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Uv-Liga Micro-Fabrication Of Inertia Type Electrostatic Transducers And Their Application, Seok Jae Jeong
Uv-Liga Micro-Fabrication Of Inertia Type Electrostatic Transducers And Their Application, Seok Jae Jeong
LSU Doctoral Dissertations
This dissertation discusses the design, working principles, static & dynamic analysis and simulation, mechanics of material, applied MEMS technology, micro-fabrication, and experimental testing of two types of micro-transducers: micro-power relay and micro-accelerometer. Several possible design concepts were proposed, and the advantages and disadvantages of electrostatic working principles were also discussed. Transducers presented in this research used electrostatic force as a driving force in the micro-relay and capacitance as a sensing parameter in the micro-accelerometer. There was an analogy between the micro-relay and the micro-accelerometer in their theoretical approach and fabrication processes. The proposed micro-transducers (micro-relay and micro-accelerometer) were fabricated using …
A Generalized Approach For The Control Of Micro-Electromechanical Relays, Mohamed Abdelrahman Younis
A Generalized Approach For The Control Of Micro-Electromechanical Relays, Mohamed Abdelrahman Younis
LSU Master's Theses
MEMS (Micro-Electromechanical Systems) is an area of research and applications that is becoming increasingly popular. It's mainly concerned with integrating micro-mechanical transducers with micro-electronic circuits on common substrates, traditionally silicon, through micro-fabrication. Instead of traditionally having the transducer and the communicating (or control) circuit as two separate entities, MEMS miniaturizes and combines them on a single chip, giving it several advantages, saving space, money, and increasing the sensitivity and accuracy of the integrated system. A micro-electromechanical relay is a type of MEM devices that is becoming increasingly important in a wide range of industries such as the computer industry, the …