Biomedical Engineering and Bioengineering Commons^™

Fabrication, Characterization, And Chemical Sensing Of Silicon Dioxide Microcantilevers, Yanjun Tang

Doctoral Dissertations

The objective of this work is to design and fabricate an advanced silicon dioxide microcantilever sensor and to investigate chemical and biological sensing by microtechnology.

Microcantilever sensor technology has many advantages including fast response time, lower cost of fabrication, the possibility of sensor arrays with small overall dimensions, the ability to explore microenvironments, and improved portability for field applications. For all of these advantages, microcantilever chemical and biological sensors have drawn more and more attention.

So far, all other microcantilevers were designed and fabricated for AFM applications. We developed a novel SiO2 microcantilever especially for chemical and biological sensor applications. …