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LSU Doctoral Dissertations

MEMS

Publication Year

Articles 1 - 3 of 3

Full-Text Articles in Mechanical Engineering

Modeling And Simulation Of Surface Profile Forming Process Of Microlenses And Their Application In Optical Interconnection Devices, Zhengyu Miao Jan 2013

Modeling And Simulation Of Surface Profile Forming Process Of Microlenses And Their Application In Optical Interconnection Devices, Zhengyu Miao

LSU Doctoral Dissertations

Free space micro-optical systems require to integrate microlens array, micromirrors, optical waveguides, beam splitter, etc. on a single substrate. Out-of-plane microlens array fabricated by direct lithography provides pre-alignment during mask fabrication stage and has the advantage of mass manufacturing at low cost. However, this technology requires precise control of the surface profile of microlenses, which is a major technical challenge. The quality control of the surface profile of microlenses limits their applications. In this dissertation, the surface forming process of the out-of-plane microlenses in UV-lithography fabrication was modeled and simulated using a simplified cellular automata model. The microlens array was ...


Small Footprint High Flow Rate Microdevice For Rare Target Cell Capture, Taehyun Park Jan 2011

Small Footprint High Flow Rate Microdevice For Rare Target Cell Capture, Taehyun Park

LSU Doctoral Dissertations

A novel high flow rate cell capture design was introduced to overcome the limitations of the current technologies or methods for rare target cell capture. Even though the rare target cell capture using BioMEMS technology has great potential for cancer diagnosis, previous rare cell capture research could not overcome the limitations of low flow rate or low recovery rate. Rare cell research requires precise sample preparation for accurate results. A new method of preparation for a single or a precise number of target cell was introduced. Current sample preparation methods which are not suitable for rare cell research, such as ...


Manufacturing And Analysis Of A Liga Heat Exchanger For The Surface Of A Tube: A Cooling Simulation Of The Leading Edge Region Of A Turbine Blade, Christophe Marques Jan 2003

Manufacturing And Analysis Of A Liga Heat Exchanger For The Surface Of A Tube: A Cooling Simulation Of The Leading Edge Region Of A Turbine Blade, Christophe Marques

LSU Doctoral Dissertations

Fabricating nickel micro heat exchangers directly on planar or non-planar metal surfaces has been demonstrated using the LIGA micromachining process. These heat exchangers can effectively control the temperature of surfaces in high heat flux applications. Of particular interest is the temperature control of gas turbine engine components. The locations in the gas turbine engine where improved, efficient cooling is required includes gas turbine blades, stator vanes, the turbine disk, and the combustor liner. In this dissertation, the primary application of interest is the use of such heat exchangers to cool airfoils such as turbine blades. In the first part of ...