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A Development Framework For Hands-On Laboratory Modules In Microelectromechanical Systems (Mems), John Lee, Stacy H. Gleixner, Tai-Ran Hsu, David W. Parent
A Development Framework For Hands-On Laboratory Modules In Microelectromechanical Systems (Mems), John Lee, Stacy H. Gleixner, Tai-Ran Hsu, David W. Parent
David W. Parent
This paper presents work-in-progress in terms of a framework that we have structured to support effective joint development among faculty from different engineering backgrounds, spanning mechanical engineering (ME), electrical engineering (EE), and materials engineering (MatE). The framework is organized in short instructional modules designed to span not only major device types and different fabrication technologies, but also different levels of resource requirements. An example of using functional prerequisites--rather than course prerequisites—is presented for one module, wherein each functional prerequisite must be satisfied by at least one member of each student team that will undertake the module. Roles of the faculty …
Project-Based Introductory To Materials Engineering Modules On Biomaterials, Solid Oxide Fuel Cells, Non-Volatile Memory, And Fiber Reinforced Plastics, Stacy Gleixner, Elliot Douglas, Olivia Graeve
Project-Based Introductory To Materials Engineering Modules On Biomaterials, Solid Oxide Fuel Cells, Non-Volatile Memory, And Fiber Reinforced Plastics, Stacy Gleixner, Elliot Douglas, Olivia Graeve
Faculty Publications
PRIME Modules, Project Based Resources for Introduction to Materials Engineering, are being developed that utilize modern materials science and engineering technologies and proven education methodologies of active learning and open ended projects. The modules are designed for use in a freshmen/ sophomore level Introduction to Materials Engineering course. This course is required by most engineering programs and is an ideal place to excite students about their engineering majors and expose them to real world engineering experiences. Currently four of the classroom modules have been developed and utilized in Introduction to Materials classes. There is a non-volatile memory module where students …
The Microstructure And Grain Size Of Jet Electroplated Copper Films In Damascene Trench Features, Andrew Tzanavaras, Gregory Young, Stacy H. Gleixner
The Microstructure And Grain Size Of Jet Electroplated Copper Films In Damascene Trench Features, Andrew Tzanavaras, Gregory Young, Stacy H. Gleixner
Faculty Publications
The brightening additive level and dc current density of electroplating baths are two parameters that affect the gap-filling capability and the degree of impurity incorporation in electroplated copper films. Additive incorporation can inhibit grain growth during the room temperature recrystallization process and therefore affect the final grain size. This investigation explores the grain size and microstructure of dc jet-electroplated copper films in 0.35 and 0.50μm Damascene trenches as a function of current density and brightening additive level after first receiving a high-temperature anneal. Unlike a previous study that explored these variables in blanket Cu films [ J. Electrochem. Soc. , …