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The Piezoresistive Effect In Microflexures, Gary K. Johns Dec 2006

The Piezoresistive Effect In Microflexures, Gary K. Johns

Theses and Dissertations

The objective of this research is to present a new model for predicting the piezoresistive effect in microflexures experiencing bending stresses. A linear model describing piezoresistivity exists for members in pure tension and compression. Extensions of this model to more complex loading conditions do not match experimental results. An accurate model of piezoresistivity in complex loading conditions would expand the design possibilities of piezoresistive devices. A new model to predict piezoresistive effects in tension, compression, and more complex loading conditions is proposed. The focus of this research is to verify a unidirectional form of this proposed model for microflexures in ...


Design Of Piezoresistive Mems Force And Displacement Sensors, Tyler Lane Waterfall Sep 2006

Design Of Piezoresistive Mems Force And Displacement Sensors, Tyler Lane Waterfall

Theses and Dissertations

MEMS (MicroElectroMechanical Systems) sensors are used in acceleration, flow, pressure and force sensing applications on the micro and macro levels. Much research has focused on improving sensor precision, range, reliability, and ease of manufacture and operation. One exciting possibility for improving the capability of micro sensors lies in exploiting the piezoresistive properties of silicon, the material of choice in many MEMS fabrication processes. Piezoresistivity—the change of electrical resistance due to an applied strain—is a valuable material property of silicon due to its potential for high signal output and on-chip and feedback-control possibilities. However, successful design of piezoresistive micro ...


Kinematics Of Curved Flexible Beam, Saurabh Jagirdar Jun 2006

Kinematics Of Curved Flexible Beam, Saurabh Jagirdar

Graduate Theses and Dissertations

Compliant mechanism theory permits a procedure called rigidbody replacement, in which two or more rigid links of the mechanism are replaced by a compliant flexure with equivalent motion. Methods for designing flexure with equivalent motion to replace rigid links are detailed in Pseudo-Rigid-Body Models (PRBMs). Such models have previously been developed for planar mechanisms. This thesis develops the first PRBM for spherical mechanisms. In formulating this PRBM for a spherical mechanism, we begin by applying displacements are applied to a curved beam that cause it todeflect in a manner consistent with spherical kinematics. The motion of the beam is calculated ...


Piezoresistive Feedback For Decreased Response Time Of Mems Thermal Actuators, Robert K. Messenger, Timothy W. Mclain, Larry L. Howell Mar 2006

Piezoresistive Feedback For Decreased Response Time Of Mems Thermal Actuators, Robert K. Messenger, Timothy W. Mclain, Larry L. Howell

Faculty Publications

Feedback control is commonly used in positioning systems to improve dynamic response, disturbance rejection, accuracy, and repeatability. Similar benefits can be expected for microelectromechanical systems (MEMS) that are used for positioning applications. Sensing at the micro level poses significant challenges. Most of these challenges are associated with the small size of the devices and the small motions and forces which are of interest. In many situations, applying the macro system paradigm, where the sensor is a component that is added to the system, leads to unacceptable results. At the macro level, sensors are typically small relative to the systems they ...


Analysis Of Effective Mechanical Properties Of Thin Films Used In Microelectromechanical Systems, Ajay Pasupuleti Jan 2006

Analysis Of Effective Mechanical Properties Of Thin Films Used In Microelectromechanical Systems, Ajay Pasupuleti

Theses

This research aims at analyzing the effective mechanical properties of thin film materials that are used in MEMS. Using the effective mechanical properties, reliable simulations of new or slightly altered designs can be performed successfully. The main reason for investigating effective material properties of MEMS devices is that the existing techniques can not provide consistent prediction of the mechanical properties without time-consuming and costly physical prototyping if the device or the fabrication recipe is slightly altered. To achieve this goal, two approaches were investigated: soft computing and analytical. In the soft computing approach, the effective material properties are empirically modeled ...


Femtosecond Laser Ablation With Single And Two-Photon Excitation For Mems, Mohamed Abdelfattah Kottb Ahmad Elbandrawy Jan 2006

Femtosecond Laser Ablation With Single And Two-Photon Excitation For Mems, Mohamed Abdelfattah Kottb Ahmad Elbandrawy

Electrical & Computer Engineering Theses & Disssertations

There is an increasing interest in femtosecond laser micromachining of materials because of the femtosecond laser's unique high peak power, ultrashort pulse width, negligible heat conductivity process during the laser pulse, and the minimal heat affected zone, which is in the same order of magnitude of the ablated submicron spot. There are some obstacles in reaching optimal and reliable micromachining parameters. One of these obstacles is the lack of understanding of the nature of the interaction and related physical processes. These processes include amorphization, melting, re-crystallization, nucleated-vaporization, and ablation.

The focus of this Dissertation was to study the laser-matter ...


