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Full-Text Articles in Engineering
Kinetics Of Laser Chemical Vapor Deposition Of Carbon And Refractory Metals, Feng Gao
Three-dimensional laser chemical vapor deposition (3D-LCVD) has been used to grow rods of carbon, tungsten, titanium, and hafnium from a variety of hydrocarbons and metal halide-based precursors. A novel computerized 3D-LCVD system was designed and successfully used in the experiments. A focused Nd:Yag laser beam (λ = 1.06 μm) was utilized to locally heat up a substrate to deposition temperature. The rods, which grew along the axis of the laser beam, had a typical diameter of 30–80 μm and a length of about 1 mm. The precursors for carbon deposition were the alkynes: propyne, butyne, pentyne, hexyne, and ...
A Hybrid Finite Element-Finite Difference Method For Thermal Analysis In A Double-Layered Thin Film, Teng Zhu
Thin film technology is of vital importance in microtechnology applications. For instance, thin films of metals, of dielectrics such as SiO2, or Si semiconductors are important components of microelectronic devices. The reduction of the device size to the microscale has the advantage of enhancing the switching speed of the device. The reduction, on the other hand, increases the rate of heat generation that leads to a high thermal load on the microdevice. Heat transfer at the microscale with an ultrafast pulsed-laser is also a very important process for thin films. Hence, studying the thermal behavior of thin films or of ...