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Polymer-Derived Ceramics: Electronic Properties And Application, Weixing Xu
Polymer-Derived Ceramics: Electronic Properties And Application, Weixing Xu
Electronic Theses and Dissertations
In this work, we studied the electronic behavior of polymer-derived ceramics (PDCs) and applied them for the synthesis of carbon nanotube reinforced ceramic nanocomposites and ceramic MEMS (Micro-Electro-Mechanical Systems) structures. Polymer-derived SiCN ceramics were synthesized by pyrolysis of a liquid polyureasilazane with dicumyl peroxide as thermal initiator. The structural evolution during pyrolysis and post-annealing was studied using FTIR, solid state NMR and Raman. The results revealed that the resultant ceramics consisted of SiCxNx-4 as major building units. These units were connected with each other through C-C/C=C bonds or by shearing N/C. The amount of sp2 free carbon strongly depends on …