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Articles 1 - 25 of 25
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Radiation Studies Of The Tin-Doped Microscopic Droplet Laser Plasma Light Source Specific To Euv Lithography, Chiew-Seng Koay
Radiation Studies Of The Tin-Doped Microscopic Droplet Laser Plasma Light Source Specific To Euv Lithography, Chiew-Seng Koay
Electronic Theses and Dissertations
Extreme ultraviolet lithography(EUVL) is being developed worldwide as the next generation technology to be inserted in ~ 2009 for the mass production of IC chips with feature sizes <35 nm. One major challenge to its implementation is the development of a 13.5 nm EUV source of radiation that meets the requirements of current roadmap designs of the source of illumination in commercial EUVL scanners. The light source must be debris-free, in a free-space environment with the imaging EUV optics that must provide sufficient, narrow spectral band EUV power to print 100 wafers/hr. To meet this need, extensive studies on emission from a laser plasma source utilizing tin-doped droplet target was conducted. Presented in this work, are the many optical techniques such as spectroscopy, radiometry, and imaging, that were employed to characterize and optimize emission from the laser plasma source State of the art EUV spectrographs were employed to observe the source's spectrum under various laser irradiation conditions. Comparing the experimental spectra to those from theory, has allowed the determination of the Sn ion stages responsible for emitting into the useful EUV bandwidth. Experimental results were compared to spectral simulations obtained using Collisional-Radiative Equilibrium (CRE) model, as well. Moreover, extensive measurements surveying source emission from 2 nm to 30 nm, which is the region of the electromagnetic spectrum defined as EUV, was accomplished. Absolutely calibrated metrology was employed with the Flying Circus instrument from which the source's conversion efficiency (CE)--from laser to the useful EUV energy--was characterized under various laser irradiation conditions. Hydrodynamic simulations of the plasma expansion together with the CRE model predicted the condition at which optimum conversion could be attained. The condition was demonstrated experimentally, with the highest CE to be slightly above 2%, which is the highest value among all EUV source contenders. In addition to laser intensity, the CE was found to depend on the laser wavelength. For better understanding, this observation is compared to results from simulations. Through a novel approach in imaging, the size of the plasma was characterized by recording images of the plasma within a narrow band, around 13.5 nm. The size, approximately 100 ìm, is safely within the etendue limit set by the optical elements in the EUV scanner. Finally, the notion of irradiating the target with multiple laser beams was explored for the possibility of improving the source's conversion efficiency.
Polarimetry Of Random Fields, Jeremy Ellis
Polarimetry Of Random Fields, Jeremy Ellis
Electronic Theses and Dissertations
On temporal, spatial and spectral scales which are small enough, all fields are fully polarized. In the optical regime, however, instantaneous fields can rarely be examined, and, instead, only average quantities are accessible. The study of polarimetry is concerned with both the description of electromagnetic fields and the characterization of media a field has interacted with. The polarimetric information is conventionally presented in terms of second order field correlations which are averaged over the ensemble of field realizations. Motivated by the deficiencies of classical polarimetry in dealing with specific practical situations, this dissertation expands the traditional polarimetric approaches to include …
Synchronization In Advanced Optical Communications, Inwoong Kim
Synchronization In Advanced Optical Communications, Inwoong Kim
Electronic Theses and Dissertations
The objective of this dissertation is to generate high power ultrashort optical pulses from an all-semiconductor mode-locked laser system. The limitations of semiconductor optical amplifier in high energy, ultrashort pulse amplification are reviewed. A method to overcome the fundamental limit of small stored energy inside semiconductor optical amplifier called "eXtreme Chirped Pulse Amplification (X-CPA)" is proposed and studied theoretically and experimentally. The key benefits of the concept of X-CPA are addressed. Based on theoretical and experimental study, an all-semiconductor mode-locked X-CPA system consisting of a mode-locked master oscillator, an optical pulse pre-stretcher, a semiconductor optical amplifier (SOA) pulse picker, an …
Integrated Inp Photonic Switches, Daniel May-Arrioja
Integrated Inp Photonic Switches, Daniel May-Arrioja
Electronic Theses and Dissertations
