull-in and release voltages were measured to provide insight into the mechanisms responsible for charging and switch failure. A spatial and temporal dependent model was developed to describe silicon nitride's time-dependent charging as a function of applied bias. This model was verified by applying constant biases to metal-silicon nitride-silicon capacitors and tracking …
Electrothermomechanical Modeling Of A Surface-Micromachined Linear Displacement Microactuator, Christian D. Lott
Electrothermomechanical Modeling Of A Surface-Micromachined Linear Displacement Microactuator, Christian D. Lott
Theses and Dissertations
The electrothermomechanical characteristics of an electrically-heated polycrystallinesilicon microactuator are explored. Using finite-difference techniques, an electrothermal model based on the balance of heat dissipation and heat losses is developed. For accurate simulation, the relevant temperature dependent properties from the microactuator material are included in the model. The electrothermal model accurately predicts the steady-state power required to hold position, and the energy consumed during the thermal transient. Thermomechanical models use the predictions of temperature from the electrothermal solution to calculate displacement and force from pseudo-rigid-body approximations and commercial finite-element code. The models are verified by comparing experimental data to simulation results of …
Simulation-Based Design Under Uncertainty For Compliant Microelectromechanical Systems, Jonathan W. Wittwer
Simulation-Based Design Under Uncertainty For Compliant Microelectromechanical Systems, Jonathan W. Wittwer
Theses and Dissertations
The high cost of experimentation and product development in the field of microelectromechanical systems (MEMS) has led to a greater emphasis on simulation-based design for increasing first-pass design success and reliability. The use of compliant or flexible mechanisms can help eliminate friction, wear, and backlash, but compliant MEMS are sensitive to variations in material properties and geometry. This dissertation proposes approaches for design stage uncertainty analysis, model validation, and robust optimization of nonlinear compliant MEMS to account for critical process uncertainties including residual stress, layer thicknesses, edge bias, and material stiffness. Methods for simulating and mitigating the effects of non-idealities …
Head Tracking For 3d Audio Using A Gps-Aided Mems Imu, Jacque M. Joffrion
Head Tracking For 3d Audio Using A Gps-Aided Mems Imu, Jacque M. Joffrion
Theses and Dissertations
Audio systems have been developed which use stereo headphones to project sound in three dimensions. When using these 3D audio systems, audio cues sound like they are originating from a particular direction. There is a desire to apply 3D audio to general aviation applications, such as projecting control tower transmissions in the direction of the tower or providing an audio orientation cue for VFR pilots who find themselves in emergency zero-visibility conditions. 3D audio systems, however, require real-time knowledge of the pilot's head orientation in order to be effective. This research describes the development and testing of a low-cost head …
Detection Of Residual Stress In Sic Mems Using Μ-Raman Spectroscopy, John C. Zingarelli
Detection Of Residual Stress In Sic Mems Using Μ-Raman Spectroscopy, John C. Zingarelli
Theses and Dissertations
Micro-Raman (µ-Raman) spectroscopy is used to measure residual stress in two silicon carbide (SiC) poly-types: single-crystal, hexagonally symmetric 6H-SiC, and polycrystalline, cubic 3C-SiC thin films deposited on Si substrates. Both are used in micro-electrical-mechanical systems (MEMS) devices. By employing an incorporated piezoelectric stage with submicron positioning capabilities along with the Raman spectral acquisition, spatial scans are performed to reveal areas in the 6H-SiC MEMS structures that contain residual stress. Shifts in the transverse optical (TO) Stokes peaks of up to 2 cm-1 are correlated to the material strain induced by the MEMS fabrication process through the development of phonon …
Using Multiple Mems Imus To Form A Distributed Inertial Measurement Unit, Ryan D. Hanson
Using Multiple Mems Imus To Form A Distributed Inertial Measurement Unit, Ryan D. Hanson
Theses and Dissertations
MEMS IMUs are readily available in quantity and have extraordinary advantages over conventional IMUs in size, weight, cost, and power consumption. However, the poor performance of MEMS IMUs limits their use in more demanding military applications. It is desired to use multiple distributed MEMS IMUs to simulate the performance of a single, more costly IMU, using the theory behind Gyro-Free IMUs. A Gyro-Free IMU (GF-IMU) uses a configuration of accelerometers only to measure the three accelerations and three angular rotations of a rigid body in 3-D space. Theoretically, almost any configuration of six distributed accelerometers yields sufficient measurements to solve …
Electrostatic Radio Frequency (Rf) Microelectromechanical Systems (Mems) Switches With Metal Alloy Electric Contacts, Ronald A. Coutu Jr.
Electrostatic Radio Frequency (Rf) Microelectromechanical Systems (Mems) Switches With Metal Alloy Electric Contacts, Ronald A. Coutu Jr.
