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Integrated Piezoresistive Sensing For Feedback Control Of Compliant Mems, Robert K. Messenger
Integrated Piezoresistive Sensing For Feedback Control Of Compliant Mems, Robert K. Messenger
Theses and Dissertations
Feedback control of MEMS devices has the potential to significantly improve device performance and reliability. One of the main obstacles to its broader use is the small number of on-chip sensing options available to MEMS designers. A method of using integrated piezoresistive sensing is proposed and demonstrated as another option. Integrated piezoresistive sensing utilizes the inherent piezoresistive property of polycrystalline silicon from which many MEMS devices are fabricated. As compliant MEMS structures flex to perform their functions, their resistance changes. That resistance change can be used to transduce the structures' deflection into an electrical signal. This dissertation addresses three topics …
Nonlinear Vibration And Frequency Response Analysis Of Nanomechanical Cantilever Beams, Seyed Nima Mahmoodi
Nonlinear Vibration And Frequency Response Analysis Of Nanomechanical Cantilever Beams, Seyed Nima Mahmoodi
All Dissertations
Microcantilevers are one the most commonly utilized microelectromechanical systems in a variant of the ultra-precise scanning and characterization application. Of particular interest, the problem of vibrations of microcantilevers has recently received considerable attention due to its application in several nanotechnological instruments such as atomic force microscopy, nanomechanical cantilever sensors and friction force microscopy. For applications such as these, the problem of coupled flexural-torsional nonlinear vibrations of a piezoelectrically-actuated microcantilever beam is considered in this dissertation. The actuation and sensing are both facilitated through bonding a piezoelectric layer (here, ZnO) on the microcantilever surface. The beam is considered to have simultaneous …
Toward A Flying Mems Robot, Nathan E. Glauvitz
Toward A Flying Mems Robot, Nathan E. Glauvitz
Theses and Dissertations
The work in this thesis includes the design, modeling, and testing of motors and rotor blades to be used on a millimeter-scale helicopter style flying micro air vehicle (MAV). Three different types of motor designs were developed and tested, which included circular scratch drives, electrostatic motors, and comb drive resonators. Six different rotor designs were tested; five used residual stress while one design used photoresist to act as a hinge to achieve rotor blade deflection. Two key parameters of performance were used to evaluate the motor and rotor blade designs: the frequency of motor rotation and the angle of deflection …
Bio-Mechanically Driven Mems Power Generator For Implantable Medical Devices., Jose Martinez-Quijada
Bio-Mechanically Driven Mems Power Generator For Implantable Medical Devices., Jose Martinez-Quijada
Electronic Theses and Dissertations
No abstract provided.
A Mems Non-Planar Ultrasonic Microarray., Matthew Meloche
A Mems Non-Planar Ultrasonic Microarray., Matthew Meloche
Electronic Theses and Dissertations
No abstract provided.
Monolithic Integration Of High-Aspect-Ratio Microstructures With Cmos Circuitry, Tinghui Xin
Monolithic Integration Of High-Aspect-Ratio Microstructures With Cmos Circuitry, Tinghui Xin
LSU Doctoral Dissertations
This work involves developing processing techniques for monolithically integrating a high-aspect-ratio microstructures with CMOS circuitry. A microsystem comprising of a microprobe array and signal processing circuitry is utilized as a test vehicle to demonstrate this fabrication process. One potential application of this microsystem is for recording neural signals from the central nervous system. The main results include thick photoresist processing, DC and pulse electroplating to form high-aspect-ratio microprobes, microprobe sharpening and developing a post-IC monolithic integration process. SU-8 is utilized for thick photoresist application. This work focuses on realization of a deep microrecess array in thick resists rather than traditional …