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A Novel Normal-To-Plane Space Efficient Micro Corner Cube Retroreflector With Improved Fill Factor, Rahul Agarwal

USF Tampa Graduate Theses and Dissertations

A Corner Cube Retro-reflector (CCR) is a device that can be used as transmitters in wireless free space optical communication systems, or remote sensing instruments. A novel approach to fabricate the CCR is developed, where almost 100% of the planar chip area acts as the CCR compared to the maximum of 33% in the prior MEMS CCRs. Unlike the conventional micro machined CCRs that have two planes (mirrors of the CCR) normal to the surface of the wafer, our approach yields all the mirrors within the bulk of the wafer, ensuring very high packing densities and wide acceptance angles. The …

Analysis And Design Of Surface Micromachined Micromanipulators For Out-Of-Plane Micropositioning, Kimberly A. Jensen

Theses and Dissertations

This thesis introduces two ortho-planar MEMS devices that can be used to position microcomponents: the XZ Micropositioning Mechanism and the XYZ Micromanipulator. The displacement and force relationships are presented. The devices were fabricated using surface micromachining processes and the resulting mechanisms were tested. A compliant XYZ Micromanipulator was also designed to reduce backlash and binding. In addition, several other MEMS positioners were fabricated and tested: the Micropositioning Platform Mechanism (MPM), the Ortho-planar Twisting Micromechanism (OTM), and the Ortho-planar Spring Micromechanism (OSM).

Identification Of Macro- And Micro-Compliant Mechanism Configurations Resulting In Bistable Behavior, Brian D. Jensen

Theses and Dissertations

The purpose of this research is to identify the configurations of several mechanism classes which result in bistable behavior. Bistable mechanisms have use in many applications, such as switches, clasps, closures, hinges, and so on. A powerful method for the design of such mechanisms would allow the realization of working designs much more easily than has been possible in the past. A method for the design of bistable mechanisms is especially needed for micro-electro-mechanical systems (MEMS) because fabrication and material constraints often prevent the use of simple, well-known bistable mechanism configurations. In addition, this knowledge allows designers to take advantage …

A Self-Retracting Fully-Compliant Bistable Micromechanism, Nathan D. Masters

Theses and Dissertations

The purpose of this research is to present a class of Self-Retracting Fully-compliant Bistable Micromechanisms (SRFBM). Fully-compliant mechanisms are needed to overcome the inherent limitations of microfabricated pin joints, especially in bistable mechanisms. The elimination of the clearances associated with pin joints will allow more efficient bistable mechanisms with smaller travel. Small travel, in a linear path facilitates integration with efficient on-chip actuators. Tensural pivots are developed and used to deal with the compressive loading to which the mechanism is subject. SRFBM are modeled using the Pseudo-Rigid-Body Model and finite element analysis. Suitable configurations of the SRFBM concept have been …

Development Of In-Plane Compliant Bistable Microrelays, Troy Alan Gomm

Theses and Dissertations

Bistable microrelays have many possible applications and have the potential to reduce the size, weight, power consumption, and cost of products in which they are used. This research outlines the current state of microrelays, presents three new compliant bistable micromechanisms, and characterizes their performance as microrelays. The characterization includes a treatment of a new force-tester, a preliminary contact resistance study, contact-force measurements, switching time measurements, insertion loss, AC isolation, breakdown voltage, and DC isolation. This document also includes recommendations for further research.

The Pseudo-Rigid-Body Model For Dynamic Predictions Of Macro And Micro Compliant Mechanisms, Scott Marvin Lyon

Theses and Dissertations

This work discusses the dynamic predictions of compliant mechanisms using the Pseudo-Rigid-Body model (PRBM). In order to improve the number of mechanisms that can be modeled, this research develops and identifies several key concepts in the behavior of beam segments where both ends are fixed to a rigid body (fixed-fixed flexible segments). A model is presented, and several examples are discussed. The dynamic behavior of several compliant segments is predicted using the PRBM and the results are compared to finite element analysis and experimental results. Details are presented as to the transient behavior of a typical uniform rectangular cross section …

A Lateral Comb Drive On Pmma By Hot Embossing Technique, Yongjun Zhao

Doctoral Dissertations

The objective of this work is to fabricate a laterally driven comb drive on low-cost poly-methyl-meth-acrylate (PMMA) by hot embossing technology.

An electrostatic comb drive is one of the most important components in Micro-Electro-Mechanical Systems (MEMS). A comb drive can work as both a sensor and an actuator. Varieties of comb drives have been developed on silicon and poly-silicon materials.

