Engineering Science and Materials Commons^™

Metal Thin Film Stiffness Extraction Technique For Surface Acoustic Wave Filters, Travis R. Weismeyer

Electronic Theses and Dissertations

Accurate knowledge of the surface acoustic wave (SAW) properties propagating at the surface of a piezoelectric substrate with thin films, electrodes or temperature compensated films, is critical in SAW filter design to meet the target frequency response, power durability and performance prior to device fabrication. While reliable material constants exist for substrates such as LiNbO3 used in SAW filters, the absolute elastic constants associated with operational thin films used for electrodes or temperature compensation do not exist. Although the bulk values of the constituent materials are known, the composite film/substrate properties are difficult to predict since they depend strongly on …