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Full-Text Articles in Mechanical Engineering

Simulation And Verification Of Fluid Jet Polishing, Senmiao Hu Nov 2016

Simulation And Verification Of Fluid Jet Polishing, Senmiao Hu

Graduate Theses and Dissertations

Fluid jet polishing (FJP) is a new advanced polishing technology that finds applications in many industries, especially in the optics industry. With the broad application of various surfaces in optics, the sub-micrometric scale and the nanometric surface roughness accuracy are major challenges. Fluid jet polishing is a technology developed from abrasive water jet machining. This technology is a water jet cutting technology, which uses high-pressure flow to cut/remove materials.

In this thesis, the working principle, and simulations, as well as verification of fluid jet polishing are thoroughly investigated. The verification of fluid jet polishing in this thesis includes velocity ...


Chemical Mechanical Planarization Of Electronic Materials, Fnu Atiquzzaman Jan 2012

Chemical Mechanical Planarization Of Electronic Materials, Fnu Atiquzzaman

Graduate Theses and Dissertations

In the modern semiconductor manufacturing processes, chemical mechanical planarization (CMP) has attained important processing step because of its ability to provide global planarization. CMP is the planarization technique which is used for the removal of excess material, as left over from the previous processing steps. In addition, CMP offers a uniform surface that is essential for subsequent processing steps, especially for the high resolution photolithography processes. In simpler notation, CMP is a process where a chemical reaction enhances in obtaining a planar surface through removal of the mechanical materials from a wafer.

In this study, CMP performance of three electronic ...