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Articles 1 - 11 of 11

Full-Text Articles in Engineering Science and Materials

Influence Of Flow Rate, Nozzle Speed, Pitch And The Number Of Passes On The Thickness Of S1805 Photoresist In Suss Microtec As8 Spray Coater, Rohan Sanghvi, Gyuseok Kim Oct 2019

Influence Of Flow Rate, Nozzle Speed, Pitch And The Number Of Passes On The Thickness Of S1805 Photoresist In Suss Microtec As8 Spray Coater, Rohan Sanghvi, Gyuseok Kim

Tool Data

S1805 positive photoresist has been deposited on single crystalline Si wafers using a Suss MicroTec Alta Spray. The influence of flow rate, nozzle speed, pitch and number of passes on the thickness of the photoresist was studied. Results show that the thickness of S1805 is linearly proportional to the flow rate and number of passes, and inversely proportional to the nozzle speed and pitch.


Correction Of Pattern Size Deviations In The Fabrication Of Photomasks Made With A Laser Direct-Writer, Ningzhi Xie, George Patrick Watson Oct 2019

Correction Of Pattern Size Deviations In The Fabrication Of Photomasks Made With A Laser Direct-Writer, Ningzhi Xie, George Patrick Watson

Protocols and Reports

When using Heidelberg DWL66+ laser writer to fabricate the photomask, the pattern feature dimensions may have deviations. These deviations can be caused by the lithography process and the undercut in the metal etch process. The same deviation value of 0.8µm was found to appear in all the patterns independent of the pattern original size and local pattern density. To overcome this universal deviation, a universal bias is suggested to be applied to the original patterns during the data preparation for the lithography process. In order to ensure this pre-exposure bias method can work, both the laser direct-write exposure conditions ...


Progress Report I: Fabrication Of Nanopores In Silicon Nitride Membranes Using Self-Assembly Of Ps-B-Pmma, Unnati Joshi, Vishal Venkatesh, Hiromichi Yamamoto Mar 2019

Progress Report I: Fabrication Of Nanopores In Silicon Nitride Membranes Using Self-Assembly Of Ps-B-Pmma, Unnati Joshi, Vishal Venkatesh, Hiromichi Yamamoto

Protocols and Reports

This progress report describes fabrication of silicon nitride membranes from Si wafers using cleanroom techniques, and of nanopore preparation via a self-assembled PS-b-PMMA film. A 36.9 µm thick membrane is successfully prepared by KOH wet etching. The membrane is a layered structure of 36.8 µm thick Si and 116 nm thick silicon nitride. It is also exhibited that in the 47 nm thick PS-b-PMMA film, the nanopore structure is observed in the vicinity of a dust particle, but most of the area indicates lamellar domain structure. The thickness of PS-b-PMMA film will ...


Inkjet Printing Of Ag Nanoparticles Using Dimatix Inkjet Printer, No 2, Ming Yuan Chuang May 2017

Inkjet Printing Of Ag Nanoparticles Using Dimatix Inkjet Printer, No 2, Ming Yuan Chuang

Protocols and Reports

This report describes the rheological analysisof the present Ag nanoparticle ink, and confirms that it is suitable for the piezoelectric drop-on-demand printing for both of 1 pL and 10 pL cartridges. The satellite drops and the splashing on the substrate are also discussed for optimization of the nozzle temperature and the jetting voltage. The minimum horizontal and vertical line widths are shown to be 30 and 40 µm, respectively, but the average minimum single line width is estimated to be ~50 µm. The non-uniform width lines are suggested to arise from the bulge instability. Furthermore, it is indicated that the ...


Inkjet Printing Of Ag Nanoparticles Using Dimatix Inkjet Printer, No 1, Amal Abbas, Inayat Bajwa Jan 2017

Inkjet Printing Of Ag Nanoparticles Using Dimatix Inkjet Printer, No 1, Amal Abbas, Inayat Bajwa

Protocols and Reports

Ag nanoparticle inkjet printing on polyimide and polyethylene terephthalate films has been performed using Dimatix inkjet printer at Quattrone Nanofabrication Facility. This article describes selection of Ag nanoparticle inks and reports the progress of optimization of drop spacing, drop frequency, droplet size, and waveform for high resolution features, and furthermore reveals the pros and cons of Dimatix inkjet printing. In addition, the resistivity of Ag nanoparticle line sintered was determined to be ~2.2 x 10-5 Ωm. The adhesion and bending tests indicated that Ag nanoparticle pattern sintered on PI and PET films had exceptional mechanical stability.


Self-Aligned Double Pattern, No1, Yinong Cao May 2016

Self-Aligned Double Pattern, No1, Yinong Cao

Protocols and Reports

No abstract provided.


