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2019

MEMS

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Research On Dual-Antenna Gnss-Assisted Mins Navigation Method, Hailu Wang, Su Zhong, Liu Ning, Liu Hong, Guodong Fu Dec 2019

Research On Dual-Antenna Gnss-Assisted Mins Navigation Method, Hailu Wang, Su Zhong, Liu Ning, Liu Hong, Guodong Fu

Journal of System Simulation

Abstract: For the integrated navigation system of the single-antenna GNSS-assisted MEMS strap-down inertial navigation system (MINS), the heading angle divergence is invalid when the vehicle is stationary and linear motion, and the error is large. The method of the dual-antenna GNSS-assisted MINS integrated navigation based on EKF is proposed. The error state model is established, and the extended Kalman filter combined filter (EKF) algorithm is designsed for simulation verification. The driving test is carried out by comparing the high-precision SPAN-CPT. The results show that the yaw angle and pitch angle accuracy are 0.2 RMS, 0.3 RMS, which can be used …


Advanced Techniques For Carbon Nanotube Templated Microfabrication, Jason Matthew Lund Dec 2019

Advanced Techniques For Carbon Nanotube Templated Microfabrication, Jason Matthew Lund

Theses and Dissertations

Carbon nanotube templated microfabrication (CNT-M) is a term describing a grouping of processes where carbon nanotubes (CNTs) serve a structural role in the fabrication of a material or device. In its basic form, CNT-M is comprised of two steps: produce a template made from carbon nanotubes and infiltrate the porous template with an additional material. Vertically aligned carbon nanotube (VACNT) templates can be grown to heights ranging from microns to millimeters and lithographically patterned to a desired form. Deposition of an existing thin film material onto a CNT template will coat all template surfaces and can produce a near solid …


Pairing Electrostatic Levitation With Triboelectric Transduction For High-Performance Self-Powered Mems Sensors And Actuators, Mark Pallay, Alwathiqbellah I. Ibrahim, Ronald N. Miles, Shahrzad Towfighian Sep 2019

Pairing Electrostatic Levitation With Triboelectric Transduction For High-Performance Self-Powered Mems Sensors And Actuators, Mark Pallay, Alwathiqbellah I. Ibrahim, Ronald N. Miles, Shahrzad Towfighian

Mechanical Engineering Faculty Scholarship

We demonstrate that an electrostatic levitation MEMS switch can be operated by applying mechanical pres- sure to a triboelectric generator. The toggling mechanism of the switch draws no current but requires a high actuating voltage, while the generator can supply a high voltage but only produces microwatts of power. The synergistic combination results in an entirely self-powered sensor and switch; the normally-closed MEMS switch can be toggled open by applying a threshold force to the generator without the need for any outside power or supplementary circuitry. A model of the MEMS switch and electrostatic force is validated with experimental data. …


Mems Gradiometers For Attitude Determination On Cubesats, Giovanna Marocco, Richard Middlemiss, Abhinav Prasad, S. Hild, J. Hough, S. Rowan, Giles D. Hammond, Andreas Noak, Douglas J. Paul, Andrew Strain, P. Anderson, Hazel Jeffrey Aug 2019

Mems Gradiometers For Attitude Determination On Cubesats, Giovanna Marocco, Richard Middlemiss, Abhinav Prasad, S. Hild, J. Hough, S. Rowan, Giles D. Hammond, Andreas Noak, Douglas J. Paul, Andrew Strain, P. Anderson, Hazel Jeffrey

Small Satellite Conference

This paper presents the design, fabrication and testing of a new high sensitivity gravity sensor for attitude determination in CubeSats. The project is a collaboration between the Institute for Gravitational Research at the University of Glasgow and ÅAC-Clyde. The gravitational gradiometer takes advantages of the technology of microelectromechanical systems (MEMS) and determines the attitude of the satellite by a differential gravity measurement, the principle at the base of gravitational gradiometry. The capacitive readout allows to measure the rotation of the MEMS gradiometer and consequently evaluate the angle changes of the CubeSat. The developed geometry consists of two symmetrical masses connected …


Evaluation Of Pixel-Scale Tunable Fabry-Perot Filters For Optical Imaging, Daniel L. Edwards Aug 2019

Evaluation Of Pixel-Scale Tunable Fabry-Perot Filters For Optical Imaging, Daniel L. Edwards

Theses

The Fabry-Perot interferometer (FPI) is a well-developed and widely used tool to control and measure wavelengths of light. In optical imaging applications, there is often a need for systems with compact, integrated, and widely tunable spectral filtering capabilities. We evaluate the performance of a novel tunable MEMS (Micro-Electro-Mechanical System) Fabry-Perot (FP) filter device intended to be monolithically integrated over each pixel of a focal plane array. This array of individually tunable FPIs have been designed to operate across the visible light spec-trum from 400-750 nm. This design can give rise to a new line of compact spectrometers with fewer moving …


