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Characterization And Tribological Behavior Of Diamond-Like Carbon And Nitrogen-Doped Diamond-Like Carbon Thin Films, Krishna Chaitanya Kadiyala
Characterization And Tribological Behavior Of Diamond-Like Carbon And Nitrogen-Doped Diamond-Like Carbon Thin Films, Krishna Chaitanya Kadiyala
LSU Master's Theses
Diamond-like carbon (DLC) films have been extensively studied for more than two decades due to their highly attractive properties. These films exhibit unique mechanical, electrical and tribological behavior and thus, possess great potential for applications in tribology. However, the high level of internal stress developed and low thermal stability are the main drawbacks. Synthesis of nitrogen-doped DLC (N-DLC) offers the possibility of overcoming these drawbacks. In the present study, DLC and N-DLC films (with low N content) were deposited on Si substrates using a hybrid plasma-assisted CVD/PVD process. Film characterization in terms of microstructure, composition and chemical state of components …