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Articles 1 - 30 of 57
Full-Text Articles in Electronic Devices and Semiconductor Manufacturing
Effect Of Fabrication Parameters On The Ferroelectricity Of Hafnium Zirconium Oxide Films: A Statistical Study, Guillermo A. Salcedo, Ahmad E. Islam, Elizabeth Reichley, Michael Dietz, Christine M. Schubert Kabban, Kevin D. Leedy, Tyson C. Back, Weison Wang, Andrew Green, Timothy S. Wolfe, James M. Sattler
Effect Of Fabrication Parameters On The Ferroelectricity Of Hafnium Zirconium Oxide Films: A Statistical Study, Guillermo A. Salcedo, Ahmad E. Islam, Elizabeth Reichley, Michael Dietz, Christine M. Schubert Kabban, Kevin D. Leedy, Tyson C. Back, Weison Wang, Andrew Green, Timothy S. Wolfe, James M. Sattler
Faculty Publications
Ferroelectricity in hafnium zirconium oxide (Hf1−xZrxO2) and the factors that impact it have been a popular research topic since its discovery in 2011. Although the general trends are known, the interactions between fabrication parameters and their effect on the ferroelectricity of Hf1−xZrxO2 require further investigation. In this paper, we present a statistical study and a model that relates Zr concentration (x), film thickness (tf), and annealing temperature (Ta) with the remanent polarization (Pr) in tungsten (W)-capped Hf1−xZrxO2. …
Impact Of Silicon Ion Irradiation On Aluminum Nitride-Transduced Microelectromechanical Resonators, David D. Lynes, Joshua Young, Eric Lang, Hengky Chandrahalim
Impact Of Silicon Ion Irradiation On Aluminum Nitride-Transduced Microelectromechanical Resonators, David D. Lynes, Joshua Young, Eric Lang, Hengky Chandrahalim
Faculty Publications
Microelectromechanical systems (MEMS) resonators use is widespread, from electronic filters and oscillators to physical sensors such as accelerometers and gyroscopes. These devices' ubiquity, small size, and low power consumption make them ideal for use in systems such as CubeSats, micro aerial vehicles, autonomous underwater vehicles, and micro-robots operating in radiation environments. Radiation's interaction with materials manifests as atomic displacement and ionization, resulting in mechanical and electronic property changes, photocurrents, and charge buildup. This study examines silicon (Si) ion irradiation's interaction with piezoelectrically transduced MEMS resonators. Furthermore, the effect of adding a dielectric silicon oxide (SiO2) thin film is …
Method Of Evanescently Coupling Whispering Gallery Mode Optical Resonators Using Liquids, Hengky Chandrahalim, Kyle T. Bodily
Method Of Evanescently Coupling Whispering Gallery Mode Optical Resonators Using Liquids, Hengky Chandrahalim, Kyle T. Bodily
AFIT Patents
The present invention relates to evanescently coupling whispering gallery mode optical resonators having a liquid coupling as well as methods of making and using same. The aforementioned evanescently coupling whispering gallery mode optical resonators having a liquid couplings provide increased tunability and sensing selectivity over current same. The aforementioned. Applicants’ method of making evanescent-wave coupled optical resonators can be achieved while having coupling gap dimensions that can be fabricated using standard photolithography. Thus economic, rapid, and mass production of coupled WGM resonators-based lasers, sensors, and signal processors for a broad range of applications can be realized.
Transition-Metal Ions In Β-Ga2O3 Crystals: Identification Of Ni Acceptors, Timothy D. Gustafson, Nancy C. Giles, Brian C. Holloway, J. Jesenovec, B. L. Dutton, M. D. Mccluskey, Larry E. Halliburton
Transition-Metal Ions In Β-Ga2O3 Crystals: Identification Of Ni Acceptors, Timothy D. Gustafson, Nancy C. Giles, Brian C. Holloway, J. Jesenovec, B. L. Dutton, M. D. Mccluskey, Larry E. Halliburton
Faculty Publications
Excerpt: Transition-metal ions (Ni, Cu, and Zn) in β-Ga2O3 crystals form deep acceptor levels in the lower half of the bandgap. In the present study, we characterize the Ni acceptors in a Czochralski-grown crystal and find that their (0/−) level is approximately 1.40 eV above the maximum of the valence band.