Green Scheduling For Radiant Systems In Buildings, Truong X. Nghiem, Madhur Behl, George J. Pappas, Rahul Mangharam Oct 2012

Green Scheduling For Radiant Systems In Buildings, Truong X. Nghiem, Madhur Behl, George J. Pappas, Rahul Mangharam

Real-Time and Embedded Systems Lab (mLAB)

In this report we look at the problem of peak power reduction for buildings with electric radiant floor heating systems. Uncoordinated operation of a multi-zone radiant floor heating system can result in temporally correlated electricity demand surges or peaks in the building’s electricity consumption. As peak power prices are 200-400 times that of the nominal rate, this uncoordinated activity can result in high electricity costs and expensive system operation. We have previously presented green scheduling as an approach for reducing the aggregate peak power consumption in buildings while ensuring that indoor thermal comfort is always maintained. This report extends ...


Use Of A Single Multiplexed Cmos Oscillator As Direct Frequency Read-Out For An Array Of Eight Aln Contour-Mode Nems Resonant Sensors, Matteo Rinaldi, Chiara Zuniga, Brandon Duick, Gianluca Piazza Nov 2010

Use Of A Single Multiplexed Cmos Oscillator As Direct Frequency Read-Out For An Array Of Eight Aln Contour-Mode Nems Resonant Sensors, Matteo Rinaldi, Chiara Zuniga, Brandon Duick, Gianluca Piazza

Departmental Papers (ESE)

This paper reports on the first demonstration of a single multiplexed CMOS oscillator circuit employed as direct frequency readout for an array of 8 nanoscaled aluminum nitride Contour-Mode Resonant Sensors (CMR-S). In this first prototype 8 thin-film (250 nm) AlN CMR-S operating at 186 MHz were fabricated on the same chip and simultaneously wire-bonded to a Pierce-like oscillator circuit (fabricated in the ON Semiconductor 0.5 µm CMOS process) by means of 8 CMOS transmission gates addressed via a 3 bit on-chip decoder. The 8 CMR-S were simultaneously exposed to different concentrations of methanol (0.1–1% of the saturated ...


On Controlled Linear Diffusions With Delay In A Model Of Optimal Advertising Under Uncertainty With Memory Effects, Fausto Gozzi, Carlo Marinelli, Sergei Savin Aug 2009

On Controlled Linear Diffusions With Delay In A Model Of Optimal Advertising Under Uncertainty With Memory Effects, Fausto Gozzi, Carlo Marinelli, Sergei Savin

Operations, Information and Decisions Papers

We consider a class of dynamic advertising problems under uncertainty in the presence of carryover and distributed forgetting effects, generalizing the classical model of Nerlove and Arrow (Economica 29:129–142, 1962). In particular, we allow the dynamics of the product goodwill to depend on its past values, as well as previous advertising levels. Building on previous work (Gozzi and Marinelli in Lect. Notes Pure Appl. Math., vol. 245, pp. 133–148, 2006), the optimal advertising model is formulated as an infinite-dimensional stochastic control problem. We obtain (partial) regularity as well as approximation results for the corresponding value function. Under ...


Xps Dos Studies Of Oxygen-Plasma Treated Yba2Cu3O7-Δ Surfaces As A Function Of Temperature, T. S. Conard, John M. Vohs, J. J. Pireaux, R. Caudano Jan 1988

Xps Dos Studies Of Oxygen-Plasma Treated Yba2Cu3O7-Δ Surfaces As A Function Of Temperature, T. S. Conard, John M. Vohs, J. J. Pireaux, R. Caudano

Departmental Papers (CBE)

Monochromatized Alkα XPS has been used to monitor changes in the electronic structure of 123 sintered pellets as a function of temperature (90-650K). Since 123 surfaces are known to lose oxygen and react with water, a novel procedure was used to prepare the material surface that would be representative of the bulk material. In contrast with published results, we observed drastic DOS modification (i.e. the appearance of a new peak close to the Fermi level at low temperature).


Spin Waves In The Dilute Heisenberg Ferromagnet, A. Brooks Harris, D. Kumar Jan 1972

Spin Waves In The Dilute Heisenberg Ferromagnet, A. Brooks Harris, D. Kumar

Department of Physics Papers

The energy of long wave length spin waves in dilute Heisenberg ferromagnets is calculated. It is shown that spin waves can exist only within an infinite cluster of magnetic spins and that such spin waves are mechanically stable. Heuristic arguments based on dimensionality of the infinite cluster imply that there is no thermal instability of the type discussed by Mermin and Wagner. Thus, the critical concentration for ferromagnetism is essentially equal to percolation concentration.