Hot embossing of polymers is a promising alternative to traditional silicon processes due to cost-reduction. It fulfills the demand for low-cost methods for high volume production of micro-components and micro-systems. The raw materials of polymer are relatively inexpensive. For the …

Vertical Polymer Tunneling Sensor Platform By Hot Embossing Technique, Jing Wang

Doctoral Dissertations

Recent development in microfabrication technology has brought much attention to the development of miniaturized, inexpensive and high-accuracy MEMS devices and microsystems. The ultimate goal of our project is to develop a versatile, three-dimensional, high precision sensor platform, which can be used for displacement, velocity or acceleration measurement. The first step, on which this dissertation is based, is to fabricate a one-dimensional (parallel with the Z axis) tunneling sensor, which in turn can be developed into two- and three-dimensional sensor platforms through structural and functional integration.

Since the invention of mini-structured high-sensitivity silicon-based tunneling sensor in 1993, the synthesis and fabrication …

On-Chip Actuation Of Compliant Bistable Micro-Mechanisms, Michael S. Baker

Theses and Dissertations

Two compliant bistable micro-mechanisms have been developed which can be switched in either direction using on-chip thermal actuation. The energy storage and bistable behavior of the mechanisms are achieved through the elastic deflection of compliant segments. The pseudo-rigid-body model was used for the compliant mechanism design, and for analysis of the large-deflection flexible segments. To achieve on-chip actuation, the mechanism designs were optimized to reduce their required rotation, allow them to be switched using linear-motion thermal actuators. The modeling theory and analysis are presented for several design iterations. Each iteration was successfully fabricated and tested using either the MUMPs or …

Thermal Microactuators For Microelectromechanical Systems (Mems), Rebecca Cragun

Theses and Dissertations

Microactuators are needed to convert energy into mechanical work at the microscale. Thermal microactuators can be used to produce this needed mechanical work. The purpose of this research was to design, fabricate, and test thermal microactuators for use at the microscale in microelectromechanical systems (MEMS). The microactuators developed were tested to determine the magnitude of their deflection and estimate their force. Five groups of thermal microactuators were designed and tested. All of the groups used the geometrically constrained expansion of various segments to produce their deflection. The first group, Thermal Expansion Devices (TEDs), produced a rotational displacement and had deflections …

Manufacturing And Analysis Of A Liga Heat Exchanger For The Surface Of A Tube: A Cooling Simulation Of The Leading Edge Region Of A Turbine Blade, Christophe Marques

LSU Doctoral Dissertations

Fabricating nickel micro heat exchangers directly on planar or non-planar metal surfaces has been demonstrated using the LIGA micromachining process. These heat exchangers can effectively control the temperature of surfaces in high heat flux applications. Of particular interest is the temperature control of gas turbine engine components. The locations in the gas turbine engine where improved, efficient cooling is required includes gas turbine blades, stator vanes, the turbine disk, and the combustor liner. In this dissertation, the primary application of interest is the use of such heat exchangers to cool airfoils such as turbine blades. In the first part of …

The Rapid Template Fabrication Process For Producing A Liga Heat Exchanger Bonded To A Mechanical Seal, Jason Patrick Tuma

LSU Master's Theses

Mechanical seals are widely used in the chemical processing, aerospace, and automotive, industries. When a mechanical seal fails, considerable cost is typically involved in replacing the seal. Most seal failures are a result of high temperatures generated by frictional heating. Effectively removing the heat generated would significantly increase the mechanical seal’s work life and lead to significant monetary savings. One method of removing the heat generated is bonding an effective LIGA micro heat exchanger to the mechanical seal and forcing coolant through the heat exchanger. Previous work on this subject revealed promising results, especially for micro heat exchangers with microstructures …

Electrodeposition Of Nickel-Copper Alloys And Nickel-Copper-Alumina Nanocomposites Into Deep Recesses For Mems, Amrit Panda

LSU Doctoral Dissertations

Electrodeposition is an important component in the fabrication of micro electro mechanical systems (MEMS). Nickel is the most commonly used material to produce three dimensional microstructures and few material alternatives have been demonstrated. In this dissertation, electrodeposited Ni-Cu alloys and nanocomposites are investigated as possible replacements for nickel in microsystems. Ni-Cu alloys are attractive for their corrosion resistance, magnetic and thermophysical properties. Alumina nanoparticulates included into metal matrices improve hardness and tribology of deposits. The Ni-Cu alloys and Ni-Cu-g-Al2O3 nanocomposites were electrodeposited from a citrate electrolyte, both at low and high pH. Electrodeposition experiments were performed in recessed microelectrodes 500 …