Theses and Dissertations
RF MEMS switches are paramount in importance for improving current and enabling future USAF RF systems. Electrostatic micro-switches are ideal for RF applications because of their superior performance and low power consumption. The primary failure mechanisms for micro-switches with gold contacts are becoming stuck closed and increased contact resistance with increasing switch cycles. This dissertation reports on the design, fabrication, and testing of micro-switches with sputtered bi-metallic (i.e., gold (Au)-on-Au-(6.3at%)platinum (Pt)), binary alloy (i.e., Au-(3.7at%)palladium (Pd) and Au-(6.3at%)Pt), and ternary alloy (i.e., Au-(5at%)Pt-(0.5at%)copper (Cu)) contact metals. Performance was evaluated, in-part, using measured contact resistance and lifetime results. The micro-switches with …
A Tightly-Coupled Ins/Gps Integration Using A Mems Imu, Jonathan M. Neu
A Tightly-Coupled Ins/Gps Integration Using A Mems Imu, Jonathan M. Neu
Theses and Dissertations
Micro-Electro-Mechanical Systems (MEMS) technology holds great promise for future navigation systems because of the reduced size and cost of MEMS inertial sensors relative to conventional devices. Current MEMS devices are much less accurate than standard inertial sensors, but they can still be useful. In this thesis, data was recorded from an inexpensive MEMS inertial measurement unit and integrated with GPS measurements using a tightly-coupled Kalman filter. The overall goal of this research is to investigate the usefulness of MEMS sensors for a small, real-time, low-cost INS/GPS integration. A golf cart was used to collect dynamic data, along with a commercial …
Demonstrating Optothermal Actuators For An Autonomous Mems Microrobot, Francis R. Szabo
Demonstrating Optothermal Actuators For An Autonomous Mems Microrobot, Francis R. Szabo
Theses and Dissertations
There are numerous applications for microrobots which are beneficial to the Air Force. However, the microrobotics field is still in its infancy, and will require extensive basic research before these applications can be fielded. The biggest hurdle to be solved, in order to create autonomous microrobots, is generating power for their actuator engines. Most present actuators require orders of magnitude more power than is presently available from micropower sources. To enable smaller microrobots, this research proposed a simplified power concept that eliminates the need for on-board power supplies and control circuitry by using actuators powered wirelessly from the environment. This …
Thin Film Encapsulation Of Radio Frequency (Rf) Microelectromechanical Systems (Mems) Switches, Eric D. Marsh
Thin Film Encapsulation Of Radio Frequency (Rf) Microelectromechanical Systems (Mems) Switches, Eric D. Marsh
Theses and Dissertations
Microelectromechanical systems (MEMS) radio frequency (RF) switches have been shown to have excellent electrical performance over a wide range of frequencies. However, cost-effective packaging techniques for MEMS switches do not currently exist. This thesis involves the design of RF-optimized encapsulations consisting of dielectric and metal layers, and the creation of a novel thin film encapsulation process to fabricate the encapsulations. The RF performance of several encapsulation designs are evaluated with an analytical model, full wave electromagnetic simulation, and laboratory testing. Performance degradation due to parasitic and reflection losses due to the package is considered, and RF feed-throughs of the transmission …
Analysis And Design Of Surface Micromachined Micromanipulators For Out-Of-Plane Micropositioning, Kimberly A. Jensen
Analysis And Design Of Surface Micromachined Micromanipulators For Out-Of-Plane Micropositioning, Kimberly A. Jensen
Theses and Dissertations
This thesis introduces two ortho-planar MEMS devices that can be used to position microcomponents: the XZ Micropositioning Mechanism and the XYZ Micromanipulator. The displacement and force relationships are presented. The devices were fabricated using surface micromachining processes and the resulting mechanisms were tested. A compliant XYZ Micromanipulator was also designed to reduce backlash and binding. In addition, several other MEMS positioners were fabricated and tested: the Micropositioning Platform Mechanism (MPM), the Ortho-planar Twisting Micromechanism (OTM), and the Ortho-planar Spring Micromechanism (OSM).