Noncontact Liquid Crystalline Broadband Optoacoustic Sensors, Hengky Chandrahalim, Michael T. Dela Cruz
Noncontact Liquid Crystalline Broadband Optoacoustic Sensors, Hengky Chandrahalim, Michael T. Dela Cruz
AFIT Patents
An optoacoustic sensor includes a liquid crystal (LC) cell formed between top and bottom plates of transparent material. A transverse grating formed across the LC cell that forms an optical transmission bandgap. A CL is aligned to form a spring-like, tunable Bragg grating that is naturally responsive to external agitations providing a spectral transition regime, or edge, in the optical transmission bandgap of the transverse grating that respond to broadband acoustic waves. The optoacoustic sensor includes a narrowband light source that is oriented to transmit light through the top plate, the LC cell, and the bottom plate. The optoacoustic sensor …
Influence Of Materials And Design Parameters On Zinc Oxide Surface Acoustic Devices, Samuel B. Dewhitt
Influence Of Materials And Design Parameters On Zinc Oxide Surface Acoustic Devices, Samuel B. Dewhitt
Theses and Dissertations
This thesis presents research into Zinc Oxide (ZnO) based resonators to include Width Extensional Mode (WEM), Length Extensional Mode (LEM), and Surface Acoustic Wave (SAW) devices. The design and operation of ZnO based SAW devices are investigated further to characterize design parameters and operating modes. Their design, fabrication, and results are discussed in detail. SAW device testing in conjunction with X-Ray Diffractometry (XRD) and Atomic Force Microscopy (AFM) are utilized to characterize ZnO and its deposition parameters on a variety of different substrates and interlayers, with different deposition temperatures and annealing parameters. These substrates include silicon, silicon oxide-on-silicon, and sapphire …
Hinged Temperature-Immune Self-Referencing Fabry–Pérot Cavity Sensors, Jeremiah C. Williams, Hengky Chandrahalim
Hinged Temperature-Immune Self-Referencing Fabry–Pérot Cavity Sensors, Jeremiah C. Williams, Hengky Chandrahalim
AFIT Patents
A passive microscopic Fabry-Pérot Interferometer (FPI) sensor includes a three-dimensional microscopic optical structure formed on a cleaved tip of the optical fighter using a two-photon polymerization process on a photosensitive polymer by a three-dimensional micromachining device. The three-dimensional microscopic optical structure having a hinged optical layer pivotally connected to a distal portion of a suspended structure. A reflective layer is deposited on a mirror surface of the hinged optical layer while in an open position. The hinged optical layer is subsequently positioned in the closed position to align the mirror surface to at least partially reflect a light signal back …
Method Of Making Hinged Self-Referencing Fabry–Pérot Cavity Sensors, Jeremiah C. Williams, Hengky Chandrahalim
Method Of Making Hinged Self-Referencing Fabry–Pérot Cavity Sensors, Jeremiah C. Williams, Hengky Chandrahalim
AFIT Patents
A method is provided for fabricating a passive optical sensor on a tip of an optical fiber. The method includes perpendicularly cleaving a tip of an optical fiber and mounting the tip of the optical fiber in a specimen holder of a photosensitive polymer three-dimensional micromachining machine. The method includes forming a three-dimensional microscopic optical structure within the photosensitive polymer that comprises a two cavity Fabry-Perot Interferometer (FPI) having a hinged optical layer that is pivotally coupled to a suspended structure. The method includes removing an uncured portion of the photosensitive polymer using a solvent. The method includes depositing a …
Temperature-Immune Self-Referencing Fabry–Pérot Cavity Sensors, Hengky Chandrahalim, Jonathan W. Smith
Temperature-Immune Self-Referencing Fabry–Pérot Cavity Sensors, Hengky Chandrahalim, Jonathan W. Smith
AFIT Patents
A passive microscopic Fabry-Pérot Interferometer (FPI) sensor an optical fiber a three-dimensional microscopic optical structure formed on a cleaved tip of an optical fighter that reflects a light signal back through the optical fiber. The reflected light is altered by refractive index changes in the three-dimensional structure that is subject to at least one of: (i) thermal radiation; and (ii) volatile organic compounds.
