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Full-Text Articles in Mechanical Engineering
Ultra-Thin Boron Nitride Films By Pulsed Laser Deposition: Plasma Diagnostics, Synthesis, And Device Transport, Nicholas Robert Glavin
Open Access Dissertations
This work describes, for the first time, a pulsed laser deposition (PLD) technique for growth of large area, stoichiometric ultra-thin hexagonal and amorphous boron nitride for next generation 2D material electronics. The growth of boron nitride, in this case, is driven by the high kinetic energies and chemical reactivities of the condensing species formed from physical vapor deposition (PVD) processes, which can facilitate growth over large areas and at reduced substrate temperatures. The use of optical emission spectroscopy during plasma growth provides insight into chemistry, kinetic energies, time of flight data, and spatial distributions within a PVD plasma plume ablated ...