Articles 1 - 1 of 1
Full-Text Articles in Engineering Science and Materials
Grain Size Effects On Viscoelastic Relaxation Of Sub-Micron Thickness Fcc Metallic Films, Jeffrey Smyth
Theses and Dissertations
Sub-micron thickness metallic thin films are known to exhibit mechanical size effects, where the thin film mechanical behavior can differ significantly from that of a bulk version of the same material. One such mechanical behavior, and the focus of this work, is the unique thin film viscoelastic deformation response to sub-yield, low-strain stimuli in near-ambient temperature environments. In engineering components using bulk materials, strains within the elastic regime are generally considered instantaneous. It is only at higher operating temperatures that temporal deformation processes, such as creep, are considered in bulk component design. However, in Micro-Electro-Mechanical Systems (MEMS), specifically Radio Frequency ...