Novel Conceptual Design And Anlysis Of Polymer Derived Ceramic Mems Sensors For Gas Turbine Environment, Narasimha Nagaiah Jan 2006

Novel Conceptual Design And Anlysis Of Polymer Derived Ceramic Mems Sensors For Gas Turbine Environment, Narasimha Nagaiah

Electronic Theses and Dissertations

Technical challenges for developing micro sensors for Ultra High Temperature and turbine applications lie in that the sensors have to survive extremely harsh working conditions that exist when converting fuel to energy. These conditions include high temperatures (500-1500°C), elevated pressures (200-400 psi), pressure oscillations, corrosive environments (oxidizing conditions, gaseous alkali, and water vapors), surface coating or fouling, and high particulate loading. Several technologies are currently underdeveloped for measuring these parameters in turbine engines. One of them is an optical-based non-contact technology. However, these nondirective measuring technologies lack the necessary accuracy, at least at present state. An alternative way to ...


A Mems Sonoluminescent Ultrasonic Sensor., Andrew Tam Jan 2006

A Mems Sonoluminescent Ultrasonic Sensor., Andrew Tam

Electronic Theses and Dissertations

No abstract provided.


A Generalized Approach For The Control Of Micro-Electromechanical Relays, Mohamed Abdelrahman Younis Jan 2006

A Generalized Approach For The Control Of Micro-Electromechanical Relays, Mohamed Abdelrahman Younis

LSU Master's Theses

MEMS (Micro-Electromechanical Systems) is an area of research and applications that is becoming increasingly popular. It's mainly concerned with integrating micro-mechanical transducers with micro-electronic circuits on common substrates, traditionally silicon, through micro-fabrication. Instead of traditionally having the transducer and the communicating (or control) circuit as two separate entities, MEMS miniaturizes and combines them on a single chip, giving it several advantages, saving space, money, and increasing the sensitivity and accuracy of the integrated system. A micro-electromechanical relay is a type of MEM devices that is becoming increasingly important in a wide range of industries such as the computer industry ...


Dynamic Simulation Of A Mems Cantilever Switch, James W. Fonda, Steve Eugene Watkins Jan 2006

Dynamic Simulation Of A Mems Cantilever Switch, James W. Fonda, Steve Eugene Watkins

Electrical and Computer Engineering Faculty Research & Creative Works

The dynamic behavior of a micro-electro-mechanicalsystem (MEMS) cantilever switch is investigated. Overactuation of the switch can degrade bounce characteristics and reduce the lifetime of the contacts. This work concerns the development of a control system that limits the number of switch bounces and reduces the impact force on the beam tip. A limited mass-spring analysis of the tip-position is given and an associated control approach is applied. Input limiting, state-feedback, and adaptive control methods are compared. All results demonstrate improved switch bounce characteristics for the simplified beam model with the adaptive showing the best performance improvement. A comprehensive finite element ...


Electrodeposited Metal Matrix Nanocomposites As Thin Films And High Aspect Ratio Microstructures For Mems, Alonso Lozano Morales Jan 2006

Electrodeposited Metal Matrix Nanocomposites As Thin Films And High Aspect Ratio Microstructures For Mems, Alonso Lozano Morales

LSU Doctoral Dissertations

The electrodeposition of metal-matrix nanocomposites as thin film and high aspect ratio microstructures (HARM’s) for MicroElectroMechanical Systems (MEMS) components is examined. The effect of -Al2O3 nanopowder on copper reduction from acidic and basic electrolytes is examined with rotating disk electrodes (RDE’s). At pH 0.2, regions of copper inhibition and enhancement are identified in the kinetic regime. Low particle loading (12.5 g/L) results in an inhibited copper rate, while, high particle concentration (60 g/L) does both, inhibits the rate at low overpotentials and accelerates it at higher overpotentials, depending on the electrode rotation rate. At ...


Ultra-Violet Lithography Of Thick Photoresist For The Applications In Biomems And Micro Optics, Ren Yang Jan 2006

Ultra-Violet Lithography Of Thick Photoresist For The Applications In Biomems And Micro Optics, Ren Yang

LSU Doctoral Dissertations

UV lithography of thick photoresist is widely used in microelectromechanical systems (MEMS) and micro-optoelectromechanical systems (MOEMS). SU-8 is a typical negative tone thick photoresist for micro systems, and can be used for both structural material and pattern transfer. This dissertation presents an effort to comprehensively study these important subjects. The first part, and the most fundamental part of this dissertation concentrated on the numerical analysis and experimental study of the wavelength dependent absorbance of SU-8 and the diffraction effects on the sidewall profiles of the microstructures made using UV lithography of SU-8. This study has laid the foundation for all ...


Techniques In The Design Of Thermomechanical Microactuators, Larry L. Howell, Timothy W. Mclain, Michael S. Baker, Christian D. Lott Jan 2006

Techniques In The Design Of Thermomechanical Microactuators, Larry L. Howell, Timothy W. Mclain, Michael S. Baker, Christian D. Lott

Faculty Publications

The purpose of this chapter is to provide fundamental background for the design of thermomechanical microactuators. Actuation has been a particularly challenging aspect of microsystem development. Many actuation approaches used at the macro level, such as hydraulics, pneumatics, electric motors, internal combustion engines and turbines, are either too difficult to fabricate at the micro level or do not work well at that scale. Electrostatic attraction is one approach that has been widely used for actuation of microsystems; however, electrostatic actuators tend to have high voltage requirements and low output force capabilities. While electrostatic actuation is suitable for many applications, some ...