Open Access. Powered by Scholars. Published by Universities.®

Mechanical Engineering Commons

Open Access. Powered by Scholars. Published by Universities.®

Selected Works

Electro-Mechanical Systems

NEMS

Articles 1 - 2 of 2

Full-Text Articles in Mechanical Engineering

Self-Biased 215mhz Magnetoelectric Nems Resonator For Ultra-Sensitive Dc Magnetic Field Detection, Tianxiang Nan Jun 2013

Self-Biased 215mhz Magnetoelectric Nems Resonator For Ultra-Sensitive Dc Magnetic Field Detection, Tianxiang Nan

Tianxiang Nan

High sensitivity magnetoelectric sensors with their lectromechanical resonance frequencies , 200 kHz have been recently demonstrated using gnetostrictive/piezoelectric magnetoelectric eterostructures. In this work, we demonstrate a novel agnetoelectric nano-electromechanical systems (NEMS) resonator with an electromechanical resonance frequency of 215 MHz based on an AlN/(FeGaB/Al2O3) 3 10 magnetoelectric heterostructure for detecting DC magnetic fields. This magnetoelectric NEMS resonator showed a high quality factor of 735, and strong magnetoelectric coupling with a large voltage tunable sensitivity. The admittance of the magnetoelectric NEMS resonator was very sensitive to DC magnetic fields at its electromechanical resonance, which led to a new detection ...


Super-High-Frequency Two-Port Aln Contour-Mode Resonators For Rf Applications, Matteo Rinaldi, Chiara Zuniga, Chengjie Zuo, Gianluca Piazza Feb 2013

Super-High-Frequency Two-Port Aln Contour-Mode Resonators For Rf Applications, Matteo Rinaldi, Chiara Zuniga, Chengjie Zuo, Gianluca Piazza

Matteo Rinaldi

This paper reports on the design and experimental verification of a new class of thin-film (250 nm) superhigh- frequency laterally-vibrating piezoelectric microelectromechanical (MEMS) resonators suitable for the fabrication of narrow-band MEMS filters operating at frequencies above 3 GHz. The device dimensions have been opportunely scaled both in the lateral and vertical dimensions to excite a contourextensional mode of vibration in nanofeatures of an ultra-thin (250 nm) AlN film. In this first demonstration, 2-port resonators vibrating up to 4.5 GHz have been fabricated on the same die and attained electromechanical coupling, kt^2, in excess of 1.5%. These devices ...