Photonic switches are becoming key components in advanced optical networks because of the large variety of applications that they can perform. One of the key advantages of photonic switches is that they redirect or convert light without having to make any optical to electronic conversions and vice versa, thus allowing networking functions to be lowered into the optical layer. InP-based switches are particularly attractive because of their small size, low electrical power consumption, and compatibility with integration of laser sources, photo-detectors, and electronic components. In this dissertation the development of integrated InP photonic switches using an area-selective zinc diffusion process …
Experimental Techniques For Nonlinear Material Characterization: A Nonlinear Spectrometer Using A White-Light Continuum Z-Scan, Mihaela Balu
Experimental Techniques For Nonlinear Material Characterization: A Nonlinear Spectrometer Using A White-Light Continuum Z-Scan, Mihaela Balu
Electronic Theses and Dissertations
The main goal of this dissertation is to introduce and demonstrate a new method for the rapid determination of the nonlinear absorption spectra and the dispersion of the nonlinear refraction of optical materials in the visible and near IR spectral regions. However, conventional methods like, white-light continuum pump-probe and Z-scan techniques were used to measure the peak 2PA cross-sections for a number of commercially available photoinitiators. In the new method mentioned above, a high energy, broadband femtosecond white-light continuum is used to replace the single wavelength source conventionally used in a Z-scan experiment. In a Z-scan experiment, the transmittance of …
Polarization-Independent Liquid Crystal Devices, Yi-Hsin Lin
Polarization-Independent Liquid Crystal Devices, Yi-Hsin Lin
Electronic Theses and Dissertations
Liquid crystal (LC) devices can be operated as amplitude modulators and phase modulators. LC amplitude modulation is commonly used in liquid crystal display (LCD) while phase-only modulation is useful for laser beam steering, tunable grating, prism, lens, and other photonic devices. Most LC devices are polarization dependent and require at least one polarizer. As a result, the optical efficiency is low. To enhance display brightness, a power hungry backlight has to be used leading to a high power consumption and short battery life. In a LC phase modulator, the polarization dependent property complicates the laser beam steering system. It is …
On The Use Of Variable Coherence In Inverse Scattering Problems, Erwan Baleine
On The Use Of Variable Coherence In Inverse Scattering Problems, Erwan Baleine
Electronic Theses and Dissertations
Even though most of the properties of optical fields, such as wavelength, polarization, wavefront curvature or angular spectrum, have been commonly manipulated in a variety of remote sensing procedures, controlling the degree of coherence of light did not find wide applications until recently. Since the emergence of optical coherence tomography, a growing number of scattering techniques have relied on temporal coherence gating which provides efficient target selectivity in a way achieved only by bulky short pulse measurements. The spatial counterpart of temporal coherence, however, has barely been exploited in sensing applications. This dissertation examines, in different scattering regimes, a variety …
Ultrashort, High Power, And Ultralow Noise Mode-Locked Optical Pulse Generation Using Quantum-Dot Semiconductor Lasers, Myoung-Taek Choi
Ultrashort, High Power, And Ultralow Noise Mode-Locked Optical Pulse Generation Using Quantum-Dot Semiconductor Lasers, Myoung-Taek Choi
Electronic Theses and Dissertations
This dissertation explores various aspects and potential of optical pulse generation based on active, passive, and hybrid mode-locked quantum dot semiconductor lasers with target applications such as optical interconnect and high speed signal processing. Design guidelines are developed for the single mode operation with suppressed reflection from waveguide discontinuities. The device fabrication procedure is explained, followed by characteristics of FP laser, SOA, and monolithic two-section devices. Short pulse generation from an external cavity mode-locked QD two-section diode laser is studied. High quality, sub-picosecond (960 fs), high peak power (1.2 W) pulse trains are obtained. The sign and magnitude of pulse …
Design And Optimization Of Nano-Optical Elements By Coupling Fabrication To Optical Behavior, Raymond Rumpf
Design And Optimization Of Nano-Optical Elements By Coupling Fabrication To Optical Behavior, Raymond Rumpf
Electronic Theses and Dissertations
Photonic crystals and nanophotonics have received a great deal of attention over the last decade, largely due to improved numerical modeling and advances in fabrication technologies. To this day, fabrication and optical behavior remain decoupled during the design phase and numerous assumptions are made about "perfect" geometry. As research moves from theory to real devices, predicting device behavior based on realistic geometry becomes critical. In this dissertation, a set of numerical tools was developed to model micro and nano fabrication processes. They were combined with equally capable tools to model optical performance of the simulated structures. Using these tools, it …
