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Electro-Mechanical Systems

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Articles 61 - 68 of 68

Full-Text Articles in Mechanical Engineering

Dna-Decorated Carbon Nanotubes As Sensitive Layer For Aln Contour-Mode Resonant-Mems Gravimetric Sensor, Chiara Zuniga, Matteo Rinaldi, Samuel M. Khamis, Timothy S. Jones, A T. Johnson, Gianluca Piazza Jun 2009

Dna-Decorated Carbon Nanotubes As Sensitive Layer For Aln Contour-Mode Resonant-Mems Gravimetric Sensor, Chiara Zuniga, Matteo Rinaldi, Samuel M. Khamis, Timothy S. Jones, A T. Johnson, Gianluca Piazza

Matteo Rinaldi

In this work a nano-enabled gravimetric chemical sensor prototype based on single-stranded DNA (ss-DNA) decorated single-walled carbon nanotubes (SWNT) as nano-functionalization layer for Aluminun Nitride (AIN) contour-mode resonant-MEMS gravimetric sensors has been demonstrated. Two resonators fabricated on the same silicon chip and operating at different resonance frequencies, 287 and 450 MHz, were functionalized with this novel bio-coating layer to experimentally prove the capability of two distinct single strands of DNA bound to SWNT to enhance differently the adsorption of volatile organic compounds such as dinitroluene (DNT, simulant for explosive vapor) and dymethyl-methylphosphonate (DMMP, a simulant for nerve agent sarin). The ...


Nanoenabled Microelectromechanical Sensor For Volatile Organic Chemical Detection, Chiara Zuniga, Matteo Rinaldi, Samuel M. Khamis, A. T. Johnson, Gianluca Piazza Jun 2009

Nanoenabled Microelectromechanical Sensor For Volatile Organic Chemical Detection, Chiara Zuniga, Matteo Rinaldi, Samuel M. Khamis, A. T. Johnson, Gianluca Piazza

Matteo Rinaldi

A nanoenabled gravimetric chemical sensor prototype based on the large scale integration of single-stranded DNA (ss-DNA) decorated single-walled carbon nanotubes (SWNTs) as nanofunctionalization layer for aluminum nitride contour-mode resonant microelectromechanical (MEM) gravimetric sensors has been demonstrated. The capability of two distinct single strands of DNA bound to SWNTs to enhance differently the adsorption of volatile organic compounds such as dinitroluene (simulant for explosive vapor) and dymethyl-methylphosphonate (simulant for nerve agent sarin) has been verified experimentally. Different levels of sensitivity (17.3 and 28 KHz µm^2/fg) due to separate frequencies of operation (287 and 450 MHz) on the same ...


5-10 Ghz Aln Contour-Mode Nanoelectromechanical Resonators, Matteo Rinaldi, Chiara Zuniga, Gianluca Piazza Jun 2009

5-10 Ghz Aln Contour-Mode Nanoelectromechanical Resonators, Matteo Rinaldi, Chiara Zuniga, Gianluca Piazza

Matteo Rinaldi

This paper reports on the design and experimental verification of Super High Frequency (SHF) laterally vibrating NanoElctroMechanical (NEMS) resonators. For the first time, AlN piezoelectric nanoresonators with multiple frequencies of operation ranging between 5 and 10 GHz have been fabricated on the same chip and attained the highest f-Q product (4.6E12 Hz) ever reported in AlN contour-mode devices. These piezoelectric NEMS resonators are the first of their class to demonstrate on-chip sensing and actuation of nanostructures without the need of cumbersome or power consuming excitation and readout systems. Effective piezoelectric activity has been demonstrated in thin AlN films having ...


Aln Contour-Mode Resonators For Narrow-Band Filters Above 3 Ghz, Matteo Rinaldi, Chiara Zuniga, Chengjie Zuo, Gianluca Piazza Mar 2009

Aln Contour-Mode Resonators For Narrow-Band Filters Above 3 Ghz, Matteo Rinaldi, Chiara Zuniga, Chengjie Zuo, Gianluca Piazza

Matteo Rinaldi

This paper reports on the design and experimental verification of a new class of thin-film (250 nm) Super High Frequency (SHF) laterally-vibrating piezoelectric microelectromechanical (MEMS) resonators suitable for the fabrication of narrow-band MEMS filters operating at frequencies above 3 GHz. The device dimensions have been opportunely scaled both in the lateral and vertical dimensions in order to excite a contour-extensional mode of vibration in nano features of an ultra-thin (250 nm) Aluminum Nitride (AlN) film. In this first demonstration two-port resonators vibrating up to 4.5 GHz were fabricated on the same die and attained electromechanical coupling, kt2, in excess ...


Implementation Of A Mems Laboratory Course With Modular, Multidisciplinary Team Projects, John Lee, Stacy H. Gleixner, Tai-Ran Hsu, David W. Parent Jun 2007

Implementation Of A Mems Laboratory Course With Modular, Multidisciplinary Team Projects, John Lee, Stacy H. Gleixner, Tai-Ran Hsu, David W. Parent

Sang-Joon John Lee

This paper presents the implementation and outcomes of a hands-on laboratory course in microelectromechanical systems (MEMS), co-developed by a multidisciplinary team of faculty from mechanical engineering, electrical engineering, and materials engineering. Central to the design of the course is an emphasis on implementing modules that are able to overcome critical barriers related to (1) diverse academic background from different majors and (2) practical limitations in microfabrication facilities. These points are vital for promoting MEMS education, because they expand the student pool and reach audiences that need a cost-effective way to support instructional laboratory experiences in MEMS without the broader infrastructure ...


A Development Framework For Hands-On Laboratory Modules In Microelectromechanical Systems (Mems), John Lee, Stacy H. Gleixner, Tai-Ran Hsu, David W. Parent Jun 2006

A Development Framework For Hands-On Laboratory Modules In Microelectromechanical Systems (Mems), John Lee, Stacy H. Gleixner, Tai-Ran Hsu, David W. Parent

Sang-Joon John Lee

This paper presents work-in-progress in terms of a framework that we have structured to support effective joint development among faculty from different engineering backgrounds, spanning mechanical engineering (ME), electrical engineering (EE), and materials engineering (MatE). The framework is organized in short instructional modules designed to span not only major device types and different fabrication technologies, but also different levels of resource requirements. An example of using functional prerequisites--rather than course prerequisites—is presented for one module, wherein each functional prerequisite must be satisfied by at least one member of each student team that will undertake the module. Roles of the ...


Memories Of Dad 15.11.1902- 16.10.1970 A Celebration Of The Life And Works Of Edmund Ramsay Wigan, Marcus R. Wigan Nov 2003

Memories Of Dad 15.11.1902- 16.10.1970 A Celebration Of The Life And Works Of Edmund Ramsay Wigan, Marcus R. Wigan

Marcus R Wigan

Edmund Ramsay Wigan was a distinguished Acoustical and Mechanical Engineer, who patented literally several dozen devices and ideas, was responsible for the field radios used by the Allied forces in Europe in World War 2, and when invited as the special merit Senior Principal at the BBC Research lab in Kingston, Surrey, invented the quality meters, tuned all the BBC broadcasting aerials for quality, and did applied research creating a reliable measure for subjective levels of sound distortion. As a minor practical measure invented the one cycle offset used ever since to avoid feedback in large multi-miked rooms. He was ...


Simulations Of Machines Using Matlab And Simulink, John Gardner Dec 2000

Simulations Of Machines Using Matlab And Simulink, John Gardner

John Gardner

No abstract provided.