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Phase Behavior Of Block Copolymers In Compressed Co2 And As Single Domain-Layer, Nanolithographic Etch Resists For Sub-10 Nm Pattern Transfer, Curran Matthew Chandler

Open Access Dissertations

Diblock copolymers have many interesting properties, which first and foremost include their ability to self-assemble into various ordered, regularly spaced domains with nanometer-scale feature sizes. The work in this dissertation can be logically divided into two parts - the first and the majority of this work describes the phase behavior of certain block copolymer systems, and the second discusses real applications possible with block copolymer templates. Many compressible fluids have solvent-like properties dependent on fluid pressure and can be used as processing aids similar to liquid solvents. Here, compressed CO₂ was shown to swell several thin homopolymer films, including …