Probing Random Media With Singular Waves, Chaim Schwartz
Probing Random Media With Singular Waves, Chaim Schwartz
Electronic Theses and Dissertations
In recent years a resurgence of interest in wave singularities (of which optical vortices are a prominent example), light angular momentum and the relations between them has occurred. Many applications in various areas of linear and non-linear optics have been based on studying effects related to angular momentum and optical vortices. This dissertation examines the use of such wave singularities for studying the light propagation in highly inhomogeneous media and the relationship to angular momentum transfer. Angular momentum carried by light can be, in many cases, divided in two terms. The first one relates to the polarization of light and …
External Cavity Multiwavelength Semiconductor Mode-Locked Laser Gain Dynamics, Luis Archundia-Berra
External Cavity Multiwavelength Semiconductor Mode-Locked Laser Gain Dynamics, Luis Archundia-Berra
Electronic Theses and Dissertations
External cavity semiconductor mode-locked lasers can produce pulses of a few picoseconds. The pulses from these lasers are inherently chirped with a predominant linear chirp component that can be compensated resulting in sub-picosecond pulses. External cavity semiconductor mode-locked lasers can be configured as multiwavelength pulse sources and are good candidates for time and wavelength division multiplexing applications. The gain medium in external cavity semiconductor mode-locked lasers is a semiconductor optical amplifier (SOA), and passive and hybrid mode-locked operation are achieved by the introduction of a saturable absorber (SA) in the laser cavity. Pump-probe techniques were used to measure the intracavity …
High Birefringence And Low Viscosity Liquid Crystals, Chien-Hui Wen
High Birefringence And Low Viscosity Liquid Crystals, Chien-Hui Wen
Electronic Theses and Dissertations
In this dissertation, liquid crystal (LC) materials and devices are investigated in order to meet the challenges for photonics and displays applications. We have studied three kinds of liquid crystal materials: positive dielectric anisotropic LCs, negative dielectric anisotropic LCs, and dual- frequency LCs. For the positive dielectric anisotropic LCs, we have developed some high birefringence isothiocyanato tolane LC compounds with birefringence ~0.4, and super high birefringence isothiocyanato biphenyl-bistolane LC compounds with birefringence as high as ~0.7. Moreover, we have studied the photostability of several high birefringence LC compounds, mixtures, and LC alignment layers in order to determine the failure mechanism …
Antenna-Coupled Infrared And Millimeter-Wave Detectors: Fabrication, Measurement And Optimization, Charles Middleton
Antenna-Coupled Infrared And Millimeter-Wave Detectors: Fabrication, Measurement And Optimization, Charles Middleton
Electronic Theses and Dissertations
Antenna-coupled detectors provide uncooled, cost-effective solutions for infrared and millimeter-wave imaging. This work describes the design, fabrication, measurement, and optimization of several types of antenna-coupled detectors for LWIR (8 - 12 µm) and 94 GHz radiation. Two types of millimeter-wave antenna-coupled detectors were fabricated and tested: a slot antenna coupled to a bolometer, and a patch antenna coupled to a SiC Schottky diode. Electromagnetic modeling of the antennas helped guide the design of antennas with better impedance matching to the detectors. Schottky diodes are discussed as detectors for millimeter-wave and infrared radiation, with the goal of increasing the cutoff frequency …
All-Semiconductor High Power Mode-Locked Laser System, Kyungbum Kim
All-Semiconductor High Power Mode-Locked Laser System, Kyungbum Kim
Electronic Theses and Dissertations
All-optical synchronization and its application in advanced optical communications have been investigated in this dissertation. Dynamics of all-optical timing synchronization (clock recovery) using multi-section gain-coupled distributed-feedback (MS-GC DFB) lasers are discussed. A record speed of 180-GHz timing synchronization has been demonstrated using this device. An all-optical carrier synchronization (phase and polarization recovery) scheme from PSK (phase shift keying) data is proposed and demonstrated for the first time. As an application of all-optical synchronization, the characterization of advanced modulation formats using a linear optical sampling technique was studied. The full characterization of 10-Gb/s RZ-BPSK (return-to-zero binary PSK) data has been demonstrated. …
Fast Response Liquid Crystal Devices, Yung-Hsun Wu
Fast Response Liquid Crystal Devices, Yung-Hsun Wu
Electronic Theses and Dissertations
