Open Access. Powered by Scholars. Published by Universities.®
Articles 1 - 1 of 1
Full-Text Articles in Entire DC Network
Evaluation Of Su8 And Ruthenium Oxide Materials For Microfluidic Devices, Margaret Theresa Audrain
Evaluation Of Su8 And Ruthenium Oxide Materials For Microfluidic Devices, Margaret Theresa Audrain
Masters Theses
"This thesis investigates two materials, SU8 photoresist and RuO₂, for possible incorporation into a self-calibrating microfluidic biosensor. The negative, epoxy based photoresist SU8 has been widely used in the fabrication of micro-electro-mechanical systems (MEMS) devices. This is due to its many desirable features that make it a suitable material for a wide variety of MEMS applications. The effects cross-linking (exposure dose) and bonding time have on bond strength and plasma modification of the SU8 surface were investigated as well as the bond strength of etched SU8. It was shown that adhesive bonding was an effective method of bonding, with bond …