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High Performance 3-Folded Symmetric Decoupled Mems Gyroscopes, Hani Hisham Tawfik
High Performance 3-Folded Symmetric Decoupled Mems Gyroscopes, Hani Hisham Tawfik
Theses and Dissertations
This thesis reports, for the first time, on a novel design and architecture for realizing inertial grade gyroscope based on Micro-Electro-Mechanical Systems (MEMS) technology. The proposed device is suitable for high-precision Inertial Navigation Systems (INS). The new design has been investigated analytically and numerically by means of Finite Element Modeling (FEM) of the shapes, resonance frequencies and decoupling of the natural drive and sense modes of the various implementations. Also, famous phenomena known as spring softening and spring hardening are studied. Their effect on the gyroscope operation is modeled numerically in Matlab/Simulink platform. This latter model is used to predict …