Liquid crystal (LC) has been widely used for displays, spatial light modulators, variable optical attenuators (VOAs) and other tunable photonic devices. The response time of these devices is mainly determined by the employed liquid crystal material. How to obtain fast response for the LC devices is a fundamentally important and technically challenging task. In this dissertation, we investigate several methods to improve liquid crystal response time, for examples, using dual-frequency liquid crystals, polymer stabilized liquid crystals, and sheared polymer network liquid crystals. We discover a new class of material, denoted as sheared polymer network liquid crystal (SPNLC) which exhibits a …
Direct Nonlinear Optics Measurements Of Raman Gain In Bulk Glasses And Estimates Of Fiber Performance, Robert Stegeman
Direct Nonlinear Optics Measurements Of Raman Gain In Bulk Glasses And Estimates Of Fiber Performance, Robert Stegeman
Electronic Theses and Dissertations
The need for more bandwidth in communications has stimulated the search for new fiberizable materials with properties superior to fused silica which is the current state-of-the-art. One of the key properties is Raman gain by which a pump beam amplifies a signal beam of longer wavelength. An apparatus capable of directly measuring the spectral dependence and absolute magnitude of the material Raman gain coefficient using nonlinear optics techniques has been built. Using radiation from a 1064 nm Nd:YAG laser as the pump and from a tunable Optical Parametric Generator and Amplifier as the signal, the Raman gain spectrum was measured …
Integrated Wavelength Stabilization Of Broad Area Semiconductor Lasers Using A Dual Grating Reflector, Jason O'Daniel
Integrated Wavelength Stabilization Of Broad Area Semiconductor Lasers Using A Dual Grating Reflector, Jason O'Daniel
Electronic Theses and Dissertations
A new fully integrated wavelength stabilization scheme based on grating-coupled surface-emitting lasers is explored. This wavelength stabilization scheme relies on two gratings. The first grating is fabricated on the p-side of the semiconductor laser in close proximity to the laser waveguide such that it couples light out of the guided mode of the waveguide into a propagating mode in the substrate; this grating is known as the grating coupler. The second grating is fabricated on the n-side of the substrate such that for the stabilization wavelength, this second grating operates in the Littrow condition and is known as the feedback …
Propagation Effect In Inhomogeneous Media, Including Media With Light-Induced And Fixed Gratings, Chang-Ching Tsai
Propagation Effect In Inhomogeneous Media, Including Media With Light-Induced And Fixed Gratings, Chang-Ching Tsai
Electronic Theses and Dissertations
Optical waves propagation in various types of volume gratings, materials with constant impendence and optical fibers are studied. Instability of crossphase modulation and of Energy transfer via GRON-type (Grating-type Orientational Nonlinearity in Liquid Crystal) Stimulated Scattering is numerically observed. Two diffractive optical elements made of volume gratings are suggested and analyzed. A transmission hologram based on the analogy with Stimulated Raman Adiabatic Passage (STIRAP) in nonlinear optics is proposed. This transmission hologram demonstrates high diffraction efficiency and low sensitivity to polarization and hologram strength. The other is a reflection hologram with two crossed-gratings. It features good angular selectivity in comparison …
Effect Of Germanium Doping On Erbium Sensitization In The Erbium Doped Silicon Rich Silica Material System, Forrest Ruhge
Effect Of Germanium Doping On Erbium Sensitization In The Erbium Doped Silicon Rich Silica Material System, Forrest Ruhge
Electronic Theses and Dissertations
The continued size reduction in electronic integrated circuits has lead to a demand for on-chip high-bandwidth and low loss communication channels. Optical interconnects are considered an essential addition to the silicon electronics platform. A major challenge in the field of integrated Si photonics is the development of cost effective silicon compatible light sources. This thesis investigates the sensitization of group IV doped silica films emitting at 1.535μm for applications as silicon compatible light sources. Thin erbium-doped silica films containing excess silicon and germanium were deposited using a multi-gun sputter system. The composition of the deposited materials was verified by Rutherford …
Molecular Structure-Nonlinear Optical Property Relationships For A Series Of Polymethine And Squaraine Molecules, Jie Fu
Electronic Theses and Dissertations
