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Self-Biased 215mhz Magnetoelectric Nems Resonator For Ultra-Sensitive Dc Magnetic Field Detection, Tianxiang Nan
Self-Biased 215mhz Magnetoelectric Nems Resonator For Ultra-Sensitive Dc Magnetic Field Detection, Tianxiang Nan
Tianxiang Nan
High sensitivity magnetoelectric sensors with their lectromechanical resonance frequencies , 200 kHz have been recently demonstrated using gnetostrictive/piezoelectric magnetoelectric eterostructures. In this work, we demonstrate a novel agnetoelectric nano-electromechanical systems (NEMS) resonator with an electromechanical resonance frequency of 215 MHz based on an AlN/(FeGaB/Al2O3) 3 10 magnetoelectric heterostructure for detecting DC magnetic fields. This magnetoelectric NEMS resonator showed a high quality factor of 735, and strong magnetoelectric coupling with a large voltage tunable sensitivity. The admittance of the magnetoelectric NEMS resonator was very sensitive to DC magnetic fields at its electromechanical resonance, which led to a new detection mechanism for …