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Single-Walled Carbon Nanotube Device Fabrication Using Spin Coating Of Dispersions, Paul Jeremy Hummel
Single-Walled Carbon Nanotube Device Fabrication Using Spin Coating Of Dispersions, Paul Jeremy Hummel
Doctoral Dissertations
This research looks at ways to utilize already synthesized carbon nanotubes (CNT) to manufacture electrical connections using current tools and fabrication methods employed in the semiconductor industry. Purchased single-walled carbon nanotubes (SWNT) are separated and placed in suspension using poly(sodium styrene sulfonate) (PSS). The PSS non-covalently bonds to the SWNTs, causing them to repel each other due to the negative charge of the PSS. The suspension of SWNTs is spin coated over a processed silicon (Si) wafer with fabricated trenches. A Si wafer with a top silicon dioxide (SiO 2) layer is spin coated with Shipley 1827 photoresist. UV light …