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Wayne State University Dissertations
AlN Surface Acoustic Wave Device, Finite Element Simulation, Pressure Sensor
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Design And Fabrication Of A Prototype Aluminum Nitride-Based Pressure Sensor With Finite Element Analysis And Validation, Xinyu Du
Wayne State University Dissertations
Since 1985 when the first robot PUMA 560 was employed to place a needle during a brain CT biopsy, surgical robots have become ubiquitous in clinical surgeries. Despite its advantages and success in surgeries, the interactions between the robot and the surgeons remain deficient, especially for the pressure sensing which plays an important role. Inspired by our previous work on bacterial sensing, in the current work I have designed, fabricated, analyzed, and evaluated an innovative prototype pressure sensor based on Aluminum Nitride (AlN) Surface Acoustic Wave (SAW) and Shear Horizontal (SH)-SAW. This AlN-based device has unique superiority over other SAW …