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Engineering Science and Materials Commons

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2008

Boundary Element

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Computational Analysis Of Input-Shaping Control Of Microelectromechanical Mirrors, Thomas Starling Dec 2008

Computational Analysis Of Input-Shaping Control Of Microelectromechanical Mirrors, Thomas Starling

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Advances in micromachining technology have enabled the design and development of high performance microelectromechanical systems (MEMS). There is a pressing need for control techniques that can be used to improve the dynamic behavior of MEMS such as the response speed and precision. In MEMS applications, open-loop control is attractive as it computes a priori the required system input to achieve desired dynamic behavior without using feedback, thus eliminating the problems associated with closed-loop MEMS control. While the input-shaping control is attractive due to its simplicity, the effectiveness of this control approach depends on the accuracy of the model that is ...