Mechanical Engineering Commons^™

Surface Engineering Solutions For Immersion Phase Change Cooling Of Electronics, Brendon M. Doran

Master's Theses

Micro- and nano-scale surface modifications have been a subject of great interest for enhancing the pool boiling heat transfer performance of immersion cooling systems due to their ability to augment surface area, improve wickability, and increase nucleation site density. However, many of the surface modification technologies that have been previously demonstrated show a lack of evidence concerning scalability for use at an industrial level. In this work, the pool boiling heat transfer performance of nanoporous anodic aluminum oxide (AAO) films, copper oxide (CuO) nanostructure coatings, and 1D roll-molded microfin arrays has been studied. Each of these technologies possess scalability in …

Design, Modeling, Fabrication, And Testing Of A Multistage Micro Gas Compressor With Piezoelectric Unimorph Diaphragm And Passive Microvalves For Microcooling Applications, Shawn Thanhson Le

Doctoral Dissertations

This dissertation investigates the development of a multistage micro gas compressor utilizing multiple pump stages cascaded in series to increase the pressure rise with passive microvalves and piezoelectric unimorph diaphragms. This research was conducted through modeling, simulation, design, and fabrication of the microcompressor and its components. A single-stage and a two-stage microcompressor were developed to demonstrate and compare the performance and effectiveness of using a cascaded multistage design.

Steady fluid flow through static microvalves structure was studied to gain insight on its gas flow dynamics and characteristics. Transient analysis combined with the structure's interaction was investigated with an analytical model …

An Intermediate-Layer Lithography Method For Producing Metal Micron/Nano Patterns And Conducting Polymer-Based Microdevices, Xinchuan Liu

Doctoral Dissertations

Metals have been widely used in the areas of integration circuit (IC) and microelectromechanical systems (MEMS) fields as materials for gates, contact pads, interconnects, corrosion resistance coatings, rectifying contacts, redundancy memories, heating elements, mechanical parts, magnetic component, etc. due to their good properties, such as high electrical conductivity and good thermal conductivity. Conducting polymers, because of their promising potential to replace silicon and metals in building devices, have attracted great attention in recent decades.

Traditional photolithography methods are often used to pattern metals and conducting polymers. However, it cannot be used to fabricate nano patterns because the minimum feature size …

Layer-By-Layer Nanoassembly Combined With Microfabrication Techniques For Microelectronics And Microelectromechanical Systems, Jingshi Shi

Doctoral Dissertations

The objective of this work is to investigate the combination of layer-by-layer self-assembly with microfabrication technology and its applications in microelectronics and MEMS.

One can assemble, on a standard silicon wafer, needed multilayers containing different nanoparticles and polymers and then apply various micromanufacturing techniques to form microdevices with nanostructured elements.

Alternate layer-by-layer self-assembly of linear polyions and colloidal silica at elevated temperatures have been firstly studied by QCM and SEM. LbL self-assembly and photolithography were combined to fabricate an indium resistor. The RTA method was employed in the fabrication. Hot-embossing technique as a reasonably fast and moderately expensive technique was …

Kinetics Of Laser Chemical Vapor Deposition Of Carbon And Refractory Metals, Feng Gao

Doctoral Dissertations

Three-dimensional laser chemical vapor deposition (3D-LCVD) has been used to grow rods of carbon, tungsten, titanium, and hafnium from a variety of hydrocarbons and metal halide-based precursors. A novel computerized 3D-LCVD system was designed and successfully used in the experiments. A focused Nd:Yag laser beam (λ = 1.06 μm) was utilized to locally heat up a substrate to deposition temperature. The rods, which grew along the axis of the laser beam, had a typical diameter of 30–80 μm and a length of about 1 mm. The precursors for carbon deposition were the alkynes: propyne, butyne, pentyne, hexyne, and octyne. Propyne …

The Optimized Electrostatic Motor, Christopher Lee Rambin

Doctoral Dissertations

The most common means of electrically activated actuation is the electromagnetic motor. All electromagnetic motors have a low output to weight ratio and low energy efficiency. The motor's weight is due to the coils and magnets used to generate propulsion. The energy loss is mainly the result of Joule heating that is inherent with any current driven device. An electrostatic motor offers the potential of significantly less weight and higher energy efficiency. This lower weight characteristic is due to the epoxide material used to construct the major components of its propulsion unit. Greater efficiency results from the reduced Joule heating …