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Full-Text Articles in Mechanical Engineering
Design, Fabrication, Processing, And Testing Of Micro-Electro-Mechanical Chemical Sensors, Brian S. Freeman
Design, Fabrication, Processing, And Testing Of Micro-Electro-Mechanical Chemical Sensors, Brian S. Freeman
Theses and Dissertations
Chemical microsensors are a new field integrating chemical thin film technology with solid-state fabrication techniques to make devices capable of detecting chemicals in the environment. This thesis evaluated commercially available fabrication processes and numerous sensor designs for working chemical sensors. The commercial processes used were MUMPS for surface micromachined devices and MOSIS for bulk micromachined devices. Overall, eight fabrication runs and 29 different designs were made. Of these designs, two were shown to work effectively. Other designs failed due to fabrication problems and design errors that caused release problems. One design that worked was a surface micromachined chemoresistor with interdigitated …
Design And Development Of Microswitches For Micro-Electro-Mechanical Relay Matrices, Mark W. Phipps
Design And Development Of Microswitches For Micro-Electro-Mechanical Relay Matrices, Mark W. Phipps
Theses and Dissertations
Many different micro-electro-mechanical switches were designed in the Multi-User MEMS processes (MUMPs) and deep x-ray lithography and electroforming (LIGA) processes. The switches were composed of actuators that operated based upon either electrostatic forces or thermal forces. A thermally activated beam flexure actuator that operated based upon differential heating was used extensively. This actuator, which was fabricated in the MUMPs process, was able to deflect up to 12 microns with a total input power of less than 25 mW. The thermal resistance, which was needed to model this actuator, was determined from a material constant, 1.9 ± 0.08 m1.5-°C-W …