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Uv-Liga Micro-Fabrication Of Inertia Type Electrostatic Transducers And Their Application, Seok Jae Jeong

LSU Doctoral Dissertations

This dissertation discusses the design, working principles, static & dynamic analysis and simulation, mechanics of material, applied MEMS technology, micro-fabrication, and experimental testing of two types of micro-transducers: micro-power relay and micro-accelerometer. Several possible design concepts were proposed, and the advantages and disadvantages of electrostatic working principles were also discussed. Transducers presented in this research used electrostatic force as a driving force in the micro-relay and capacitance as a sensing parameter in the micro-accelerometer. There was an analogy between the micro-relay and the micro-accelerometer in their theoretical approach and fabrication processes. The proposed micro-transducers (micro-relay and micro-accelerometer) were fabricated using …