Solarpede: An Untethered Micro Robot Powered By Light., Jordan Fredrick Klotz Aug 2019

Solarpede: An Untethered Micro Robot Powered By Light., Jordan Fredrick Klotz

Electronic Theses and Dissertations

Micro-Robotics looks to implement robotics principles at a small scale and has gained popularity in recent decades as a gateway to new research areas such as micro-factory applications. The SolarPede is a second-generation, cm-scale micro-crawler designed for such micro factory applications which is equipped with a legged locomotion system and an electronic backpack. The SolarPede is an evolution of its predecessors and features power and signal conditioning capabilities, gait pattern generation, and Bluetooth connectivity. The components which make up SolarPede have been full validated and tested, and its systems have been realized in the form of a body made from …


Multiple Imu Sensor Fusion For Suas Navigation And Photogrammetry, Matthew Givens Aug 2019

Multiple Imu Sensor Fusion For Suas Navigation And Photogrammetry, Matthew Givens

All Graduate Theses and Dissertations, Spring 1920 to Summer 2023

Inertial measurement units (IMUs) are devices that sense accelerations and angular rates in 3D so that vehicles and other devices can estimate their orientations, positions, and velocities. While traditionally large, heavy, and costly, using mechanical gyroscopes and stabilized platforms, the recent development of micro-electromechanical sensor (MEMS) IMUs that are small, light, and inexpensive has led to their adoption in many everyday systems such as cell phones, video game controllers, and commercial drones. MEMS IMUs, despite their advantages, have major drawbacks when it comes to accuracy and reliability. The idea of using more than one of these sensors in an array, …


Functionalizing Semiconductor-Crystalline Oxide Heterostructures For Future Application In Energy Harvesting, Sensing, And Computing Technologies, Zheng Hui Lim Aug 2019

Functionalizing Semiconductor-Crystalline Oxide Heterostructures For Future Application In Energy Harvesting, Sensing, And Computing Technologies, Zheng Hui Lim

Physics Dissertations

Energy harvesting, sensing, and computing technologies utilizing conventional semiconductors have seen a plateau in their advancement for future applications. In order to address these issues, alternate materials are needed to improve present technologies. In my research, I proposed here that complex oxides can serve as potential candidate materials due to their properties. Single crystalline SrZrO3 thin film can be a potential candidate as dielectric material for Ge-based metal-oxide-semiconductor technologies. I present here a structural and electrical characterization of SrZrO3 thin film grown epitaxially on Ge (001) substrate with oxide molecular beam epitaxy. X-ray photoemission spectroscopy has shown that SrZrO3 thin …


Low-Cost, Water Pressure Sensing And Leakage Detection Using Micromachined Membranes, Farhana Anwar Jul 2019

Low-Cost, Water Pressure Sensing And Leakage Detection Using Micromachined Membranes, Farhana Anwar

Master's Theses (2009 -)

This work presents the only known SOI membrane approach, using Microelectromechanical systems (MEMS) fabrication techniques, to address viable water leakage sensing requirements at low cost. In this research, membrane thickness and diameter are used in concert to target specific stiffness values that will result in targeted operational pressure ranges of approximately 0-120 psi. A MEMS membrane device constructed using silicon-on-insulator (SOI) wafers, has been tested and packaged for the water environment. MEMS membrane arrays will be used to determine operational pressure range by bursting.Two applications of these SOI membranes in aqueous environment are investigated in this research. The first …


Secondary Resonances Of Electrostatically Actuated Mems Cantilevers, Christopher I. Reyes May 2019

Secondary Resonances Of Electrostatically Actuated Mems Cantilevers, Christopher I. Reyes

Theses and Dissertations

In this work the behavior of micro-electromechanical (MEMS) cantilever resonators is investigated. The cantilever resonators are electrostatically actuated with hard AC voltage resulting in nine distinct resonances cases including super and subharmonic resonances. The amplitude frequency and amplitude voltage bifurcation diagrams are obtained for each of the nine resonance cases. Reduced order models (ROMs) are developed to include one and two modes of vibration. Three different methods are used to solve the ROMs namely 1) the method of multiple scales (MMS), which is a perturbation method used for one mode of vibration, 2) the homotopy analysis method (HAM), which is …


Liquid Flowmeter Using Thermal Measurement; Design And Application, Woojae Chung Apr 2019

Liquid Flowmeter Using Thermal Measurement; Design And Application, Woojae Chung

Master's Theses (2009 -)

This thesis presents flowmeter devices which can measure flowrate, pressure and temperature offlowing liquid samples using thermal measurement method. Typical thermal mass flowmeter usesthermal properties of materials to obtain flow features only for gases. We designed and fabricatedflowmeter devices with various functionalities such as: measuring properties of flowing liquid andidentifying the type of liquid samples.Thermal measurement methods using temperature sensor is a key of our flowmeter’s workingprinciple. The thermal mass flowmeter consists of a glass capillary, a tungsten wire heater, and aresistance temperature detector (RTD) sensor. The heater and sensors are integrated on …


