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Full-Text Articles in Engineering

Design And Fabrication Of Polarization Filter Implementing A Wire Grid Array, Eric Poortinga Jan 2002

Design And Fabrication Of Polarization Filter Implementing A Wire Grid Array, Eric Poortinga

Journal of the Microelectronic Engineering Conference

For decades optical lithography has continually been extended past the conceived limitations of the technology. By optimizing photoresist performance and stepper settings it is possible to image features smaller then the wavelength of light being used to image. This ability allows structures to be designed such that the optical properties of the material change from what would occur at larger scales. One such structure is the wire grid array consisting of parallel metal lines on a quartz substrate. A wire grid array with a period smaller then the wavelength of incident radiation acts as a polarizer. The Incident field perpendicular …


Design, Fabrication, And Testing Of Crystalline Silicon Source/ Drain Finfets, Jesse J. Siman Jan 2002

Design, Fabrication, And Testing Of Crystalline Silicon Source/ Drain Finfets, Jesse J. Siman

Journal of the Microelectronic Engineering Conference

Crystalline silicon source/drain FInFET structures were designed, fabricated, and tested at the RIT Semiconductor & Microsystems Fabrication Laboratory (SMFL). Process development was completed using hand calculations, simulations, and similar processing techniques based upon mature RIT semiconductor manufacturing processes. The design under investigation is a dog-bone structure fabricated on SOT substrates. The crystalline silicon source/drain FinFETs exhibited a field effect behavior for all transistor sizes fabricated, however the smaller 1μm FinFETs were more susceptible to background noise. The smallest device, a 1x2μm FInFET yielded VT=1.53V and a drive current of 510 μA with VG=5V. The largest device, …


Analog Ic Design And Fabrication, James Tom Jan 2002

Analog Ic Design And Fabrication, James Tom

Journal of the Microelectronic Engineering Conference

The purpose of this project was to test the performance of analog integrated circuits and to characterize the MOSFET SPICE parameters. The data that can be obtained from this testing can be helpful for further research in the area of Analog IC design. The Semiconductor & Microsystems Fabrication Laboratory (SMFL) is a constantly evolving facility, with equipment constantly entering and leaving the lab. The process technology used was the RIT Subμ-CMOS Process, a vehicle used to teach students about process integration, semiconductor manufacturing, and the effects of process technology and device operation. Therefore, the Sub-Micron process must adapt to changes …


Design And Fabrication Of A Micromechanical Pressure Sensor, Neal V. Lafferty Jan 2002

Design And Fabrication Of A Micromechanical Pressure Sensor, Neal V. Lafferty

Journal of the Microelectronic Engineering Conference

A Microelectromechanical (MEMS) pressure sensor was designed, fabricated, and tested. Photomasks were designed for the project and built in house at RIT. The masks included designs for three separate device designs: devices to be fabricated with a KOH bulk etch, devices to be fabricated with an Surface Technology Systems (STS) Deep Reactive Ion Etch (DRIE), and a third set of scaled device designs for use with the STS DRIE process. Devices were tested in house, and the ideal design was determined. The most sensitive device, which had a resistor L/W of 10, demonstrated a voltage differential of 39 mV.


Design And Implementation Of A Content Filtering Firewall, Rongbo Du, Rei Safavi-Naini, Willy Susilo Jan 2002

Design And Implementation Of A Content Filtering Firewall, Rongbo Du, Rei Safavi-Naini, Willy Susilo

Faculty of Engineering and Information Sciences - Papers: Part A

A firewall is a system for enforcing access control policy between two networks and is one of the most important measures to protect against network attacks. Firewalls traditionally protect the internal network from outside threats. But there has been increasing need for preventing the misuses of the network by the internal users which most previous firewalls overlook. In this paper, we propose a method of adding content filtering functionality to the firewall and describe its implementation. We also show a new attack that combines JAVA Applet and XML to get around the content filtering firewall, hence showing the need for …


Limitations Of Current Design Procedures For Steel Members In Space Frames, Lip H. Teh Jan 2002

Limitations Of Current Design Procedures For Steel Members In Space Frames, Lip H. Teh

Faculty of Engineering and Information Sciences - Papers: Part A

The use of more advanced methods of analysis to design steel frames may lead to substantial material savings, in addition to simplicity in the design procedures. However, these benefits do not yet appear to be a powerful incentive for many structural engineers to abandon the familiar linear elastic analysis (LEA) based design procedures, even when dealing with steel structures that are not regular rectangular frames. This paper uses a heuristic example to demonstrate the serious limitations of the LEA based design procedures, whether alignment charts or system buckling analysis is used to determine the effective lengths of the compression members. …