Method Of Making Temperature-Immune Self-Referencing Fabry–Pérot Cavity Sensors, Hengky Chandrahalim, Jonathan W. Smith
Method Of Making Temperature-Immune Self-Referencing Fabry–Pérot Cavity Sensors, Hengky Chandrahalim, Jonathan W. Smith
AFIT Patents
A method of making passive microscopic Fabry-Pérot Interferometer (FPI) sensor includes forming a three-dimensional microscopic optical structure on a cleaved tip of an optical fiber that reflects a light signal back through the optical fiber. The reflected light is altered by refractive index changes in the three-dimensional structure that is subject to at least one of: (i) thermal radiation; and (ii) volatile organic compounds.
Temperature-Immune Self-Referencing Fabry–Pérot Cavity Sensors, Hengky Chandrahalim, Jonathan W. Smith
Temperature-Immune Self-Referencing Fabry–Pérot Cavity Sensors, Hengky Chandrahalim, Jonathan W. Smith
AFIT Patents
A passive microscopic Fabry-Pérot Interferometer (FPI) sensor an optical fiber a three-dimensional microscopic optical structure formed on a cleaved tip of an optical fighter that reflects a light signal back through the optical fiber. The reflected light is altered by refractive index changes in the three-dimensional structure that is subject to at least one of: (i) thermal radiation; and (ii) volatile organic compounds.
Characterization Of Reactive Ion Etch Chemistries Using Direct Write Lithography, Dylan T. Martin-Abood
Characterization Of Reactive Ion Etch Chemistries Using Direct Write Lithography, Dylan T. Martin-Abood
Theses and Dissertations
The DoD requires a variety of COTS and number of custom microelectronics to provide important functionality to critical military systems. Photolithography and DRIE are two techniques commonly used in the development of deep anisotropic features for the fabrication and modification of microelectronics and MEMS. However, standard photolithography techniques are ineffective for unique substrate geometries and DRIE processes require a chemical passivation step only applicable to Si substrates. This work confirmed the capability of RIE using DWL to perform deep, highly selective, anisotropic etching on elevated, non-circular substrates.
Improvements To Micro-Contact Performance And Reliability, Tod V. Laurvick
Improvements To Micro-Contact Performance And Reliability, Tod V. Laurvick
Theses and Dissertations
Microelectromechanical Systems (MEMS) based devices, and specifically microswitches, continue to offer many advantages over competing technologies. To realize the benefits of micro-switches, improvements must be made to address performance and reliability shortfalls which have long been an issue with this application. To improve the performance of these devices, the micro-contacts used in this technology must be understood to allow for design improvements, and offer a means for testing to validate this technology and determine when such improvements are ready for operational environments. To build devices which are more robust and capable of continued operation after billions of cycles requires that …
Thermal Management Using Mems Bimorph Cantilever Beams, Ronald A. Coutu Jr., Robert S. Lafleur, John P. Walton, Laverne A. Starman
Thermal Management Using Mems Bimorph Cantilever Beams, Ronald A. Coutu Jr., Robert S. Lafleur, John P. Walton, Laverne A. Starman
Faculty Publications
This paper examines a passive cooling technique using microelectromechanical systems (MEMS) for localized thermal management of electronic devices. The prototype was designed using analytic equations, simulated using finite element methods (FEM), and fabricated using the commercial PolyMUMPs™ process. The system consisted of an electronic device simulator (EDS) and MEMS bimorph cantilever beams (MBCB) array with beams lengths of 200, 250, and 300 μm that were tested to characterize deflection and thermal behavior. The specific beam lengths were chosen to actuate in response to heating associated with the EDS (i.e. the longest beams actuated first corresponding to the hottest portion of …
Direct Bandgap Cross-Over Point Of Ge1-YSnY Grown On Si Estimated Through Temperature-Dependent Photoluminescence Studies, Thomas R. Harris, Mee-Yi Ryu, Yung Kee Yeo, Buguo Wang, C. L. Senaratne
Direct Bandgap Cross-Over Point Of Ge1-YSnY Grown On Si Estimated Through Temperature-Dependent Photoluminescence Studies, Thomas R. Harris, Mee-Yi Ryu, Yung Kee Yeo, Buguo Wang, C. L. Senaratne
Faculty Publications
