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Full-Text Articles in Engineering Science and Materials

Influence Of Flow Rate, Nozzle Speed, Pitch And The Number Of Passes On The Thickness Of S1805 Photoresist In Suss Microtec As8 Spray Coater, Rohan Sanghvi, Gyuseok Kim Oct 2019

Influence Of Flow Rate, Nozzle Speed, Pitch And The Number Of Passes On The Thickness Of S1805 Photoresist In Suss Microtec As8 Spray Coater, Rohan Sanghvi, Gyuseok Kim

Tool Data

S1805 positive photoresist has been deposited on single crystalline Si wafers using a Suss MicroTec Alta Spray. The influence of flow rate, nozzle speed, pitch and number of passes on the thickness of the photoresist was studied. Results show that the thickness of S1805 is linearly proportional to the flow rate and number of passes, and inversely proportional to the nozzle speed and pitch.


Correction Of Pattern Size Deviations In The Fabrication Of Photomasks Made With A Laser Direct-Writer, Ningzhi Xie, George Patrick Watson Oct 2019

Correction Of Pattern Size Deviations In The Fabrication Of Photomasks Made With A Laser Direct-Writer, Ningzhi Xie, George Patrick Watson

Protocols and Reports

When using Heidelberg DWL66+ laser writer to fabricate the photomask, the pattern feature dimensions may have deviations. These deviations can be caused by the lithography process and the undercut in the metal etch process. The same deviation value of 0.8µm was found to appear in all the patterns independent of the pattern original size and local pattern density. To overcome this universal deviation, a universal bias is suggested to be applied to the original patterns during the data preparation for the lithography process. In order to ensure this pre-exposure bias method can work, both the laser direct-write exposure conditions ...


Inkjet Printing Of Ag Nanoparticles Using Dimatix Inkjet Printer, No 2, Ming Yuan Chuang May 2017

Inkjet Printing Of Ag Nanoparticles Using Dimatix Inkjet Printer, No 2, Ming Yuan Chuang

Protocols and Reports

This report describes the rheological analysisof the present Ag nanoparticle ink, and confirms that it is suitable for the piezoelectric drop-on-demand printing for both of 1 pL and 10 pL cartridges. The satellite drops and the splashing on the substrate are also discussed for optimization of the nozzle temperature and the jetting voltage. The minimum horizontal and vertical line widths are shown to be 30 and 40 µm, respectively, but the average minimum single line width is estimated to be ~50 µm. The non-uniform width lines are suggested to arise from the bulge instability. Furthermore, it is indicated that the ...


Inkjet Printing Of Ag Nanoparticles Using Dimatix Inkjet Printer, No 1, Amal Abbas, Inayat Bajwa Jan 2017

Inkjet Printing Of Ag Nanoparticles Using Dimatix Inkjet Printer, No 1, Amal Abbas, Inayat Bajwa

Protocols and Reports

Ag nanoparticle inkjet printing on polyimide and polyethylene terephthalate films has been performed using Dimatix inkjet printer at Quattrone Nanofabrication Facility. This article describes selection of Ag nanoparticle inks and reports the progress of optimization of drop spacing, drop frequency, droplet size, and waveform for high resolution features, and furthermore reveals the pros and cons of Dimatix inkjet printing. In addition, the resistivity of Ag nanoparticle line sintered was determined to be ~2.2 x 10-5 Ωm. The adhesion and bending tests indicated that Ag nanoparticle pattern sintered on PI and PET films had exceptional mechanical stability.


Mapping Trabecular Bone Fabric Tensor By In Vivo Magnetic Resonance Imaging, Michael J. Wald Dec 2010

Mapping Trabecular Bone Fabric Tensor By In Vivo Magnetic Resonance Imaging, Michael J. Wald

Publicly Accessible Penn Dissertations

The mechanical competence of bone depends upon its quantity, structural arrangement, and chemical composition. Assessment of these factors is important for the evaluation of bone integrity, particularly as the skeleton remodels according to external (e.g. mechanical loading) and internal (e.g. hormonal changes) stimuli. Micro magnetic resonance imaging (µMRI) has emerged as a non-invasive and non-ionizing method well-suited for the repeated measurements necessary for monitoring changes in bone integrity. However, in vivo image-based directional dependence of trabecular bone (TB) has not been linked to mechanical competence or fracture risk despite the existence of convincing ex vivo evidence. The objective ...