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The Piezoresistive Effect In Microflexures, Gary K. Johns
The Piezoresistive Effect In Microflexures, Gary K. Johns
Theses and Dissertations
The objective of this research is to present a new model for predicting the piezoresistive effect in microflexures experiencing bending stresses. A linear model describing piezoresistivity exists for members in pure tension and compression. Extensions of this model to more complex loading conditions do not match experimental results. An accurate model of piezoresistivity in complex loading conditions would expand the design possibilities of piezoresistive devices. A new model to predict piezoresistive effects in tension, compression, and more complex loading conditions is proposed. The focus of this research is to verify a unidirectional form of this proposed model for microflexures in …
Design Of Piezoresistive Mems Force And Displacement Sensors, Tyler Lane Waterfall
Design Of Piezoresistive Mems Force And Displacement Sensors, Tyler Lane Waterfall
Theses and Dissertations
MEMS (MicroElectroMechanical Systems) sensors are used in acceleration, flow, pressure and force sensing applications on the micro and macro levels. Much research has focused on improving sensor precision, range, reliability, and ease of manufacture and operation. One exciting possibility for improving the capability of micro sensors lies in exploiting the piezoresistive properties of silicon, the material of choice in many MEMS fabrication processes. Piezoresistivity—the change of electrical resistance due to an applied strain—is a valuable material property of silicon due to its potential for high signal output and on-chip and feedback-control possibilities. However, successful design of piezoresistive micro sensors requires …
Piezoresistive Feedback For Decreased Response Time Of Mems Thermal Actuators, Robert K. Messenger, Timothy W. Mclain, Larry L. Howell
Piezoresistive Feedback For Decreased Response Time Of Mems Thermal Actuators, Robert K. Messenger, Timothy W. Mclain, Larry L. Howell
Faculty Publications
Feedback control is commonly used in positioning systems to improve dynamic response, disturbance rejection, accuracy, and repeatability. Similar benefits can be expected for microelectromechanical systems (MEMS) that are used for positioning applications. Sensing at the micro level poses significant challenges. Most of these challenges are associated with the small size of the devices and the small motions and forces which are of interest. In many situations, applying the macro system paradigm, where the sensor is a component that is added to the system, leads to unacceptable results. At the macro level, sensors are typically small relative to the systems they …
Techniques In The Design Of Thermomechanical Microactuators, Larry L. Howell, Timothy W. Mclain, Michael S. Baker, Christian D. Lott
Techniques In The Design Of Thermomechanical Microactuators, Larry L. Howell, Timothy W. Mclain, Michael S. Baker, Christian D. Lott
Faculty Publications
The purpose of this chapter is to provide fundamental background for the design of thermomechanical microactuators. Actuation has been a particularly challenging aspect of microsystem development. Many actuation approaches used at the macro level, such as hydraulics, pneumatics, electric motors, internal combustion engines and turbines, are either too difficult to fabricate at the micro level or do not work well at that scale. Electrostatic attraction is one approach that has been widely used for actuation of microsystems; however, electrostatic actuators tend to have high voltage requirements and low output force capabilities. While electrostatic actuation is suitable for many applications, some …