Epitaxial Ge1-ySny (y = 0%–7.5%) alloys grown on either Si or Ge-buffered Si substrates by chemical vapor deposition were studied as a function of Sn content using temperature-dependent photoluminescence (PL). PL emission peaks from both the direct bandgap (Γ-valley) and the indirect bandgap (L-valley) to the valence band (denoted by ED and EID, respectively) were clearly observed at 125 and 175 K for most Ge1-ySny samples studied. At 300 K, however, all of the samples exhibited dominant ED emission with either very weak or no measureable EID emission. At 10 K, …
Characterization For The Development Of The Hybrid Multi-Junction Silicon Germanium Solar Cell, Jimmy J. Lohrman
Characterization For The Development Of The Hybrid Multi-Junction Silicon Germanium Solar Cell, Jimmy J. Lohrman
Theses and Dissertations
Based on the previous development of the hybrid multi-junction silicon (HMJ-Si) solar cell, this work characterized the preceding design for the development of the hybrid multi-junction silicon germanium (HMJ-SiGe) solar cell. Seven focus areas were investigated: diffraction pattern generation, photon propagation, silicon diffusion processing, ohmic contacts, the distributed Bragg reflector (DBR), the Fresnel zone plate (FZP), and the germanium/germanium telluride (Ge/GeTe) pn-junction Diffraction patterns were theoretically examined, and contact grating design characterization for reflectance and transmittance properties was modeled using rigorous coupled wave analysis. An improved silicon diffusion process follower was developed, and theoretical study and experimental assessment were accomplished …
Optically Stimulated Luminescence From Ag-Doped Lithium Tetraborate (Li2b4o7), Ember S. Maniego
Optically Stimulated Luminescence From Ag-Doped Lithium Tetraborate (Li2b4o7), Ember S. Maniego
Theses and Dissertations
Silver-doped lithium tetraborate (Li2B4O7) crystals emit optically stimulated luminescence (OSL) in response to stimulating light around 400 nm. Photoluminescence, optical absorption, and electron paramagnetic resonance (EPR) were used to identify the defects in the crystal that cause this OSL. Lithium tetraborate crystals have Ag+ ions at Li+ sites and at interstitial sites. Upon ionization at room temperature via x rays, electron-hole pairs are generated. The electrons are trapped at Ag+ occupying interstitial sites, while the holes are trapped at Ag+ at lithium sites. The trapped electron centers become Ag0 …
Neutron Radiation Effects On Ge And Gesn Semiconductors, Christopher T. O'Daniel
Neutron Radiation Effects On Ge And Gesn Semiconductors, Christopher T. O'Daniel
Theses and Dissertations
Two different semiconductor materials received neutron radiation for assessment of radiation damage. The two materials are undoped bulk Ge and epitaxial Ge0.991Sn0.009, which is doped heavily with phosphorous. At room temperature, the Ge sample has direct and indirect bandgaps at 0.78 eV and 0.66 eV, respectively. The Ge0.991Sn0.009 sample has direct and indirect bandgaps at 0.72 eV and 0.63 eV, respectively. Two samples of each material were exposed to research reactor neutrons, delivering a 1 MeV equivalent neutron fluence of 2.52 × 1015 n/cm2. In order to assess the radiation …
Subtractive Plasma-Assisted-Etch Process For Developing High Performance Nanocrystalline Zinc-Oxide Thin-Film-Transistors, Thomas M. Donigan
Subtractive Plasma-Assisted-Etch Process For Developing High Performance Nanocrystalline Zinc-Oxide Thin-Film-Transistors, Thomas M. Donigan
Theses and Dissertations
Thin-Film-Transistors (TFTs) employing undoped zinc-oxide (ZnO) thin-films are currently being investigated by the Air Force for microwave switching applications. Since the on-resistance (R(on)) of the device scales with channel length (LC), ZnO TFT optimization should be focused on reducing LC, therefore minimizing the associated insertion losses. In this research, deep sub-micron scaling of ZnO TFTs was undertaken using a subtractive reactive-ion-etch (RIE) process. Under optimum processing conditions, ZnO TFTs with LC as small as 155 nm were successfully demonstrated. The active ZnO channels of the TFTs were patterned by selective SF6-RIE of a tungsten ohmic film through electron-beam defined openings …
Low Clutter Method For Bistatic Rcs Measurements, Peter J. Collins
Low Clutter Method For Bistatic Rcs Measurements, Peter J. Collins
AFIT Patents
A bistatic radar measurement system is provided having a radar source configured to produce a radio frequency signal. A transmitting antenna is configured to transmit the radio frequency signal toward a target. A receiving antenna is configured to receive a reflected radio frequency signal from the target. A support system is configured to support the receiving antenna. The support system includes a plurality of low scattering dielectric strings configured to orient the receiving antenna.
