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Full-Text Articles in Mechanical Engineering
Bouncing Dynamics Of A Class Of Mem/Nem Switching Systems, Mohamed Bognash
Bouncing Dynamics Of A Class Of Mem/Nem Switching Systems, Mohamed Bognash
Electronic Thesis and Dissertation Repository
The aim of the present research is to understand the bouncing dynamic behavior of NEM/MEM switches in order to improve the switch performance and reliability. It is well known that the bouncing can dramatically degrade the switch performance and life; hence, in the present study, bouncing dynamics of a cantilever-based NME/MEM switch has been studied in detail. To this end, a model of a MEM switch that incorporates electrostatic force, squeeze film air damping force as well as asperity-based contact force has been proposed for an electrostatically actuated switch. An actuation force due to piezoelectric effects is further included in …
Self-Biased 215mhz Magnetoelectric Nems Resonator For Ultra-Sensitive Dc Magnetic Field Detection, Tianxiang Nan
Self-Biased 215mhz Magnetoelectric Nems Resonator For Ultra-Sensitive Dc Magnetic Field Detection, Tianxiang Nan
Tianxiang Nan
High sensitivity magnetoelectric sensors with their lectromechanical resonance frequencies , 200 kHz have been recently demonstrated using gnetostrictive/piezoelectric magnetoelectric eterostructures. In this work, we demonstrate a novel agnetoelectric nano-electromechanical systems (NEMS) resonator with an electromechanical resonance frequency of 215 MHz based on an AlN/(FeGaB/Al2O3) 3 10 magnetoelectric heterostructure for detecting DC magnetic fields. This magnetoelectric NEMS resonator showed a high quality factor of 735, and strong magnetoelectric coupling with a large voltage tunable sensitivity. The admittance of the magnetoelectric NEMS resonator was very sensitive to DC magnetic fields at its electromechanical resonance, which led to a new detection mechanism for …
Super-High-Frequency Two-Port Aln Contour-Mode Resonators For Rf Applications, Matteo Rinaldi, Chiara Zuniga, Chengjie Zuo, Gianluca Piazza
Super-High-Frequency Two-Port Aln Contour-Mode Resonators For Rf Applications, Matteo Rinaldi, Chiara Zuniga, Chengjie Zuo, Gianluca Piazza
Matteo Rinaldi
This paper reports on the design and experimental verification of a new class of thin-film (250 nm) superhigh- frequency laterally-vibrating piezoelectric microelectromechanical (MEMS) resonators suitable for the fabrication of narrow-band MEMS filters operating at frequencies above 3 GHz. The device dimensions have been opportunely scaled both in the lateral and vertical dimensions to excite a contourextensional mode of vibration in nanofeatures of an ultra-thin (250 nm) AlN film. In this first demonstration, 2-port resonators vibrating up to 4.5 GHz have been fabricated on the same die and attained electromechanical coupling, kt^2, in excess of 1.5%. These devices are employed to …