The Pseudo-Rigid-Body Model For Dynamic Predictions Of Macro And Micro Compliant Mechanisms, Scott Marvin Lyon
The Pseudo-Rigid-Body Model For Dynamic Predictions Of Macro And Micro Compliant Mechanisms, Scott Marvin Lyon
Theses and Dissertations
This work discusses the dynamic predictions of compliant mechanisms using the Pseudo-Rigid-Body model (PRBM). In order to improve the number of mechanisms that can be modeled, this research develops and identifies several key concepts in the behavior of beam segments where both ends are fixed to a rigid body (fixed-fixed flexible segments). A model is presented, and several examples are discussed. The dynamic behavior of several compliant segments is predicted using the PRBM and the results are compared to finite element analysis and experimental results. Details are presented as to the transient behavior of a typical uniform rectangular cross section …
Thermal Microactuators For Microelectromechanical Systems (Mems), Rebecca Cragun
Thermal Microactuators For Microelectromechanical Systems (Mems), Rebecca Cragun
Theses and Dissertations
Microactuators are needed to convert energy into mechanical work at the microscale. Thermal microactuators can be used to produce this needed mechanical work. The purpose of this research was to design, fabricate, and test thermal microactuators for use at the microscale in microelectromechanical systems (MEMS). The microactuators developed were tested to determine the magnitude of their deflection and estimate their force. Five groups of thermal microactuators were designed and tested. All of the groups used the geometrically constrained expansion of various segments to produce their deflection. The first group, Thermal Expansion Devices (TEDs), produced a rotational displacement and had deflections …
Mechanical Computing In Microelectromechanical Systems (Mems), Kenneth C. Bradley
Mechanical Computing In Microelectromechanical Systems (Mems), Kenneth C. Bradley
Theses and Dissertations
Mechanical computing devices in polysilicon-based microelectromechanical systems (MEMS) were designed with the goal of developing computing devices for harsh environments, such as those with high dose radiation and high temperatures, as well as devices that may be able to interface with molecular or biological computer systems. The devices that were designed include both analog and digital computing devices. The analog devices include integrators, differentials (summers), multipliers, and those that perform trigonometric functions. The digital devices that were designed are inverters, NAND, NOR, and XOR logic gates. Analog-to-digital (A-to-D) and digital-to-analog (D-to-A) converters were also designed. The designs were submitted to …
The Effects Of Ionizing Radiation On Microelectromechanical Systems (Mems) Actuators: Electrostatic, Electrothermal, And Residual Stress, Jared R. Caffey
The Effects Of Ionizing Radiation On Microelectromechanical Systems (Mems) Actuators: Electrostatic, Electrothermal, And Residual Stress, Jared R. Caffey
Theses and Dissertations
The effects of ionizing radiation on the operation of polysilicon mmicroelectromechanical system (MEMS) electrostatic actuators, electrothermal actuators, and residual stress cantilevers were examined. Pre-irradiation, in-situ, and post-irradiation measurements were taken for the electrosatic and electrothermal actuators. The residual stress cantilevers were characterized before and after irradiation. All devices were irradiated to a total ionizing does of 1 megarad(Si) using both the Air Force Research Laboratory's low energy X-ray source and Co-60 gamma source.
Characterization Of Residual Stress In Microelectromechanical Systems (Mems) Devices Using Raman Spectroscopy, Lavern A. Starman
Characterization Of Residual Stress In Microelectromechanical Systems (Mems) Devices Using Raman Spectroscopy, Lavern A. Starman
Theses and Dissertations
Due to the small scale of MEMS devices, the inherent residual stresses during the deposition processes can affect the functionality and reliability of the fabricated devices. Residual stress often causes device failure due to curling, buckling, or fracture. Currently, few techniques are available to measure the residual stress in MEMS devices. In this dissertation, Raman spectroscopy is used to measure and monitor the residual and induced stresses in MUMPs polysilicon MEMS devices. Raman spectroscopy was selected since it is nondestructive, fast, and provides potential in situ stress monitoring. Raman spectroscopy scans on unreleased and released MEMS fixed-fixed beams, cantilevers, and …
Fabrication Techniques For Iii-V Micro-Opto-Electro-Mechanical Systems, Jeremy A. Raley
Fabrication Techniques For Iii-V Micro-Opto-Electro-Mechanical Systems, Jeremy A. Raley
Theses and Dissertations
This thesis studies selective etching techniques for the development of AlxGa1-xAs micro-opto-electro-mechanical systems (MOEMS). New MEMS technology based on materials such as AlxGa1-xAs enables the development of micro-systems with embedded active micro-optical devices. Tunable micro-lasers and optical switching based on MOEMS technology will improve future wavelength division multiplexing (WDM) systems. WDM vastly increases the speed of military communications and sensor data processing. From my designs, structures are prepared by molecular beam epitaxy. I design a mask set for studies of crystal plane selectivity. I perform a series of experiments on the selective …
Design And Fabrication Of Micro-Electro-Mechanical Structures For Tunable Micro-Optical Devices, Michael C. Harvey
Design And Fabrication Of Micro-Electro-Mechanical Structures For Tunable Micro-Optical Devices, Michael C. Harvey
Theses and Dissertations
Tunable micro-optical devices are expected to be vital for future military optical communication systems. In this research I seek to optimize the design of a microelectromechanical (MEM) structure integrated with a III-V semiconductor micro-optical device. The resonant frequency of an integrated optical device, consisting of a Fabry-Perot etalon or vertical cavity surface emitting laser (VCSEL), may be tuned by applying an actuation voltage to the MEM Flexure, thereby altering the device's optical cavity length. From my analysis I demonstrate tunable devices compatible with conventional silicon 5V integrated circuit technology. My design for a Fabry-Perot etalon has a theoretical tuning range …
Control And Characterization Of Line-Addressable Micromirror Arrays, Harris J. Hall
Control And Characterization Of Line-Addressable Micromirror Arrays, Harris J. Hall
Theses and Dissertations
This research involved the design and implementation of a complete line-addressable control system for a 32x32 electrostatic piston-actuated micromirror array device. Line addressing reduces the number of control lines from N2 to 2N making it possible to design larger arrays and arrays with smaller element sizes. The system utilizes the electromechanical bi-stability of individual elements to bold arbitrary bi-stable phase patterns. The control system applies pulse width modulated (PWM) signals to the rows and columns of the micromirror array. Three modes of operation were conceived and built into the system. The first was the traditional signal scheme which requires …