Contact Resistance Evolution And Degradation Of Highly Cycled Micro-Contacts, Christopher L. Stilson
Contact Resistance Evolution And Degradation Of Highly Cycled Micro-Contacts, Christopher L. Stilson
Theses and Dissertations
Reliable microelectromechanical systems (MEMS) switches are critical for developing high performance radio frequency circuits like phase shifters. Engineers have attempted to improve reliability and lifecycle performance using novel contact metals, unique mechanical designs and packaging. Various test fixtures including: MEMS devices, atomic force microscopes (AFM) and nanoindentors have been used to collect resistance and contact force data. AFM and nanoindentor test fixtures allow direct contact force measurements but are severely limited by low resonance sensors, and therefore low data collection rates. This thesis reports the contact resistance evolution results and fabrication of thin film micro-contacts dynamically tested up to 3kHz. …
Using Software-Based Decision Procedures To Control Instruction-Level Execution, William B. Kimball
Using Software-Based Decision Procedures To Control Instruction-Level Execution, William B. Kimball
AFIT Patents
An apparatus, method and program product are provided for securing a computer system. A digital signature of an application is checked, which is loaded into a memory of the computer system configured to contain memory pages. In response to finding a valid digital signature, memory pages containing instructions of the application are set as executable and memory pages other than those containing instructions of the application are set as non-executable. Instructions in executable memory pages are executed. Instructions in non-executable memory pages are prevented from being executed. A page fault is generated in response to an attempt to execute an …
Mems Fabrication Process Base On Su-8 Masking Layers, Scott A. Ostrow, Ronald A. Coutu Jr.
Mems Fabrication Process Base On Su-8 Masking Layers, Scott A. Ostrow, Ronald A. Coutu Jr.
AFIT Patents
A novel fabrication process uses a combination of negative and positive photoresists with positive tone photomasks, resulting in masking layers suitable for bulk micromachining high-aspect ratio microelectromechanical systems (MEMS) devices. This technique allows the use of positive photomasks with negative resists, opening the door to an ability to create complementary mechanical structures without the fabrication delays and costs associated with having to obtain a negative photomask. In addition, whereas an SU-8 mask would normally be left in place after processing, a technique utilizing a positive photoresist as a release layer has been developed so that the SU-8 masking material can …
Novel Test Fixture For Characterizing Microcontacts: Performance And Reliability, Benjamin F. Toler
Novel Test Fixture For Characterizing Microcontacts: Performance And Reliability, Benjamin F. Toler
Theses and Dissertations
Engineers have attempted to improve reliability and lifecycle performance using novel micro-contact metals, unique mechanical designs and packaging. Contact resistance can evolve over the lifetime of the micro-switch by increasing until failure. This work shows the fabrication of micro-contact support structures and test fixture which allow for micro-contact testing, with an emphasis on the fixture's design to allow the determination and analysis of the appropriate failure mode. The other effort of this investigation is the development of a micro-contact test fixture which can measure contact force and resistance directly and perform initial micro-contact characterization, and two forms of lifecycle testing …
Digitally Programmable Rf Mems Filters With Mechanically Coupled Resonators, Hengky Chandrahalim, Sunil Ashok Bhave
Digitally Programmable Rf Mems Filters With Mechanically Coupled Resonators, Hengky Chandrahalim, Sunil Ashok Bhave
AFIT Patents
A digitally-tunable RF MEMS filter includes a substrate and a plurality of mechanically coupled resonators, wherein a first and a last resonator of the plurality of mechanically coupled resonators are configured to be electrostatically transduced. One or more of the plurality of mechanically coupled resonators are configured to be biased relative to the substrate such that the one or more biased resonators may be brought substantially in contact with the substrate. In a method of digitally tuning an RF MEMS filter having a mechanically coupled resonator array, a DC bias voltage is applied to at least a first resonator and …
