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Missouri University of Science and Technology
Detectors -- Design and construction<br />Femtosecond lasers<br />Micromachining<br />Silicon -- Surfaces
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Full-Text Articles in Mechanical Engineering
Femtosecond Laser Micromachining Of Microstructures For Sensing And Detection, Yukun Han
Femtosecond Laser Micromachining Of Microstructures For Sensing And Detection, Yukun Han
Doctoral Dissertations
"This thesis focuses on the fabrication and analysis of miniature functional devices that can be used for different sensing and detection applications. As the first step, the surface characteristics and morphology of the micro/nano structures on substrates (fused silica and silicon) fabricated in water and in air by femtosecond laser were investigated. Based on this study, three micro devices have been designed and fabricated by femtosecond laser, and they were analyzed for optical and chemical sensing and detections. The three micro devices are: 1) an optical Fabry-Perot interferometer in optical fiber (made from fused silica) with smooth cavity surfaces. The …