Development Of A Counter-Flow Thermal Gradient Microfluidic Device, Shayan Davani Feb 2019

Development Of A Counter-Flow Thermal Gradient Microfluidic Device, Shayan Davani

Doctoral Dissertations

This work presents a novel counter-flow design for thermal stabilization of microfluidic thermal reactors. In these reactors, precise control of temperature of the liquid sample is achieved by moving the liquid sample through the thermal zones established ideally through the conduction in the solid material of the device. The goal here is to establish a linear thermal distribution when there is no flow and to minimize the temperature change at flow condition. External convection as well as internal flowinduced effects influence the prescribed thermal distribution. The counter-flow thermal gradient device developed in this study is capable of both stabilizing the …


Bouncing Dynamics Of A Class Of Mem/Nem Switching Systems, Mohamed Bognash Jan 2019

Bouncing Dynamics Of A Class Of Mem/Nem Switching Systems, Mohamed Bognash

Electronic Thesis and Dissertation Repository

The aim of the present research is to understand the bouncing dynamic behavior of NEM/MEM switches in order to improve the switch performance and reliability. It is well known that the bouncing can dramatically degrade the switch performance and life; hence, in the present study, bouncing dynamics of a cantilever-based NME/MEM switch has been studied in detail. To this end, a model of a MEM switch that incorporates electrostatic force, squeeze film air damping force as well as asperity-based contact force has been proposed for an electrostatically actuated switch. An actuation force due to piezoelectric effects is further included in …


A Tunable Electrostatic Mems Pressure Switch, Mark Pallay, Ronald N. Miles, Shahrzad Towfighian Jan 2019

A Tunable Electrostatic Mems Pressure Switch, Mark Pallay, Ronald N. Miles, Shahrzad Towfighian

Mechanical Engineering Faculty Scholarship

We demonstrate a tunable air pressure switch. The switch detects when the ambient pressure drops below a threshold value and automatically triggers without the need for any computational overhead to read the pressure or trigger the switch. The switch exploits the significant fluid interaction of a MEMS beam undergoing a large oscillation from electrostatic levitation to detect changes in ambient pressure. If the oscillation amplitude near the resonant frequency is above a threshold level, dynamic pullin is triggered and the switch is closed. The pressure at which the switch closes can be tuned by adjusting the voltage applied to the …


Development Of A Sensing System For Underground Optic Fiber Cable Conduit Mapping, Sherif Bakr Jan 2019

Development Of A Sensing System For Underground Optic Fiber Cable Conduit Mapping, Sherif Bakr

All Graduate Theses, Dissertations, and Other Capstone Projects

The motivation of this research is to obtain an accurate three-dimensional (3D) layout of an underground conduit, which may be beneficial to optic fiber cable installers and engineers. A newly designed algorithm for 3D position tracking with the help of an inertial sensor and an encoder has been developed. Two types of representations (Euler angle and Quaternion) for orientation and rotation are also introduced, followed by several data pre-processing procedures. A sensing fusion method is utilized to overcome the accumulated errors introduced by the sensor drifting. Considering the application of 3D underground duct mapping in this research, a sensing system …


Conductivity Modulation In Strained 2d Transition- Metal- Dichalcogenides Via Micro- Electro- Mechanical Actuation, Aldo Ivan Vidaña Jan 2019

Conductivity Modulation In Strained 2d Transition- Metal- Dichalcogenides Via Micro- Electro- Mechanical Actuation, Aldo Ivan Vidaña

Open Access Theses & Dissertations

In this thesis, strain-induced conductivity modulation in bi-layer molybdenum disulfide (MoS2) flakes is experimentally investigated and modeled. Uniaxial tensile strain in the MoS2 flakes is achieved using a micro-electro-mechanical (MEM) actuator. Conductivity ratios up to 400 are demonstrated. Theoretical predictions of conductivity versus applied voltage in the MEMS-MoS2 device match experimental data reasonably well using only the effective width of the TMDC flakes as the sole fitting parameter. The amount of strain induced in the MoS2 flakes was determined to be as high as 2.7% for one flake using the model fitted to the experiment data. The switching energy required …


A Miniaturized Chemical Vapor Detector Using Mems Flexible Platform, Haleh Nazemi Jan 2019

A Miniaturized Chemical Vapor Detector Using Mems Flexible Platform, Haleh Nazemi

Electronic Theses and Dissertations

According to the Canadian Cancer Society, lung cancer is the one of the leading causes of cancer death. It has been shown that cancer survival chance depends on factors including the availability of early detection and diagnostic tools such as miniaturized and sensitive gas sensor. This can detect the released volatiles in addition to be implementable in portable electronics, which decisively improves the patient’s survival rate. Therefore, in this thesis and in an effort to develop high-sensitive and miniaturized gas sensor, a microelectromechanical systems (MEMS) platform is utilized. In this work, a sensitive gas sensor is proposed by employing capacitive …