Mechanical Engineering Commons^™

Nanomechanical Characterization Of Cavity Growth And Rupture In Hydrogen-Implanted Single-Crystal Batio3., Young-Bae Park, Patrick Nardi, Xiaodong Li, Harry A. Atwater

Faculty Publications

A thermodynamic model of cavitynucleation and growth in ion-implanted single-crystal BaTiO₃ layer is proposed, and cavity formation is related to the measured mechanical properties to better understand hydrogen implantation-induced layer transfer processes for ferroelectric thin films. The critical radius for cavitynucleation was determined experimentally from blistering experiments performed under isochronal anneal conditions and was calculated using continuum mechanical models for deformation and fracture, together with thermodynamic models. Based on thermodynamic modeling, we suggest that cavitiesgrow toward the cracking criteria at a critical blister size whereupon gas is emitted from ruptured cavities. The main driving force for layer splitting is …