Engineering Commons^™

Modeling Multiphase Flow And Substrate Deformation In Nanoimprint Manufacturing Systems, Andrew Cochrane

Nanoscience and Microsystems ETDs

Nanopatterns found in nature demonstrate that macroscopic properties of a surface are tied to its nano-scale structure. Tailoring the nanostructure allows those macroscopic surface properties to be engineered. However, a capability-gap in manufacturing technology inhibits mass-production of nanotechnologies based on simple, nanometer-scale surface patterns. This gap represents an opportunity for research and development of nanoimprint lithography (NIL) processes. NIL is a process for replicating patterns by imprinting a fluid layer with a solid, nano-patterned template, after which ultraviolet cure solidifies the fluid resulting in a nano-patterned surface. Although NIL has been demonstrated to replicate pattern features as small as 4 …