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Effects Of Boron Implantation In Films Of Iron-Nickel, J. Ryu, K. Castell, W. Nowak, C. Vittoria
Effects Of Boron Implantation In Films Of Iron-Nickel, J. Ryu, K. Castell, W. Nowak, C. Vittoria
Carmine Vittoria
We have implanted boron ions into films of Fe-Ni alloy composition. A homogeneous distribution of boron was determined from the sputter Auger analysis with a concentration of 18% and 34% for low- and high-dose implantation, respectively. The resistivity of film was increased by a factor of 2 and 4 as a result of low- and high-dose implantation, respectively. The magnetic properties of these films are studied as a function of annealing temperature by using FMR measurements. Both the uniaxial anisotropy field and FMR linewidth are dramatically decreased as a result of annealing at elevated temperatures. The changes of effective magnetization …