Shaped Mems Contact, Ronald A. Coutu Jr., Paul E. Kladitis, Robert L. Crane
Shaped Mems Contact, Ronald A. Coutu Jr., Paul E. Kladitis, Robert L. Crane
AFIT Patents
A MEMS switch fabrication process and apparatus inclusive of a bulbous rounded surface movable contact assembly that is integral with the switch movable element and achieving of long contact wear life with low contact electrical resistance. The disclosed process is compatible with semiconductor integrated circuit fabrication materials and procedures and includes an unusual photoresist reflow step in which the bulbous contact shape is quickly defined in three dimensions from more easily achieved integrated circuit mask and etching-defined precursor shapes. A plurality of differing photoresist materials are used in the process. A large part of the contact and contact spring formation …
Optical Metamaterial Design, Fabrication And Test, Jack P. Lombardi
Optical Metamaterial Design, Fabrication And Test, Jack P. Lombardi
Theses and Dissertations
Metamaterials, materials that make use of naturally occurring materials and designed structures to create materials with special properties not found in nature, are a fascinating new area of research, combining the fields of physics, microfabrication, and material science. This work will focus on the development of metamaterials operating in the visible and infrared which will be constructed and tested for basic optical properties. Possible applications for these materials will not be investigated. The this work will go into the fabrication and test of layered metal-dielectric structures, called layered metamaterials, as these structures hold potential for applications in advanced optical systems. …
Electromagnetic Modeling And Measurement Of Adaptive Metamaterial Structural Elements, Matthew E. Jussaume
Electromagnetic Modeling And Measurement Of Adaptive Metamaterial Structural Elements, Matthew E. Jussaume
Theses and Dissertations
This document addresses two major obstacles facing metamaterial development: uncertainty in the characterization of electromagnetic field behavior in metamaterial structures and the relatively small operational bandwidth of metamaterial structures. To address the first obstacle, a method of prediction aided measurement is developed and exploited to examine the field interactions within metamaterial devices. The fusion of simulation and measurement techniques enhances the understanding of the physical interactions of fields in the presence of metamaterials. To address the second obstacle, this document characterizes the effectiveness of an adaptive metamaterial design that incorporates a microelectromechanical systems (MEMS) variable capacitor. Applying voltages to the …
High Power Microwave (Hpm) And Ionizing Radiation Effects On Cmos Devices, Nicholas A. Estep
High Power Microwave (Hpm) And Ionizing Radiation Effects On Cmos Devices, Nicholas A. Estep
Theses and Dissertations
Integrated circuits (ICs) are inherently complicated and made worse by increasing transistor quantity and density. This trend potentially enhances concomitant effects of high energy radiation and local or impressed electromagnetic interference (EMI). The reduced margin for signal error may counter any gain in radiation hardness from smaller device dimensions. Isolated EMI and ionizing radiation studies on circuits have been conducted extensively over the past 30 years. However, little focus has been placed on the combined effects. To investigate the effect of combined EMI and ionizing radiation, two complementary metal oxide semiconductor (CMOS) inverter technologies (CD4069 and SN74AUC1G04) were analyzed for …
Development And Demonstration Of A Field-Deployable Fast Chromotomographic Imager, Daniel C. O'Dell
Development And Demonstration Of A Field-Deployable Fast Chromotomographic Imager, Daniel C. O'Dell
Theses and Dissertations
A field deployable hyperspectral imager utilizing chromotomography (CT), with a direct vision prism (DVP) as the dispersive element, has been constructed at AFIT. This research is focused on the development and demonstration of the CT imager. An overview of hyperspectral imaging, chromotomography, a synopsis of reconstruction algorithms, and other CT instruments are given. The importance of component alignment, instrument calibration, and exact prism angular position data are discussed. A simplistic \shift and add" reconstruction algorithm was utilized for this research. Although limited in its ability to reconstruct a spatially and spectrally diverse scene, the algorithm was adequate for the testing …