This dissertation reports on the investigation of the relationships between molecular structure and two-photon absorption (2PA) properties for a series of polymethine and squaraine molecules. Current and emerging applications exploiting the quadratic dependence upon laser intensity, such as two-photon fluorescence imaging, three-dimensional microfabrication, optical data storage and optical limiting, have motivated researchers to find novel materials exhibiting strong 2PA. Organic materials are promising candidates because their linear and nonlinear optical properties can be optimized for applications by changing their structures through molecular engineering. Polymethine and squaraine dyes are particularly interesting because they are fluorescent and showing large 2PA. We used …
Three-Photon Absorption Process In Organic Dyes Enhanced By Surface Plasmon Resonance, Ion Cohanoschi
Three-Photon Absorption Process In Organic Dyes Enhanced By Surface Plasmon Resonance, Ion Cohanoschi
Electronic Theses and Dissertations
Multi-photon absorption processes have received significant attention from the scientific community during the last decade, mainly because of their potential applications in optical limiting, data storage and biomedical fields. Perhaps, one of the most investigated processes studied so far has been two-photon absorption (2PA). These investigations have resulted in successful applications in all the fields mentioned above. However, 2PA present some limitations in the biomedical field when pumping at typical 2PA wavelengths. In order to overcome these limitations, three-photon absorption (3PA) process has been proposed. However, 3PA in organic molecules has a disadvantage, typical values of σ3' are small (10-81 …
Applications Of Linear And Nonlinear Optical Effects In Liquid Crystals, Hakob Sarkissian
Applications Of Linear And Nonlinear Optical Effects In Liquid Crystals, Hakob Sarkissian
Electronic Theses and Dissertations
Liquid crystals have been a major subject of research for the past decades. Aside from the variety of structures they can form, they exhibit a vast range of optical phenomena. Many of these phenomena found applications in technology and became an essential part of it. In this dissertation thesis we continue the line to propose a number of new applications of optical effects in liquid crystals and develop their theoretical framework. One such application is the possibility of beam combining using Orientational Stimulated Scattering in a nematic liquid crystal cell. Our numerical study of the OSS process shows that normally …
Predicting Surface Scatter Using A Linear Systems Formulation Of Non-Paraxial Scalar Diffraction, Andrey Krywonos
Predicting Surface Scatter Using A Linear Systems Formulation Of Non-Paraxial Scalar Diffraction, Andrey Krywonos
Electronic Theses and Dissertations
Scattering effects from rough surfaces are non-paraxial diffraction phenomena resulting from random phase variations in the reflected wavefront. The ability to predict these effects is important in a variety of applications including x-ray and EUV imaging, the design of stray light rejection systems, and reflection modeling for rendering realistic scenes and animations of physical objects in computer graphics. Rayleigh-Rice (small perturbation method) and Beckmann-Kirchoff (Kirchhoff approximation) theories are commonly used to predict surface scatter effects. In addition, Harvey and Shack developed a linear systems formulation of surface scatter phenomena in which the scattering behavior is characterized by a surface transfer …
Additive Lithography Fabrication And Integration Of Micro Optics, Mahesh Pitchumani
Additive Lithography Fabrication And Integration Of Micro Optics, Mahesh Pitchumani
Electronic Theses and Dissertations
Optical elements are the fundamental components in photonic systems and are used to transform an input optical beam into a desired beam profile or to couple the input beam into waveguides, fibers, or other optical systems or devices. Macroscopic optical elements are easily fabricated using grinding and polishing techniques, but few methods exist for inexpensive fabrication of micro optical elements. In this work we present an innovative technique termed Additive Lithography that makes use of binary masks and controlled partial exposures to sculpt photoresist into the desired optical surface relief profile. We explore various masking schemes for fabricating a variety …
Up-Conversion In Rare-Earth Doped Micro-Particles Applied To New Emissive 2d Dislays, Anne Milliez
Up-Conversion In Rare-Earth Doped Micro-Particles Applied To New Emissive 2d Dislays, Anne Milliez
Electronic Theses and Dissertations
Up-conversion (UC) in rare-earth co-doped fluorides to convert diode laser light in the near infrared to red, green and blue visible light is applied to make possible high performance emissive displays. The infrared-to-visible UC in the materials we study is a sequential form of non-linear two photon absorption in which a strong absorbing constituent absorbs two low energy photons and transfers this energy to another constituent which emits visible light. Some of the UC emitters' most appealing characteristics for displays are: a wide color gamut with very saturated colors, very high brightness operation without damage to the emitters, long lifetimes …