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Electrodeposited Metal Matrix Nanocomposites As Thin Films And High Aspect Ratio Microstructures For Mems, Alonso Lozano Morales
Electrodeposited Metal Matrix Nanocomposites As Thin Films And High Aspect Ratio Microstructures For Mems, Alonso Lozano Morales
LSU Doctoral Dissertations
The electrodeposition of metal-matrix nanocomposites as thin film and high aspect ratio microstructures (HARM’s) for MicroElectroMechanical Systems (MEMS) components is examined. The effect of -Al2O3 nanopowder on copper reduction from acidic and basic electrolytes is examined with rotating disk electrodes (RDE’s). At pH 0.2, regions of copper inhibition and enhancement are identified in the kinetic regime. Low particle loading (12.5 g/L) results in an inhibited copper rate, while, high particle concentration (60 g/L) does both, inhibits the rate at low overpotentials and accelerates it at higher overpotentials, depending on the electrode rotation rate. At pH 8 the presence of particles …
Ultra-Violet Lithography Of Thick Photoresist For The Applications In Biomems And Micro Optics, Ren Yang
Ultra-Violet Lithography Of Thick Photoresist For The Applications In Biomems And Micro Optics, Ren Yang
LSU Doctoral Dissertations
UV lithography of thick photoresist is widely used in microelectromechanical systems (MEMS) and micro-optoelectromechanical systems (MOEMS). SU-8 is a typical negative tone thick photoresist for micro systems, and can be used for both structural material and pattern transfer. This dissertation presents an effort to comprehensively study these important subjects. The first part, and the most fundamental part of this dissertation concentrated on the numerical analysis and experimental study of the wavelength dependent absorbance of SU-8 and the diffraction effects on the sidewall profiles of the microstructures made using UV lithography of SU-8. This study has laid the foundation for all …