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Vuv Spectroscopy Of Rf Plasma Sources., Jan. Li

Electronic Theses and Dissertations

In this experiment we observe the spectra from RF discharges through SF$\sb6,$ CF$\sb4$ and CH$\sb4$ and some mixtures of these and helium over the wavelength range of 115-315 nm. In the spectra of SF$\sb6,$ strong sulphur atomic lines were observed to cover the wavelength range of 120-195 nm. Fluorine features should be even stronger, but no fluorine lines were observed because their wavelengths are shorter than 100 nm and are cut off by the MgF$\sb2$ window on the detector. The intensity-pressure variations of SI lines have been established in chapter 4 as well as the relative intensity ratios for lines …