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Design, Fabrication And Characterization Of Micro Opto-Electro-Mechanical Systems, Darren E. Sene
Design, Fabrication And Characterization Of Micro Opto-Electro-Mechanical Systems, Darren E. Sene
Theses and Dissertations
Several micro-opto-electro-mechanical structures were designed using the Multi-User MEMS Process (MUMPS). Specific design techniques were investigated for improving the capabilities of elevating flip up structures. The integration of several flip up microoptical structures into a microoptical system was explored with emphasis on the development of a microinterferometer. The thermal effects on the Modulus of Elasticity were determined by detecting the resonant frequency for a square Flexure Beam Micromirror Device. The resonance of the device was found to match theory to within 0.1 % and the Modulus of Elasticity was found to decrease by 0.041 GPa/K from 290 to 450 K. …
Design And Fabrication Of A Micromechanical Gyroscope, Richard M. Kuhns
Design And Fabrication Of A Micromechanical Gyroscope, Richard M. Kuhns
Theses and Dissertations
Both size and cost of mechanical and optical inertial navigation systems (INS) have prevented their use in many applications. By developing a micromachined gyroscope and combining it with existing micromachined accelerometer designs to form a low sensitivity INS, the cost would be reduced by a factor of 10 or more. The lower per unit cost would open new areas for INS use. A second advantage of the micromachined INS would be its size. A micromachined INS would weigh only a few ounces and take significantly less space, allowing more room for electronics and the weight reduction would lead to longer …
Design, Fabrication, Processing, And Testing Of Micro-Electro-Mechanical Chemical Sensors, Brian S. Freeman
Design, Fabrication, Processing, And Testing Of Micro-Electro-Mechanical Chemical Sensors, Brian S. Freeman
Theses and Dissertations
Chemical microsensors are a new field integrating chemical thin film technology with solid-state fabrication techniques to make devices capable of detecting chemicals in the environment. This thesis evaluated commercially available fabrication processes and numerous sensor designs for working chemical sensors. The commercial processes used were MUMPS for surface micromachined devices and MOSIS for bulk micromachined devices. Overall, eight fabrication runs and 29 different designs were made. Of these designs, two were shown to work effectively. Other designs failed due to fabrication problems and design errors that caused release problems. One design that worked was a surface micromachined chemoresistor with interdigitated …
Effects Of Blowing Ratios On Heat Transfer To The Throat Region Of A Porous-Walled Nozzle, Fu-Jung Chen
Effects Of Blowing Ratios On Heat Transfer To The Throat Region Of A Porous-Walled Nozzle, Fu-Jung Chen
Theses and Dissertations
The effects of transpiration cooling on heat transfer in the throat region of a porous-walled nozzle were investigated. The experiments were performed in the AFIT low speed shock tube fitted with a Mach 2 nozzle. A blowing region was limited to the area from 1.3 cm prior to the throat to 1.2 cm downstream of the throat. The blowing ratios from -0.0002 (suction) to 0.0117 (blowing) of the main stream flow were studied. Heat flux data were taken from both sides of the nozzle. One side was transpiration cooled by secondary air injection through a porous wall, while the other …
Design And Development Of Microswitches For Micro-Electro-Mechanical Relay Matrices, Mark W. Phipps
Design And Development Of Microswitches For Micro-Electro-Mechanical Relay Matrices, Mark W. Phipps
Theses and Dissertations
Many different micro-electro-mechanical switches were designed in the Multi-User MEMS processes (MUMPs) and deep x-ray lithography and electroforming (LIGA) processes. The switches were composed of actuators that operated based upon either electrostatic forces or thermal forces. A thermally activated beam flexure actuator that operated based upon differential heating was used extensively. This actuator, which was fabricated in the MUMPs process, was able to deflect up to 12 microns with a total input power of less than 25 mW. The thermal resistance, which was needed to model this actuator, was determined from a material constant, 1.9 ± 0.08 m1.5-°C-W …