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University of Colorado, Boulder

2016

Mechanical Engineering Graduate Theses & Dissertations

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Roll-To-Roll Atomic Layer Deposition Of Ultrabarriers, Alexander Yersak Jan 2016

Roll-To-Roll Atomic Layer Deposition Of Ultrabarriers, Alexander Yersak

Mechanical Engineering Graduate Theses & Dissertations

Atomic layer deposition (ALD) is a bottom-up, gas phase, thin film deposition technique based on sequential, self-limiting binary surface reactions. The precise sub-nanometer film thickness control and conformal nature of this process have led to various commercial applications of ALD. However, ALD films are most commonly deposited in batch processes at low pressures, which raises throughput and/or cost concerns for many otherwise promising applications. This problem can be solved by spatial ALD (S-ALD) which is a version of the ALD technique where the precursors are separated in space rather than time. We have demonstrated the first atmospheric pressure roll-to-roll ...